公开(公告)号：US07878755B2

公开(公告)日：2011-02-01

申请号：US12068072

申请日：2008-02-01

申请人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen

发明人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen

IPC分类号： B65G25/00

CPC分类号： G03F7/70975 ,  G03F7/7075 ,  G03F7/70858 ,  G03F7/70991

摘要： A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.

摘要翻译： 负载锁被构造和布置成在第一环境和第二环境之间传送衬底并且将第一环境和第二环境中的每一个保持在其中。 装载锁包括一个装载锁定室，该装载锁定室设置有至少两个相互不同的基板支撑件，这两个基板支撑件一个在另一个 每个基板支撑件包括基板位移元件。 负载锁还包括构造和布置成排空负载锁定室的抽空装置，以及构造和布置成在抽空期间关闭负载锁定室并打开负载锁定室的门。

公开(公告)号：US07576831B2

公开(公告)日：2009-08-18

申请号：US10797664

申请日：2004-03-11

申请人： Pieter Johannes Marius Van Groos ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen ,  Albert Jan Hendrik Klomp ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Erik Roelof Loopstra

发明人： Pieter Johannes Marius Van Groos ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen ,  Albert Jan Hendrik Klomp ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Erik Roelof Loopstra

IPC分类号： G03B27/42 ,  G03B27/58

CPC分类号： G03F7/70975 ,  G03F7/7075 ,  G03F7/70858 ,  G03F7/70991

摘要： A method of and apparatus for maintaining a machine part arranged in an interior space of a machine, where the interior space is kept at a first pressure and is separated from an environment having a second pressure via a load lock. The method includes transporting a machine part via the load lock out of the interior space and transporting via the load lock into the interior space one of the maintained machine part and a separate replacement machine part.

摘要翻译： 一种用于保持设置在机器的内部空间中的机器部件的方法和设备，其中内部空间保持在第一压力并且经由负载锁定与具有第二压力的环境分离。 该方法包括通过装载锁将机器部件运送出内部空间，并通过装载锁将其运送到维护的机器部件之一的内部空间和单独的替换机器部件中。

公开(公告)号：US20080138177A1

公开(公告)日：2008-06-12

申请号：US12068072

申请日：2008-02-01

申请人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen

发明人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen

IPC分类号： H01L21/677

CPC分类号： G03F7/70975 ,  G03F7/7075 ,  G03F7/70858 ,  G03F7/70991

摘要： A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.

摘要翻译： 负载锁被构造和布置成在第一环境和第二环境之间传送衬底并且将第一环境和第二环境中的每一个保持在其中。 装载锁包括一个装载锁定室，该装载锁定室设置有至少两个相互不同的基板支撑件，这两个基板支架一个在另一个之上。 每个基板支撑件包括基板位移元件。 负载锁还包括构造和布置成排空负载锁定室的抽空装置，以及构造和布置成在抽空期间关闭负载锁定室并打开负载锁定室的门。

公开(公告)号：US07359031B2

公开(公告)日：2008-04-15

申请号：US10797725

申请日：2004-03-11

申请人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen

发明人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Josephus Cornelius Johannes Antonius Vugts ,  Robert Gordon Livesey ,  Johannes Hendrikus Gertrudis Franssen

IPC分类号： G03B27/42 ,  G03B27/58

CPC分类号： G03F7/70975 ,  G03F7/7075 ,  G03F7/70858 ,  G03F7/70991

摘要： Lithographic projection assembly, including at least one load lock for transferring objects, in particular substrates, between a first environment and a second environment, the second environment preferably having a lower pressure than the first environment; an object handler including a handler chamber in which the second environment prevails; and a lithographic projection apparatus including a projection chamber. The handler chamber and projection chamber can communicate for transferring the objects. The load lock includes a load lock chamber; evacuation device for evacuating the load lock chamber; and door device for closing the load lock chamber during evacuation and for opening the load lock chamber to enter an object in or remove an object from the load lock chamber. The load lock chamber may be provided with at least two mutually distinct object support positions.

