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    Radiation source
    3.
    发明授权
    Radiation source 有权
    辐射源

    公开(公告)号：US09366967B2

    公开(公告)日：2016-06-14

    申请号：US14241364

    申请日：2012-08-01

    申请人： Andrei Mikhailovich Yakunin ,  Vladimir Vitalevich Ivanov ,  Vladimir Mihailovitch Krivtsun ,  Viacheslav Medvedev ,  Gerardus Hubertus Petrus Maria Swinkels ,  Jan Bernard Plechelmus Van Schoot

    发明人： Andrei Mikhailovich Yakunin ,  Vladimir Vitalevich Ivanov ,  Vladimir Mihailovitch Krivtsun ,  Viacheslav Medvedev ,  Gerardus Hubertus Petrus Maria Swinkels ,  Jan Bernard Plechelmus Van Schoot

    IPC分类号： G03B27/32 ,  G03B27/54 ,  G03F7/20 ,  H05G2/00

    CPC分类号： G03F7/70033 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

    摘要： A radiation source (60) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets (62) along a trajectory (64) towards a plasma formation location (66). The radiation source is configured to receive a first amount of radiation (68) such that the first amount of radiation is incident on a fuel droplet (62a) at the plasma formation location, and such that the first amount of radiation transfers energy into the fuel droplet to generate a modified fuel distribution (70), the modified fuel distribution having a surface. The radiation source is also configured to receive a second amount of radiation (72) such that the second amount of radiation is incident on a portion of the surface (70a) of the modified fuel distribution, the second amount of radiation having a p-polarized component with respect to the portion of the surface; and such that the second amount of radiation transfers energy to the modified fuel distribution to generate a radiation generating plasma, the radiation generating plasma emitting a third amount of radiation (74). The radiation source further comprises a collector (CO) configured to collect and direct at least a portion of the third amount of radiation. The radiation source is configured such that the second amount of radiation propagates in a first direction, the first direction being non-parallel to a normal to the portion of the surface of the modified fuel distribution.

    摘要翻译： 适于向光刻设备的照明器提供辐射束的辐射源（60）。 辐射源包括被配置为沿着轨迹（64）将燃料液滴（62）流引向等离子体形成位置（66）的喷嘴。 辐射源被配置为接收第一量的辐射（68），使得第一量的辐射入射在等离子体形成位置处的燃料液滴（62a）上，并且使得第一量的辐射将能量转移到燃料 液滴以产生改进的燃料分配（70），所述改进的燃料分布具有表面。 辐射源还被配置为接收第二数量的辐射（72），使得第二量的辐射入射在改性燃料分布的表面（70a）的一部分上，第二量的辐射具有p偏振 相对于表面的部分; 并且使得第二量的辐射将能量传递到经修改的燃料分布以产生辐射产生等离子体，该辐射产生等离子体发射第三量的辐射（74）。 辐射源还包括收集器（CO），其被配置成收集并引导第三量的辐射的至少一部分。 辐射源被配置成使得第二数量的辐射在第一方向上传播，第一方向不平行于改性燃料分布的表面部分的法线。

    RADIATION SOURCE
    4.
    发明申请
    RADIATION SOURCE 有权
    辐射源

    公开(公告)号：US20140368802A1

    公开(公告)日：2014-12-18

    申请号：US14241364

    申请日：2012-08-01

    申请人： Andrei Mikhailovich Yakunin ,  Vladimir Vitalevich Ivanov ,  Vladimir Mihailovitch Krivtsun ,  Viacheslav Medvedev ,  Gerardus, Hubertus, Petrus, Maria Swinkels ,  Jan, Bernard, Plechelmus Van Schoot

    发明人： Andrei Mikhailovich Yakunin ,  Vladimir Vitalevich Ivanov ,  Vladimir Mihailovitch Krivtsun ,  Viacheslav Medvedev ,  Gerardus, Hubertus, Petrus, Maria Swinkels ,  Jan, Bernard, Plechelmus Van Schoot

    IPC分类号： G03F7/20 ,  H05G2/00

    CPC分类号： G03F7/70033 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

    摘要： A radiation source (60) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle configured to direct a stream of fuel droplets (62) along a trajectory (64) towards a plasma formation location (66). The radiation source is configured to receive a first amount of radiation (68) such that the first amount of radiation is incident on a fuel droplet (62a) at the plasma formation location, and such that the first amount of radiation transfers energy into the fuel droplet to generate a modified fuel distribution (70), the modified fuel distribution having a surface. The radiation source is also configured to receive a second amount of radiation (72) such that the second amount of radiation is incident on a portion of the surface (70a) of the modified fuel distribution, the second amount of radiation having a p-polarized component with respect to the portion of the surface; and such that the second amount of radiation transfers energy to the modified fuel distribution to generate a radiation generating plasma, the radiation generating plasma emitting a third amount of radiation (74). The radiation source further comprises a collector (CO) configured to collect and direct at least a portion of the third amount of radiation. The radiation source is configured such that the second amount of radiation propagates in a first direction, the first direction being non-parallel to a normal to the portion of the surface of the modified fuel distribution.

    摘要翻译： 适于向光刻设备的照明器提供辐射束的辐射源（60）。 辐射源包括被配置为沿着轨迹（64）将燃料液滴（62）流引向等离子体形成位置（66）的喷嘴。 辐射源被配置为接收第一量的辐射（68），使得第一量的辐射入射在等离子体形成位置处的燃料液滴（62a）上，并且使得第一量的辐射将能量转移到燃料 液滴以产生改进的燃料分配（70），所述改进的燃料分布具有表面。 辐射源还被配置为接收第二数量的辐射（72），使得第二量的辐射入射在改性燃料分布的表面（70a）的一部分上，第二量的辐射具有p偏振 相对于表面的部分; 并且使得第二量的辐射将能量传递到经修改的燃料分布以产生辐射产生等离子体，该辐射产生等离子体发射第三量的辐射（74）。 辐射源还包括收集器（CO），其被配置成收集并引导第三量的辐射的至少一部分。 辐射源被配置成使得第二数量的辐射在第一方向上传播，第一方向不平行于改性燃料分布的表面部分的法线。