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公开(公告)号：US09623555B2
公开(公告)日：2017-04-18
申请号：US13293717
申请日：2011-11-10
IPC分类号： B25J9/04
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
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公开(公告)号：US20120141235A1
公开(公告)日：2012-06-07
申请号：US13293717
申请日：2011-11-10
IPC分类号： H01L21/677
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。
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公开(公告)号：US08680803B2
公开(公告)日：2014-03-25
申请号：US13567812
申请日：2012-08-06
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。
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公开(公告)号：US08237391B2
公开(公告)日：2012-08-07
申请号：US13219267
申请日：2011-08-26
IPC分类号： B25J15/02
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。
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公开(公告)号：US08008884B2
公开(公告)日：2011-08-30
申请号：US12175278
申请日：2008-07-17
IPC分类号： B25J15/02
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 一种基板输送装置，包括具有内表面的外周壁，该内表面限定能够保持隔离气氛的基板输送室，至少一个基本上环形的马达，其具有位于周壁内的至少一个定子模块，位于内表面和 所述周壁的相邻外表面和至少一个转子在所述输送室内基本上不接触地悬挂，使得由所述环形电机包围的所述周壁的表面构造成用于附接到预定装置和至少一个基板输送臂 连接到所述至少一个转子并且具有构造成保持至少一个基板的至少一个末端执行器。
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6.发明授权Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism 有权具有利用机械开关机构的多个可动臂的基板输送装置公开(公告)号：US08752449B2
公开(公告)日：2014-06-17
申请号：US12117415
申请日：2008-05-08
申请人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译： 一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关 耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回 组态。
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公开(公告)号：US20110316370A1
公开(公告)日：2011-12-29
申请号：US13219267
申请日：2011-08-26
IPC分类号： H02K7/00
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。
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公开(公告)号：US20120301261A1
公开(公告)日：2012-11-29
申请号：US13567812
申请日：2012-08-06
IPC分类号： B65G49/00
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。
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公开(公告)号：US20090022571A1
公开(公告)日：2009-01-22
申请号：US12175278
申请日：2008-07-17
CPC分类号： H02K41/03 , H01L21/67742 , H01L21/68707 , H02K2201/18
摘要： A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
摘要翻译： 一种基板输送装置，包括具有内表面的外周壁，该内表面限定能够保持隔离气氛的基板输送室，至少一个基本上环形的马达，其具有位于周壁内的至少一个定子模块，位于内表面和 所述周壁的相邻外表面和至少一个转子在所述输送室内基本上不接触地悬挂，使得由所述环形电机包围的所述周壁的表面构造成用于附接到预定装置和至少一个基板输送臂 连接到所述至少一个转子并且具有构造成保持至少一个基板的至少一个末端执行器。
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10.发明申请SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM 有权使用机械开关机构的多个可移动臂的基板运输装置公开(公告)号：US20090087288A1
公开(公告)日：2009-04-02
申请号：US12117415
申请日：2008-05-08
申请人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
IPC分类号： H01L21/677
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译： 一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关 耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回 组态。
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