公开(公告)号：US08631707B2

公开(公告)日：2014-01-21

申请号：US12751482

申请日：2010-03-31

申请人： Anthony D. Kurtz ,  Alexander Ned ,  Sorin Stefanescu ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Sorin Stefanescu ,  Nora Kurtz

IPC分类号： G01L9/10 ,  G01L15/00 ,  G01L7/08

CPC分类号： G01L9/0055 ,  G01L13/025 ,  G01L15/00 ,  G01L19/04 ,  Y10T29/49002

摘要： A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween.

摘要翻译： 公开了一种具有非压力效应补偿的双隔膜压力传感器或传感器。 压力传感器可以包括位于芯片的分开部分上的两个压力传感器。 第一压力传感器可以是差压传感器，其产生与一个或多个施加压力成比例的信号，并且包括其它非压力效应。 第二压力传感器可以密封在密封室中，因此可以产生仅与非压力效应成比例的信号。 信号可以组合以产生与所施加的压力成比例的信号，而没有非压力效应。 第一和第二压力传感器可以物理和/或电隔离以改善两个压力传感器之间的密封并防止它们之间的压力泄漏。

公开(公告)号：US20110239772A1

公开(公告)日：2011-10-06

申请号：US12751482

申请日：2010-03-31

申请人： Anthony D. Kurtz ,  Alexander A. Ned ,  Sorin Stefanescu ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander A. Ned ,  Sorin Stefanescu ,  Nora Kurtz

IPC分类号： G01L9/06 ,  B23P11/00

CPC分类号： G01L9/0055 ,  G01L13/025 ,  G01L15/00 ,  G01L19/04 ,  Y10T29/49002

摘要： A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween.

摘要翻译： 公开了一种具有非压力效应补偿的双隔膜压力传感器或传感器。 压力传感器可以包括位于芯片的分开部分上的两个压力传感器。 第一压力传感器可以是差压传感器，其产生与一个或多个施加压力成比例的信号，并且包括其它非压力效应。 第二压力传感器可以密封在密封室中，因此可以产生仅与非压力效应成比例的信号。 信号可以组合以产生与所施加的压力成比例的信号，而没有非压力效应。 第一和第二压力传感器可以物理和/或电隔离以改善两个压力传感器之间的密封并防止它们之间的压力泄漏。

公开(公告)号：US08074521B2

公开(公告)日：2011-12-13

申请号：US12614741

申请日：2009-11-09

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L13/02

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A filter assembly for use with a static-dynamic piezoresistive pressure transducer that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly is disclosed. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi or less. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while keeping dynamic pressure from reaching the back of the sensor. In this manner, the filter assembly enables the transducer to accurately read dynamic pressure in the presence of high static pressure without rupturing the thin diaphragm of the dynamic pressure sensor.

摘要翻译： 公开了一种与静态压阻式压力传感器一起使用的过滤器组件，其通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获小于或等于几psi的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以抵消存在于传感器前部的静压力，同时保持动态压力不到达传感器的后部。 以这种方式，过滤器组件使得换能器能够在存在高静态压力的情况下准确地读取动态压力而不破坏动态压力传感器的薄膜。

公开(公告)号：US20110169497A1

公开(公告)日：2011-07-14

申请号：US13031549

申请日：2011-02-21

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Wolf Landmann

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Wolf Landmann

IPC分类号： G01R31/08

CPC分类号： G01L9/06 ,  G01L27/007

摘要： Disclosed herein is an electronic switch that comprises a pressure sensitive bridge array adapted to monitor pressure and activate an indicator when the monitored pressure exceeds a predetermined value indicative of a dangerous condition. The electronic switch further comprises a monitoring circuit adapted to test the overall operability of the pressure sensitive bridge array and its accompanying electronics control circuitry.

