公开(公告)号：US20240117491A1

公开(公告)日：2024-04-11

申请号：US17962378

申请日：2022-10-07

Applicant: Applied Materials, Inc.

Inventor： Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Yogesh TOMAR ,  Nikshep M. PATIL ,  Hari Venkatesh RAJENDRAN ,  Kirubanandan Naina SHANMUGAM ,  Gayatri NATU ,  Mahesh ARCOT ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Steven D. MARCUS ,  Michael R. RICE

IPC: C23C16/455 ,  C23C16/44

CPC classification number: C23C16/45544 ,  C23C16/4412 ,  C23C16/45557

Abstract: Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.