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1.发明授权Method for forming anodized layer, method for producing mold and method for producing antireflective film 有权形成阳极氧化层的方法，制造模具的方法和制造抗反射膜的方法公开(公告)号：US09108351B2
公开(公告)日：2015-08-18
申请号：US13583399
申请日：2011-03-08
IPC分类号： B29C33/42 , C25D11/12 , G02B1/11 , B29C45/37 , C25D11/18 , G02B1/118 , C25D11/16 , B29C33/56 , C25D11/04
CPC分类号： G02B1/118 , B29C33/424 , B29C33/565 , B29C45/26 , B29C45/372 , C25D11/04 , C25D11/045 , C25D11/12 , C25D11/16 , C25D11/18
摘要： An anodized layer formation method of an embodiment of the present invention includes the step a of providing an aluminum film which is formed on a first principal surface of a support and the step b of anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions. In the step a, a second principal surface of the support which is opposite to the first principal surface is provided with a low heat conduction member that has a predetermined pattern. According to an embodiment of the present invention, a porous alumina layer can be formed which includes regions of different minute structures in the predetermined pattern.
摘要翻译： 本发明的一个实施方案的阳极氧化层形成方法包括提供形成在载体的第一主表面上的铝膜的步骤a和阳极氧化铝膜表面的步骤b以形成多孔氧化铝层 其具有多个微小的凹部。 在步骤a中，支撑体的与第一主表面相对的第二主表面设置有具有预定图案的低导热构件。 根据本发明的一个实施方案，可以形成多孔氧化铝层，其包括具有预定图案的不同微小结构的区域。
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公开(公告)号：US08999133B2
公开(公告)日：2015-04-07
申请号：US13819547
申请日：2011-08-22
CPC分类号： C25F3/02 , B29C33/424 , B29C33/56 , C25D11/024 , C25D11/12 , C25D11/24
摘要： An anodized layer formation method includes: providing an aluminum film provided on a support or an aluminum base; and forming a porous alumina layer which has minute recessed portions by applying a voltage between an anode which is electrically coupled to a surface of the aluminum film or the aluminum base and a cathode which is provided in an electrolytic solution with the surface of the aluminum film or the aluminum base being in contact with the electrolytic solution. The forming of the porous alumina layer includes increasing the voltage to a target value and, before the voltage is increased to the target value, increasing the voltage to a first peak value which is lower than the target value and thereafter decreasing the voltage to a value which is lower than the first peak value. As such, an anodized layer with reduced variation of recessed portions can be formed.
摘要翻译： 阳极氧化层形成方法包括：提供设置在支撑体或铝基底上的铝膜; 以及通过在与铝膜或铝基底的表面电耦合的阳极和在铝电解液的表面上设置在电解液中的阴极之间施加电压而形成具有微小凹陷部分的多孔氧化铝层 或铝基与电解液接触。 多孔氧化铝层的形成包括将电压增加到目标值，并且在电压增加到目标值之前，将电压增加到低于目标值的第一峰值，然后将电压降低到值 其低于第一峰值。 因此，可以形成具有减小的凹部的变化的阳极氧化层。
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公开(公告)号：US09405043B2
公开(公告)日：2016-08-02
申请号：US13643632
申请日：2011-04-01
IPC分类号： G02B1/11 , C25D11/14 , C23F1/04 , G02B1/118 , B29C33/42 , B29C33/56 , B29D11/00 , C25D11/12 , C25D11/24 , C25D11/10
CPC分类号： G02B1/11 , B29C33/424 , B29C33/56 , B29D11/0048 , B29D11/00865 , C23F1/04 , C25D11/10 , C25D11/12 , C25D11/24 , G02B1/118
摘要： A mold manufacturing method of an embodiment of the present invention includes the steps of: (a) providing a mold base; (b) partially anodizing the aluminum layer to form a porous alumina layer, the porous alumina layer having a porous layer which defines a plurality of minute recessed portions and a barrier layer which is provided at a bottom of each of the plurality of minute recessed portions; and (c) after step (b), performing etching, thereby enlarging the plurality of minute recessed portions of the porous alumina layer, wherein in step (c) the etching is performed such that an average depth of the plurality of minute recessed portions increases but does not exceed a 1/7 of an average thickness of the barrier layer before the etching.