摘要翻译： 本文公开了一种电子开关，其包括压敏桥阵列，其适于在监视的压力超过表示危险状况的预定值时监测压力并激活指示器。 电子开关还包括适于测试压敏桥阵列及其伴随的电子控制电路的整体可操作性的监视电路。

公开(公告)号：US20100251825A1

公开(公告)日：2010-10-07

申请号：US12819958

申请日：2010-06-21

申请人： Anthony D. Kurtz ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Nora Kurtz

IPC分类号： G01L9/06

CPC分类号： G01L19/0645 ,  G01L15/00 ,  G01L19/0038

摘要： A combined wet-wet differential transducer and a gage pressure transducer located in the same housing, comprising a semiconductor chip which comprises a gage sensor chip on one section and a differential sensor chip on a second section. Each sensor chip has a Wheatstone bridge comprising piezoresistors and is responsive to an applied pressure. The gage chip and the differential chip are placed in a header having a front section and a back section adapted to receive a first and second pressure, respectively. The sensors are in communication with first and second pressure ports such that the absolute sensor provides an output indicative of a pressure applied to a first port and the differential sensor provides an output indicative of the pressure difference between the first and second pressure ports.

摘要翻译： 一种组合的湿湿差压换能器和位于同一壳体中的量规压力传感器，包括半导体芯片，其包括一个部分上的量规传感器芯片和在第二部分上的差分传感器芯片。 每个传感器芯片具有包括压敏电阻器的惠斯通电桥，并且响应所施加的压力。 计量芯片和差分芯片被放置在具有分别适于接收第一和第二压力的前部分和后部部分的集管中。 传感器与第一和第二压力端口连通，使得绝对传感器提供指示施加到第一端口的压力的输出，并且差动传感器提供指示第一和第二压力端口之间的压力差的输出。

公开(公告)号：US08276466B2

公开(公告)日：2012-10-02

申请号：US12751505

申请日：2010-03-31

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative ,  Joseph VanDeWeert

发明人： Anthony D. Kurtz ,  Joseph VanDeWeert

IPC分类号： G01D7/00 ,  G01L1/22

CPC分类号： G01L5/0009 ,  F16C19/522 ,  G01L5/0019 ,  G01L5/162

摘要： A two or three axis load cell capable of measuring axial and one or more shear forces is disclosed. The load cell can comprise a force collector connected by one or more connecting rods to one or more cross pieces. The load cell can comprise a single cross piece and can measure an axial force applied to the load cell and at least one component of shear force applied to the load cell. In other embodiments, the load cell can comprise two cross pieces, disposed at disparate angles, to enable the measurement of an axial force and both components of shear force applied to the force collector. The cross pieces are equipped with a means, such as piezoresistive elements to measure their deflection due to the applied forces on the force collector. The connecting rods can be fitted with additional piezoresistors to measure the axial forces on the force collector.

摘要翻译： 公开了能够测量轴向和一个或多个剪切力的两轴或三轴称重传感器。 称重传感器可以包括通过一个或多个连接杆连接到一个或多个横档的力收集器。 测力传感器可以包括单个横截面并且可以测量施加到测力传感器的轴向力和施加到测力传感器的剪切力的至少一个分量。 在其他实施例中，测力传感器可以包括以不同角度设置的两个横截面，以便能够测量施加到力收集器的轴向力和剪切力的两个分量。 十字件配备有诸如压阻元件的装置，以测量由于在力收集器上施加的力而导致的挠曲。 连杆可以安装附加的压电电阻器来测量力收集器上的轴向力。

公开(公告)号：US08237537B2

公开(公告)日：2012-08-07

申请号：US13069222

申请日：2011-03-22

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative

发明人： Anthony D. Kurtz

IPC分类号： G01L1/22

CPC分类号： G01L9/04 ,  G01L9/0055 ,  G01L9/06

摘要： A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

摘要翻译： 一种压力传感器，包括具有有源区域的耐腐蚀金属隔膜，并且当向隔膜施加力时能够偏转; 以及设置在单个衬底上的压电硅绝缘体上传感器阵列，所述衬底固定到所述隔膜上，所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器，所述第二外部传感器阵列 在第二位置和有源区域附近的隔膜的边缘附近的传感器以及基本上覆盖隔膜的中心的至少一个中心传感器，所述传感器以桥式阵列连接以提供与施加到所述隔膜的力成比例的输出电压 隔膜 传感器与基板介电隔离。

公开(公告)号：US20110296924A1

公开(公告)日：2011-12-08

申请号：US13161594

申请日：2011-06-16

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Adam Hurst ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Adam Hurst ,  Nora Kurtz

IPC分类号： G01L11/04 ,  G01R3/00

CPC分类号： G01L19/0609 ,  G01L19/0681 ,  Y10T29/49005 ,  Y10T29/49007

摘要： A pressure transducer assembly for measuring pressures in high temperature environments employing an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter is operative to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation.

