公开(公告)号：US20080066785A1

公开(公告)日：2008-03-20

申请号：US11836092

申请日：2007-08-08

申请人： Anthony Vesci ,  Vince Kirchhoff ,  James Woodward ,  Kevin Hughes ,  Mark van der Pyl ,  Tetsuya Ishikawa ,  Evans Lee

发明人： Anthony Vesci ,  Vince Kirchhoff ,  James Woodward ,  Kevin Hughes ,  Mark van der Pyl ,  Tetsuya Ishikawa ,  Evans Lee

IPC分类号： B08B9/08

CPC分类号： H01J37/32623 ,  H01J37/3266 ,  Y10S156/916

摘要： A method of refurbishing a wall of a plasma process chamber which has a surface with a magnet assembly fitted thereon. The magnet assembly has an expandable hollow collar with a plurality of magnets inside. In the method, the diameter of the hollow collar of the magnet assembly is expanded to remove the hollow collar from the wall. The surface of the wall is cleaned. The hollow collar of the original magnet assembly, or of another magnet assembly, is then snap fitted back onto the surface of the wall.

摘要翻译： 一种对具有安装在其上的磁体组件的表面的等离子体处理室的壁进行翻新的方法。 磁体组件具有可扩展的空心套环，内部具有多个磁体。 在该方法中，磁体组件的空心轴环的直径被膨胀以从壁上移除空心轴环。 墙壁的表面被清洁。 然后将原始磁体组件或另一个磁体组件的空心凸缘卡扣到壁的表面上。

公开(公告)号：US07294224B2

公开(公告)日：2007-11-13

申请号：US10726008

申请日：2003-12-01

申请人： Anthony Vesci ,  Vince Kirchhoff ,  James Woodward ,  Kevin Hughes ,  Mark van der Pyl ,  Tetsuya Ishikawa ,  Evans Lee

发明人： Anthony Vesci ,  Vince Kirchhoff ,  James Woodward ,  Kevin Hughes ,  Mark van der Pyl ,  Tetsuya Ishikawa ,  Evans Lee

IPC分类号： H01L21/00

CPC分类号： H01J37/32623 ,  H01J37/3266 ,  Y10S156/916

摘要： A magnet assembly for a plasma process chamber has a hollow collar comprising a cross-section that is absent seams. The hollow collar has an open end face and a cap is provided to seal the open end face of the collar. A plurality of magnets are in the hollow collar, the magnets being insertable through the open end face. The collar is capable of being snap fitted onto the chamber wall. The magnet assembly can also comprise one or more of the collars such that the collars, when installed, form a substantially continuous ring about a chamber wall.

摘要翻译： 用于等离子体处理室的磁体组件具有包括不存在接缝的横截面的中空轴环。 空心轴环具有敞开的端面，并且设有盖以密封轴环的开口端面。 多个磁体位于空心环中，磁体可通过开口端面插入。 套环能够被卡扣到室壁上。 磁体组件还可以包括一个或多个轴环，使得套环在安装时围绕室壁形成基本上连续的环。

公开(公告)号：US20050115678A1

公开(公告)日：2005-06-02

申请号：US10726008

申请日：2003-12-01

申请人： Anthony Vesci ,  Vince Kirchhoff ,  James Woodward ,  Kevin Hughes ,  Mark Pyl ,  Tetsuya Ishikawa ,  Evans Lee

发明人： Anthony Vesci ,  Vince Kirchhoff ,  James Woodward ,  Kevin Hughes ,  Mark Pyl ,  Tetsuya Ishikawa ,  Evans Lee

IPC分类号： H01J37/32 ,  H01L21/306

CPC分类号： H01J37/32623 ,  H01J37/3266 ,  Y10S156/916

摘要： A magnet assembly for a plasma process chamber has a hollow collar comprising a cross-section that is absent seams. The hollow collar has an open end face and a cap is provided to seal the open end face of the collar. A plurality of magnets are in the hollow collar, the magnets being insertable through the open end face. The collar is capable of being snap fitted onto the chamber wall. The magnet assembly can also comprise one or more of the collars such that the collars, when installed, form a substantially continuous ring about a chamber wall.

摘要翻译： 用于等离子体处理室的磁体组件具有包括不存在接缝的横截面的中空轴环。 空心轴环具有敞开的端面，并且设有盖以密封轴环的开口端面。 多个磁体位于空心环中，磁体可通过开口端面插入。 套环能够被卡扣到室壁上。 磁体组件还可以包括一个或多个轴环，使得套环在安装时围绕室壁形成基本上连续的环。