摘要翻译： 本发明实施例的模具制造方法包括以下步骤：（a）提供模具底座; （b）部分阳极氧化铝层以形成多孔氧化铝层，所述多孔氧化铝层具有限定多个微小凹部的多孔层和设置在所述多个微小凹部中的每一个的底部的阻挡层 ; 和（c）在步骤（b）之后进行蚀刻，从而扩大多孔氧化铝层的多个微小凹陷部分，其中在步骤（c）中进行蚀刻，使得多个微小凹陷部分的平均深度增加 但不超过蚀刻前的阻挡层的平均厚度的1/7。
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公开(公告)号：US20130094089A1
公开(公告)日：2013-04-18
申请号：US13643632
申请日：2011-04-01
CPC分类号： G02B1/11 , B29C33/424 , B29C33/56 , B29D11/0048 , B29D11/00865 , C23F1/04 , C25D11/10 , C25D11/12 , C25D11/24 , G02B1/118
摘要： A mold manufacturing method of an embodiment of the present invention includes the steps of: (a) providing a mold base; (b) partially anodizing the aluminum layer to form a porous alumina layer, the porous alumina layer having a porous layer which defines a plurality of minute recessed portions and a barrier layer which is provided at a bottom of each of the plurality of minute recessed portions; and (c) after step (b), performing etching, thereby enlarging the plurality of minute recessed portions of the porous alumina layer, wherein in step (c) the etching is performed such that an average depth of the plurality of minute recessed portions increases but does not exceed a 1/7 of an average thickness of the barrier layer before the etching.
摘要翻译： 本发明实施例的模具制造方法包括以下步骤：（a）提供模具底座; （b）部分阳极氧化铝层以形成多孔氧化铝层，所述多孔氧化铝层具有限定多个微小凹部的多孔层和设置在所述多个微小凹部中的每一个的底部的阻挡层 ; 和（c）在步骤（b）之后进行蚀刻，从而扩大多孔氧化铝层的多个微小凹陷部分，其中在步骤（c）中进行蚀刻，使得多个微小凹陷部分的平均深度增加 但不超过蚀刻前的阻挡层的平均厚度的1/7。
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5.发明申请DIE, PROCESS FOR PRODUCING DIE, AND PROCESS FOR PRODUCING ANTIREFLECTION FILM 有权DIE，生产DIE的方法，以及生产抗反射膜的方法公开(公告)号：US20120318772A1
公开(公告)日：2012-12-20
申请号：US13582033
申请日：2011-03-22
CPC分类号： G02B1/118 , B29C59/046 , B29C2035/0827 , C25D11/04 , C25D11/045 , C25D11/12 , C25D11/24
摘要： A method is provided for manufacturing a mold that has a porous alumina layer over its surface, which is capable of preventing formation of pits (recesses). A moth-eye mold manufacturing method of an embodiment of the present invention is a method for manufacturing a mold which has a porous alumina layer over its surface, including the steps of: providing a mold base which includes an aluminum base and an aluminum film deposited on a surface of the aluminum base, the aluminum film having a purity of not less than 99.99 mass %; anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions; and bringing the porous alumina layer into contact with an etching solution to enlarge the plurality of minute recessed portions of the porous alumina layer.
摘要翻译： 提供了一种用于制造在其表面上具有多孔氧化铝层的模具的方法，其能够防止形成凹坑（凹部）。 本发明的实施例的蛾眼模具的制造方法是在其表面上具有多孔氧化铝层的模具的制造方法，包括以下步骤：提供包括铝基底和铝膜沉积的模具基底 在铝基材的表面上，铝膜的纯度不低于99.99质量％; 阳极氧化铝膜的表面以形成具有多个微小凹陷部分的多孔氧化铝层; 并且使多孔氧化铝层与蚀刻溶液接触，以使多孔氧化铝层的多个微小凹陷部分扩大。
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6.发明申请MOLD, METHOD FOR PRODUCING MOLD, AND METHOD FOR PRODUCING NANOIMPRINT FILM 审中-公开模具，生产模具的方法以及制造纳米薄膜的方法公开(公告)号：US20130341823A1
公开(公告)日：2013-12-26
申请号：US14004190
申请日：2012-03-01
IPC分类号： B29C59/02
CPC分类号： B29C59/026 , B29C33/3842 , B29C33/424 , B29C59/04 , B29C2059/023 , B82Y30/00 , B82Y40/00
摘要： A mold is disclosed, which is capable of producing a nanoimprint film without a problem of clogging of irregularities of the mold with a resin material. A method for producing the mold and a method for producing a nanoimprint film using the mold are further disclosed. In an embodiment, the mold includes: a first surface having a nanostructure including plural recesses spaced at an interval of less than 1 μm between bottom points of adjacent recesses; and at least two second surfaces substantially not having the nanostructure, wherein the first surface is coplanar with the at least two second surfaces and is positioned between two second surfaces.
摘要翻译： 公开了一种能够制造纳米压印膜的模具，而没有使用树脂材料堵塞模具的不规则性的问题。 还公开了一种用于制造模具的方法和使用该模具制造纳米压印膜的方法。 在一个实施例中，模具包括：具有纳米结构的第一表面，该纳米结构包括在相邻凹槽的底点之间以小于1um的间隔隔开的多个凹槽; 以及基本上不具有纳米结构的至少两个第二表面，其中所述第一表面与所述至少两个第二表面共面并且位于两个第二表面之间。
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公开(公告)号：US20130153537A1
公开(公告)日：2013-06-20
申请号：US13819547
申请日：2011-08-22
IPC分类号： C25F3/02
CPC分类号： C25F3/02 , B29C33/424 , B29C33/56 , C25D11/024 , C25D11/12 , C25D11/24
摘要： An anodized layer formation method includes: providing an aluminum film provided on a support or an aluminum base; and forming a porous alumina layer which has minute recessed portions by applying a voltage between an anode which is electrically coupled to a surface of the aluminum film or the aluminum base and a cathode which is provided in an electrolytic solution with the surface of the aluminum film or the aluminum base being in contact with the electrolytic solution. The forming of the porous alumina layer includes increasing the voltage to a target value and, before the voltage is increased to the target value, increasing the voltage to a first peak value which is lower than the target value and thereafter decreasing the voltage to a value which is lower than the first peak value. As such, an anodized layer with reduced variation of recessed portions can be formed.