摘要翻译： 光刻投影组件包括用于在第一环境和第二环境之间传送物体，特别是基底的至少一个装载锁，所述第二环境优选地具有比所述第一环境更低的压力; 一个对象处理器，包括处理器室，其中第二个环境占优势; 以及包括投影室的光刻投影装置。 处理器室和投影室可以通信用于传送物体。 负载锁包括一个负载锁定室; 排气装置，用于排空负载锁定室; 以及门装置，用于在排气期间关闭装载锁定室，并且用于打开装载锁定室以将物体进入物体或将其从装载锁定室移除。 负载锁定室可以设置有至少两个相互不同的物体支撑位置。

公开(公告)号：US07394520B2

公开(公告)日：2008-07-01

申请号：US10797608

申请日：2004-03-11

申请人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Raimond Visser ,  Josephus Cornelius Johannes Antonius Vugts ,  Henricus Johannes Louis Marie Vullings ,  Leo Wilhelmus Maria Kuipers ,  Johannes Hendrikus Gertrudis Franssen

发明人： Albert Jan Hendrik Klomp ,  Jan Frederik Hoogkamp ,  Raimond Visser ,  Josephus Cornelius Johannes Antonius Vugts ,  Henricus Johannes Louis Marie Vullings ,  Leo Wilhelmus Maria Kuipers ,  Johannes Hendrikus Gertrudis Franssen

IPC分类号： G03B27/52 ,  G03B27/42

CPC分类号： G03F7/70975 ,  G03F7/7075 ,  G03F7/70858 ,  G03F7/70991 ,  Y10S414/135 ,  Y10S414/139

摘要： A load lock for a lithographic apparatus is arranged to transfer an object, like a substrate, into and from the lithographic apparatus. The load lock outer wall defining at least part of a load lock volume accommodating a support unit for supporting the object when in the load lock. The load lock also has a temperature conditioned structure to control the temperature of the object to a desired temperature at least before the object is transferred from the load lock towards the lithographic projection apparatus.

摘要翻译： 用于光刻设备的负载锁被布置成将诸如基板的物体转移到光刻设备中和从光刻设备传送。 负载锁定外壁限定装载锁定体积的至少一部分，该装载锁定容积容纳用于在加载锁定时支撑物体的支撑单元。 负载锁还具有温度调节结构，至少在物体从负载锁转移到光刻投影装置之前将物体的温度控制在期望的温度。

公开(公告)号：US07123349B2

公开(公告)日：2006-10-17

申请号：US10797657

申请日：2004-03-11

申请人： Pieter Johannes Marius Van Groos ,  Pieter Renaat Maria Hennus ,  Jan Frederik Hoogkamp ,  Albert Jan Hendrik Klomp ,  Johannes Onvlee ,  Raimond Visser

发明人： Pieter Johannes Marius Van Groos ,  Pieter Renaat Maria Hennus ,  Jan Frederik Hoogkamp ,  Albert Jan Hendrik Klomp ,  Johannes Onvlee ,  Raimond Visser

IPC分类号： G03B27/58 ,  G03B27/42

CPC分类号： H01L21/67225 ,  G03F7/70733 ,  G03F7/7075 ,  G03F7/70808 ,  G03F7/70841 ,  G03F7/70858 ,  G03F7/70875 ,  G03F7/70991 ,  H01L21/67201

摘要： The invention relates to a lithographic projection assembly, having at least two load locks for transferring substrates between a first environment and a lower pressure second environment, a substrate handler with a handler chamber within the second environment and a lithographic projection apparatus including a projection chamber. The handler chamber and the projection chamber communicate via a load position for entering a substrate from the handler chanter into the projection chamber and an unload position for removing the substrate from the projection chamber into the handler chamber. The handler chamber also includes pre-processing means for pre-processing of the substrates and transport means for transferring substrates between the load locks and pre-processing means.

摘要翻译： 本发明涉及一种光刻投影组件，其具有至少两个用于在第一环境和较低压力的第二环境之间传送衬底的负载锁，在第二环境内具有处理室的衬底处理器以及包括投影室的光刻投影设备。 处理器室和投影室通过负载位置连通，用于从处理器进入投影室进入基板，以及卸载位置，用于将基板从投影室移除到处理室中。 处理室还包括用于预处理基板的预处理装置和用于在装载锁和预处理装置之间传送基板的传送装置。