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公开(公告)号：US20160300752A1
公开(公告)日：2016-10-13
申请号：US15188706
申请日：2016-06-21
Applicant: Applied Materials, Inc.
Inventor： Mehran BEHDJAT , Aaron Muir HUNTER , Joseph M. RANISH , Norman TAM , Jeffrey TOBIN , Jiping LI , Martin TRAN
IPC: H01L21/687 , H01L21/324 , H01L21/67
CPC classification number: H01L21/68735 , H01L21/324 , H01L21/67115 , H01L21/68757
Abstract: Embodiments of the disclosure generally relate to a support cylinder used in a thermal process chamber. In one embodiment, the support cylinder includes a hollow cylindrical body comprising an inner peripheral surface, an outer peripheral surface parallel to the inner peripheral surface, wherein the inner peripheral surface and the outer peripheral surface extend along a direction parallel to a longitudinal axis of the support cylinder, and a lateral portion extending radially from the outer peripheral surface to the inner peripheral surface, wherein the lateral portion comprises a first end having a first beveled portion, a first rounded portion, and a first planar portion connecting the first beveled portion and the first rounded portion, and a second end opposing the first end, the second end having a second beveled portion, a second rounded portion, and a second planar portion connecting the second beveled portion and the second rounded portion.
Abstract translation: 本公开的实施例一般涉及在热处理室中使用的支撑筒。 在一个实施例中，支撑筒包括中空圆柱体，其包括内周表面，平行于内周表面的外周表面，其中内周表面和外周表面沿着平行于该内周表面的纵向轴线的方向延伸 支撑圆柱体和从外周表面径向延伸到内周表面的横向部分，其中所述侧向部分包括具有第一倾斜部分，第一圆形部分和第一平面部分的第一端部，所述第一平坦部分将第一倾斜部分和 第一圆形部分和与第一端相对的第二端，第二端部具有第二倾斜部分，第二圆形部分和连接第二倾斜部分和第二圆形部分的第二平面部分。
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公开(公告)号：US20170263493A1
公开(公告)日：2017-09-14
申请号：US15600336
申请日：2017-05-19
Applicant: Applied Materials, Inc.
Inventor： Mehran BEHDJAT , Aaron Muir HUNTER , Joseph M. RANISH , Norman TAM , Jeffrey TOBIN , Jiping LI , Martin TRAN
IPC: H01L21/687 , H01L21/67 , H01L21/324
CPC classification number: H01L21/68735 , H01L21/324 , H01L21/67115 , H01L21/68757
Abstract: Embodiments of the disclosure generally relate to a support cylinder used in a thermal process chamber. In one embodiment, the support cylinder includes a hollow cylindrical body comprising an inner peripheral surface, an outer peripheral surface parallel to the inner peripheral surface, wherein the inner peripheral surface and the outer peripheral surface extend along a direction parallel to a longitudinal axis of the support cylinder, and a lateral portion extending radially from the outer peripheral surface to the inner peripheral surface, wherein the lateral portion comprises a first end having a first beveled portion, a first rounded portion, and a first planar portion connecting the first beveled portion and the first rounded portion, and a second end opposing the first end, the second end having a second beveled portion, a second rounded portion, and a second planar portion connecting the second beveled portion and the second rounded portion.
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公开(公告)号：US20150050819A1
公开(公告)日：2015-02-19
申请号：US14298389
申请日：2014-06-06
Applicant: APPLIED MATERIALS, INC.
Inventor： Mehran BEHDJAT , Aaron Muir HUNTER , Joseph M. RANISH , Norman TAM , Jeffrey TOBIN , Jiping LI , Martin TRAN
IPC: H01L21/683 , F16C13/00 , H01L21/324 , B05D7/22
CPC classification number: H01L21/68735 , H01L21/324 , H01L21/67115 , H01L21/68757
Abstract: Embodiments of the disclosure generally relate to a support cylinder used in a thermal process chamber. In one embodiment, the support cylinder comprises a ring body having an inner peripheral surface and an outer peripheral surface, wherein the ring body comprises an opaque quartz glass material and wherein the ring body is coated with an optical transparent layer. The optical transparent layer has a coefficient of thermal expansion that is substantially matched or similar to the opaque quartz glass material to reduce thermal expansion mismatch that may cause thermal stress under high thermal loads. In one example, the opaque quartz glass material is synthetic black quartz and the optical transparent layer comprises a clear fused quartz material.
Abstract translation: 本公开的实施例一般涉及在热处理室中使用的支撑筒。 在一个实施例中，支撑筒包括具有内周表面和外周表面的环体，其中环体包括不透明的石英玻璃材料，并且其中环体涂覆有光学透明层。 光学透明层的热膨胀系数基本上与不透明的石英玻璃材料匹配或类似，以减少在高热负荷下可能引起热应力的热膨胀失配。 在一个实例中，不透明石英玻璃材料是合成黑色石英，光学透明层包括透明的熔融石英材料。
