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25 条记录 (耗时 0.035 秒)

    Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses
    7.
    发明申请
    Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses 有权
    用于等离子体处理设备的复合喷头电极组件的清洁硬件套件

    公开(公告)号：US20080223401A1

    公开(公告)日：2008-09-18

    申请号：US12073651

    申请日：2008-03-07

    申请人： Jason Augustino ,  Charles Rising

    发明人： Jason Augustino ,  Charles Rising

    IPC分类号： B08B13/00 ,  B08B3/08 ,  B08B5/00

    CPC分类号： C23C14/564 ,  C23C16/4405

    摘要： Apparatus to clean silicon electrode assembly surfaces which controls or eliminates possible chemical attack of electrode assembly bonding materials, and eliminates direct handling contact with the parts to be cleaned during acid treatment, spray rinse, blow dry, bake and bagging. Aspects of the apparatus include a kit including an electrode carrier to hold an electrode assembly, a treatment stand to allow access to the electrode assembly, a spider plate to clamp the electrode assembly in the electrode carrier, a nitrogen purge plate to supply nitrogen gas to the backside of the electrode assembly during acid cleaning of the electrode, a water rinse plate to supply water to the electrode face, a blow dry plate to supply nitrogen to dry the electrode assembly and a bake stand to support the electrode assembly during a bake before placing the clean electrode assembly in a bag.

    摘要翻译： 用于清洁硅电极组件表面的装置，其控制或消除电极组件接合材料的可能的化学侵蚀，并且消除在酸处理期间与待清洁部件的直接操作接触，喷雾冲洗，吹干，烘烤和装袋。 该装置的方面包括一种套件，其包括用于保持电极组件的电极载体，用于允许接触电极组件的处理台，将电极组件夹持在电极载体中的蜘蛛板，将氮气供应到 在电极的酸洗期间电极组件的背面，向电极面供水的水冲洗板，用于供应氮气以干燥电极组件的吹干板和烘烤架，以在烘烤期间支撑电极组件 将清洁的电极组件放置在袋中。

    Quartz window for a degas chamber
    8.
    发明授权
    Quartz window for a degas chamber 有权
    用于脱气室的石英窗

    公开(公告)号：US08603292B2

    公开(公告)日：2013-12-10

    申请号：US12607659

    申请日：2009-10-28

    申请人： Jason Augustino ,  Tim Hart

    发明人： Jason Augustino ,  Tim Hart

    IPC分类号： C23F1/00 ,  H01L21/306

    CPC分类号： H01J37/32467 ,  Y10T137/8359

    摘要： A five-sided quartz window configured to be mounted on a degas chamber as a UV-transmissive window. The quartz window is made of synthetic quartz and has a uniform thickness. The shape of the quartz window is defined by an upper surface, a lower surface and a sidewall therebetween. The sidewall has five straight sections interconnected by five arcuate sections. The quartz window has four arcuate recesses extending into the sidewall.

    摘要翻译： 五面石英窗构造成安装在脱气室作为紫外线透射窗。 石英窗由合成石英制成，厚度均匀。 石英窗的形状由上表面，下表面和侧壁之间限定。 侧壁具有由五个弧形部分相互连接的五个直线部分。 石英窗有四个弧形凹槽延伸到侧壁。

    Backside mounted electrode carriers and assemblies incorporating the same
    9.
    发明授权
    Backside mounted electrode carriers and assemblies incorporating the same 有权
    背面安装的电极载体和包含其的组件

    公开(公告)号：US08171877B2

    公开(公告)日：2012-05-08

    申请号：US12164285

    申请日：2008-06-30

    申请人： Jason Augustino ,  Armen Avoyan ,  Yan Fang ,  Duane Outka ,  Hong Shih ,  Stephen Whitten

    发明人： Jason Augustino ,  Armen Avoyan ,  Yan Fang ,  Duane Outka ,  Hong Shih ,  Stephen Whitten

    IPC分类号： B05C13/00 ,  B05C13/02 ,  B05C21/00 ,  C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306

    CPC分类号： H01J37/32568 ,  H01J37/32091 ,  H01J37/32605

    摘要： A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.

    摘要翻译： 提供的载体组件包括背面安装的电极载体和电极安装硬件。 背面安装的电极载体包括电极容纳孔，电极容纳孔又包括被配置为限制定位在孔中的电极的横向移动的侧壁结构。 电极容纳孔还包括支撑位于孔中的电极的重量的一个或多个侧壁突起。 电极安装硬件被配置成从位于载体的背面的电极容纳孔中的电极接合，并且将电极推靠在侧壁突起上，以限制电极在电极容纳孔中的轴向移动。 考虑到更广泛和更窄范围的另外的实施例。