摘要翻译： 一种用于在高温环境中测量压力的压力传感器组件，其采用细长管，其在一端由声学微滤器终止。 微滤器可以有效或无反射地吸收入射到其上的声波。 为了改善声波的吸收，细长管可以是锥形的和/或安装到支撑块上并进一步卷曲以减小装置的整体尺寸和质量。 具有隔膜齐平的压力传感器可以安装到细长管并延伸到管的内壁。 热气体通过细长管传播，其相应的压力由传感器测量。 声学滤波器用于吸收由热气体产生的声波，因此能够使压力传感器主要响应于与燃气轮机操作相关联的高频波。

公开(公告)号：US20110235678A1

公开(公告)日：2011-09-29

申请号：US12731427

申请日：2010-03-25

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Alex Ned ,  Vikram Patil ,  Joseph VanDeWeert

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Alex Ned ,  Vikram Patil ,  Joseph VanDeWeert

IPC分类号： G01K7/18 ,  H01L21/441

CPC分类号： G01K7/183

摘要： The RTD device of the present invention is comprised of a semiconductor substrate and a substantially thin conductive metal layer disposed upon the semiconductor substrate, wherein the conductive metal has a substantially linear temperature-resistance relationship. The conductive layer is etched into a convoluted RTD pattern, which consequently increases the overall resistance and minimizes the overall mass of the RTD assembly. A contact glass cover and a conductive metal-glass frit are placed over the RTD assembly to hermetically seal the RTD. The resultant structure can be “upside-down” mounted onto a header or a flat shim so that the bottom surface of the semiconductor substrate is exposed to the external environment, thus shielding the RTD from external forces. The resultant structure is a low mass, highly conductive, leadless, and hermetically sealed RTD that accurately measures the temperature of liquids and gases and maintains fast response time in high temperatures and harsh environments.

摘要翻译： 本发明的RTD器件包括半导体衬底和设置在半导体衬底上的基本上薄的导电金属层，其中导电金属具有基本上线性的耐温性关系。 导电层被蚀刻成卷积的RTD图案，因此增加了整体电阻并使RTD组件的整体质量最小化。 将接触玻璃盖和导电金属玻璃料放置在RTD组件上以气密地密封RTD。 所得到的结构可以“倒置”安装在集管或平面垫片上，使得半导体衬底的底表面暴露于外部环境，从而屏蔽RTD免受外力的影响。 所得结构是低质量，高导电性，无引线和密封的RTD，可精确测量液体和气体的温度，并在高温和恶劣环境中保持快速响应时间。

公开(公告)号：US20110203381A1

公开(公告)日：2011-08-25

申请号：US13069222

申请日：2011-03-22

申请人： Anthony D. Kurtz ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Nora Kurtz

IPC分类号： G01L9/06

CPC分类号： G01L9/04 ,  G01L9/0055 ,  G01L9/06

摘要： A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

摘要翻译： 一种压力传感器，包括具有有源区域的耐腐蚀金属隔膜，并且当向隔膜施加力时能够偏转; 以及设置在单个衬底上的压电硅绝缘体上传感器阵列，所述衬底固定到所述隔膜上，所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器，所述第二外部传感器阵列 在第二位置和有源区域附近的隔膜的边缘附近的传感器以及基本上覆盖隔膜的中心的至少一个中心传感器，所述传感器以桥式阵列连接以提供与施加到所述隔膜的力成比例的输出电压 隔膜 传感器与基板介电隔离。