公开(公告)号：US20050109081A1

公开(公告)日：2005-05-26

申请号：US10719971

申请日：2003-11-21

申请人： Anis Zribi ,  Wei-Cheng Tian ,  Gerald Schultz ,  Aaron Knobloch

发明人： Anis Zribi ,  Wei-Cheng Tian ,  Gerald Schultz ,  Aaron Knobloch

IPC分类号： G01N25/48 ,  G01N7/00

CPC分类号： G01N25/4873 ,  G01N25/4813

摘要： The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.

摘要翻译： 本发明提供了一种小型化传感器装置，其包括具有第一表面和第二表面的薄膜膜，一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置，以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面，其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。

公开(公告)号：US20050262943A1

公开(公告)日：2005-12-01

申请号：US10854845

申请日：2004-05-27

申请人： Glenn Claydon ,  Stacey Goodwin ,  Anis Zribi ,  Wei-Cheng Tian ,  Aaron Knobloch ,  Walter Cicha ,  Patrick Malenfant

发明人： Glenn Claydon ,  Stacey Goodwin ,  Anis Zribi ,  Wei-Cheng Tian ,  Aaron Knobloch ,  Walter Cicha ,  Patrick Malenfant

IPC分类号： G01N29/02 ,  G01N29/036 ,  G01N29/04 ,  G01N29/24

CPC分类号： G01N29/036 ,  G01N29/022 ,  G01N29/2418 ,  G01N2291/0215 ,  G01N2291/0255 ,  G01N2291/0256

摘要： According to some embodiments, a Microelectromechanical System (MEMS) sensor includes a sensing material on a spring element. The sensor may also include a detector adapted to determine a resonant frequency associated with the spring element, wherein the resonant frequency changes upon the exposure of the sensing material to an analyte.

摘要翻译： 根据一些实施例，微机电系统（MEMS）传感器包括弹簧元件上的感测材料。 传感器还可以包括适于确定与弹簧元件相关联的谐振频率的检测器，其中当检测材料暴露于分析物时，谐振频率发生变化。

公开(公告)号：US07104113B2

公开(公告)日：2006-09-12

申请号：US10719971

申请日：2003-11-21

申请人： Anis Zribi ,  Wei-Cheng Tian ,  Gerald Schultz ,  Aaron Jay Knobloch

发明人： Anis Zribi ,  Wei-Cheng Tian ,  Gerald Schultz ,  Aaron Jay Knobloch

IPC分类号： G01N25/00 ,  G01N7/00

CPC分类号： G01N25/4873 ,  G01N25/4813

摘要： The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.

摘要翻译： 本发明提供了一种小型化传感器装置，其包括具有第一表面和第二表面的薄膜膜，一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置，以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面，其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。

公开(公告)号：US20090201497A1

公开(公告)日：2009-08-13

申请号：US11400947

申请日：2006-04-10

申请人： Anis Zribi ,  Wei-Cheng Tian ,  Yuan-Hsiang Lee ,  Min-Yi Shih

发明人： Anis Zribi ,  Wei-Cheng Tian ,  Yuan-Hsiang Lee ,  Min-Yi Shih

IPC分类号： G01J3/40 ,  G01N21/01

CPC分类号： G01N21/0303 ,  G01N21/658 ,  G01N30/74 ,  G01N2021/651 ,  G02B6/10 ,  G02B2006/1213

摘要： An optofluidic device is provided. The device includes a cladding region having a first refractive index, and a channel defined by the cladding region such that the cladding region forms an inner surface or an interface of the channel. The channel is configured to house one or more of a liquid, a solid, a gas, a colloidal, or a suspension sample, wherein the sample has a second refractive index, where the channel is configured to guide radiation, and where the first refractive index is lower than the second refractive index.

摘要翻译： 提供了一种光流体装置。 该器件包括具有第一折射率的包层区域和由包层区域限定的沟道，使得包层区域形成沟道的内表面或界面。 通道被配置成容纳液体，固体，气体，胶体或悬浮样品中的一种或多种，​​其中样品具有第二折射率，其中通道被构造成引导辐射，并且其中第一折射 指数低于第二折射率。

公开(公告)号：US07466121B2

公开(公告)日：2008-12-16

申请号：US11506493

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher James Kapusta ,  Glenn Scott Claydon ,  Anis Zribi ,  Laura Jean Meyer ,  Wei-Cheng Tian

IPC分类号： G01R33/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20080180209A1

公开(公告)日：2008-07-31

申请号：US11699530

申请日：2007-01-29

申请人： Anthony Yu-Chung Ku ,  Steven Alfred Tysoe ,  Vinayak Tilak ,  Peter Micah Sandvik ,  Sergio Paulo Martins Loureiro ,  James Anthony Ruud ,  Anis Zribi ,  Wei-Cheng Tian

发明人： Anthony Yu-Chung Ku ,  Steven Alfred Tysoe ,  Vinayak Tilak ,  Peter Micah Sandvik ,  Sergio Paulo Martins Loureiro ,  James Anthony Ruud ,  Anis Zribi ,  Wei-Cheng Tian

IPC分类号： G01N27/12 ,  B05D5/12

CPC分类号： G01N27/125

摘要： Gallium oxide films for sensing gas comprise Ga2O3 and have a porosity of at least about 30%. Such films can be formed by coating a substrate with a solution comprising: a gallium salt and a porogen comprising an organic compound comprising a hydrophilic chain and a hydrophobic chain; and heating the substrate to a temperature in the range from about 400° C. to about 600° C. while exposing the substrate to an oxygen-containing source to convert the gallium salt to a gallium oxide.

摘要翻译： 用于感测气体的氧化镓膜包括Ga 2 O 3 O 3并具有至少约30％的孔隙率。 可以通过用包含镓盐和致孔剂的溶液涂覆基底来形成这种膜，所述成盐剂包含包含亲水链和疏水链的有机化合物; 并将衬底加热至约400℃至约600℃的温度，同时将衬底暴露于含氧源以将镓盐转化为氧化镓。

公开(公告)号：US07315161B2

公开(公告)日：2008-01-01

申请号：US11129682

申请日：2005-05-13

申请人： Anis Zribi ,  Glenn Scott Claydon ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Scott Claydon ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

IPC分类号： G01R33/00

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20070040547A1

公开(公告)日：2007-02-22

申请号：US11506988

申请日：2006-08-18

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R1/20

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

公开(公告)号：US20050270014A1

公开(公告)日：2005-12-08

申请号：US11129682

申请日：2005-05-13

申请人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

发明人： Anis Zribi ,  Glenn Claydon ,  Christopher Kapusta ,  Laura Meyer ,  Ertugrul Berkcan ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件，补偿器和用于感测磁场的输出部件，并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中，第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。

公开(公告)号：US20050270013A1

公开(公告)日：2005-12-08

申请号：US10863442

申请日：2004-06-07

申请人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

发明人： Ertugrul Berkcan ,  Christopher Kapusta ,  Glenn Claydon ,  Anis Zribi ,  Laura Meyer ,  Wei-Cheng Tian

IPC分类号： G01R15/20 ,  G01R33/028 ,  G01R33/02

CPC分类号： G01R33/0283 ,  G01R15/148 ,  G01R33/0286

摘要： A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

摘要翻译： 微机电系统（MEMS）电流传感器被描述为包括第一导体，用于使由第一导体中的电流产生的磁场成形的磁场成形部件，以及包括磁 - 用于感测成形磁场的MEMS组件，并且响应于此，提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法，包括使用在第一导体中的电流产生的磁场成形，用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。