摘要:
The present invention has an object to provide an integrated circuit device having a Cu wiring, using a barrier layer which facilitates planarization. The present invention relates to an integrated circuit device having a Cu wiring layer, a barrier layer therefor and a dielectric layer, wherein the barrier layer is represented by a compositional formula of TaOxNy (the range of x being 0
摘要:
The present invention relates to a film comprising silicon dioxide as the main component, which contains Zr, etc., and a method for forming it by reactive DC sputtering. It makes it possible to form reflection preventive films, alkali barrier films and various multi-layered films such as multi-layered films for anti-iridescent glass, which contain said film comprising silicon dioxide as the main component, by a physical vapor deposition method without breaking a vacuum.
摘要:
The present invention relates to a film comprising silicon dioxide as the main component, which contains Zr, etc., and a method for forming it by reactive DC sputtering. It makes it possible to form reflection preventive films, alkali barrier films and various multi-layered films such as multi-layered films for anti-iridescent glass, which contain said film comprising silicon dioxide as the main component, by a physical vapor deposition method without breaking a vacuum.
摘要:
A magnetic recording medium comprising a magnetic recording layer and at least one protective layer formed on the recording layer, wherein the outermost protective layer on the side exposed to air is made of an oxide film.
摘要:
A magnetic recording medium comprising a magnetic recording layer and at least one protective layer formed on the recording layer, wherein the outermost protective layer on the side exposed to air is made of an oxide film.
摘要:
There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.
摘要:
To provide a vehicle having high operability and its control method. A vehicle includes a passenger seat on which a passenger rides on, a chassis that support the passenger seat, wheels that move the chassis, a force sensor that outputs a measurement signal according to a force exerted on a seat surface of the passenger seat, a drive unit that drives the passenger seat so as to change an angle of the seat surface of the passenger seat, and a control calculation unit that calculates a reference input used to drive the wheels and the drive unit based on a drive amount of the drive unit, a balanced position posture of the passenger seat, and the measurement signal from the force sensor.
摘要:
A combustor, in which a flame holding region is formed at a location distant from a pilot burner to avoid burnout of the pilot burner and in which flame holding capability is increased to use a lean pre-mix gas for reducing NOx emission, is provided. The combustor includes a combustion liner having a cylindrical side wall that defines a combustion chamber; and a main burner positioned at a top portion of the combustion liner for injecting an annular pre-mix gas into the combustion chamber to form a reverse flow region at a downstream portion thereof, which region is oriented towards the top portion of the combustion chamber along a longitudinal axis. In this combustor, a pilot burner is arranged at the top portion for injecting a mixture of fuel and air only in a direction confronting the reverse flow region.
摘要:
A plurality of micro three-dimensional structure elements each having a movable structure fixed on a sacrifice layer, and fixation portions of the micro three-dimensional structure elements for the sacrifice layer are arranged into a film-like elastic body, and then the sacrifice layer is removed. Thus, a three-dimensional structure in which the individual micro three-dimensional structure elements are arranged independently of one another within the elastic body is manufactured.
摘要:
In the present invention, the extremely complicated setting and control and an extremely expensive optical component (wavelength locker) are not required, and optical output wavelength and optical output power can simply be set and controlled at a moderate price. At least one value for determining a dependence of the optical output wavelength on drive current and device temperature and at least one value for determining a dependence of the optical output power on drive current and device temperature in a light emitting device constituting first means 1 for emitting light are stored in fourth means 4. Fifth means 5 determines drive current or optical output power c and device temperature d, at which both the optical output wavelength and optical output power of the light emitting device are separately specified value b, from a relationship among the drive current, device temperature, and optical output wavelength of the light emitting device, the relationship being determined by the at least one value, and a relationship among the drive current, device temperature, and optical output power, the relationship being determined by the at least one value, and the fifth means 5 gives the drive current or optical output power c and device temperature d as target values to second means 2 and third means 3.