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1.发明申请Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication 失效小型化多气体和蒸气传感器装置及相关制造方法公开(公告)号：US20050109081A1
公开(公告)日：2005-05-26
申请号：US10719971
申请日：2003-11-21
申请人： Anis Zribi , Wei-Cheng Tian , Gerald Schultz , Aaron Knobloch
发明人： Anis Zribi , Wei-Cheng Tian , Gerald Schultz , Aaron Knobloch
CPC分类号： G01N25/4873 , G01N25/4813
摘要： The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.
摘要翻译： 本发明提供了一种小型化传感器装置，其包括具有第一表面和第二表面的薄膜膜，一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置，以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面，其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。
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2.发明授权Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication 失效小型化多气体和蒸气传感器装置及相关制造方法公开(公告)号：US07104113B2
公开(公告)日：2006-09-12
申请号：US10719971
申请日：2003-11-21
申请人： Anis Zribi , Wei-Cheng Tian , Gerald Schultz , Aaron Jay Knobloch
发明人： Anis Zribi , Wei-Cheng Tian , Gerald Schultz , Aaron Jay Knobloch
CPC分类号： G01N25/4873 , G01N25/4813
摘要： The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.
摘要翻译： 本发明提供了一种小型化传感器装置，其包括具有第一表面和第二表面的薄膜膜，一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置，以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面，其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。
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公开(公告)号：US06938482B2
公开(公告)日：2005-09-06
申请号：US10250084
申请日：2003-06-03
申请人： Gerald Schultz
发明人： Gerald Schultz
CPC分类号： G01N27/225 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： A humidity sensor element for a humidity sensing device includes a rigid, p doped silicon substrate, a non-porous terminal on one side of the substrate, a porous terminal on a second side of the substrate, and a layer of polyphenylsulfone between the porous terminal and the substrate. The sensor elements displays improved linear response with humidity changes and very low hysteresis.
摘要翻译： 用于湿度感测装置的湿度传感器元件包括刚性p掺杂硅衬底，在衬底的一侧上的无孔端子，在衬底的第二侧上的多孔端子和多孔端子之间的聚苯砜层 和基板。 传感器元件显示改进的线性响应，湿度变化和非常低的滞后。
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