摘要翻译： 阳极氧化层形成方法包括：提供设置在支撑体或铝基底上的铝膜; 以及通过在与铝膜或铝基底的表面电耦合的阳极和在铝电解液的表面上设置在电解液中的阴极之间施加电压而形成具有微小凹陷部分的多孔氧化铝层 或铝基与电解液接触。 多孔氧化铝层的形成包括将电压增加到目标值，并且在电压增加到目标值之前，将电压增加到低于目标值的第一峰值，然后将电压降低到值 其低于第一峰值。 因此，可以形成具有减小的凹部的变化的阳极氧化层。
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8.发明申请METHOD FOR FORMING ANODIZED LAYER, METHOD FOR PRODUCING MOLD AND METHOD FOR PRODUCING ANTIREFLECTIVE FILM 有权用于形成抗静电层的方法，用于生产模具的方法和生产抗反射膜的方法公开(公告)号：US20120325670A1
公开(公告)日：2012-12-27
申请号：US13583399
申请日：2011-03-08
CPC分类号： G02B1/118 , B29C33/424 , B29C33/565 , B29C45/26 , B29C45/372 , C25D11/04 , C25D11/045 , C25D11/12 , C25D11/16 , C25D11/18
摘要： An anodized layer formation method of an embodiment of the present invention includes the step a of providing an aluminum film which is formed on a first principal surface of a support and the step b of anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions. In the step a, a second principal surface of the support which is opposite to the first principal surface is provided with a low heat conduction member that has a predetermined pattern. According to an embodiment of the present invention, a porous alumina layer can be formed which includes regions of different minute structures in the predetermined pattern.
摘要翻译： 本发明实施例的阳极氧化层形成方法包括提供形成在支撑体的第一主表面上的铝膜的步骤a和阳极氧化铝膜表面的步骤b以形成多孔氧化铝层 其具有多个微小的凹部。 在步骤a中，支撑体的与第一主表面相对的第二主表面设置有具有预定图案的低导热构件。 根据本发明的一个实施方案，可以形成多孔氧化铝层，其包括具有预定图案的不同微小结构的区域。
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公开(公告)号：US10155340B2
公开(公告)日：2018-12-18
申请号：US14004190
申请日：2012-03-01
摘要： A mold is disclosed, which is capable of producing a nanoimprint film without a problem of clogging of irregularities of the mold with a resin material. A method for producing the mold and a method for producing a nanoimprint film using the mold are further disclosed. In an embodiment, the mold includes: a first surface having a nanostructure including plural recesses spaced at an interval of less than 1 μm between bottom points of adjacent recesses; and at least two second surfaces substantially not having the nanostructure, wherein the first surface is coplanar with the at least two second surfaces and is positioned between two second surfaces.
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10.发明授权Die, process for producing die, and process for producing antireflection film 有权模具，制造模具的工艺和制造抗反射膜的工艺公开(公告)号：US09556532B2
公开(公告)日：2017-01-31
申请号：US13582033
申请日：2011-03-22
CPC分类号： G02B1/118 , B29C59/046 , B29C2035/0827 , C25D11/04 , C25D11/045 , C25D11/12 , C25D11/24
摘要： A method is provided for manufacturing a mold that has a porous alumina layer over its surface, which is capable of preventing formation of pits (recesses). A moth-eye mold manufacturing method of an embodiment of the present invention is a method for manufacturing a mold which has a porous alumina layer over its surface, including the steps of: providing a mold base which includes an aluminum base and an aluminum film deposited on a surface of the aluminum base, the aluminum film having a purity of not less than 99.99 mass %; anodizing a surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions; and bringing the porous alumina layer into contact with an etching solution to enlarge the plurality of minute recessed portions of the porous alumina layer.
摘要翻译： 提供了一种用于制造在其表面上具有多孔氧化铝层的模具的方法，其能够防止形成凹坑（凹部）。 本发明的实施例的蛾眼模具的制造方法是在其表面上具有多孔氧化铝层的模具的制造方法，包括以下步骤：提供包括铝基底和铝膜沉积的模具基底 在铝基材的表面上，铝膜的纯度不低于99.99质量％; 阳极氧化铝膜的表面以形成具有多个微小凹陷部分的多孔氧化铝层; 并且使多孔氧化铝层与蚀刻溶液接触，以使多孔氧化铝层的多个微小凹陷部分扩大。
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