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公开(公告)号:US20130320509A1
公开(公告)日:2013-12-05
申请号:US13959593
申请日:2013-08-05
CPC分类号: H01L23/564 , B81B3/0075 , B81B2207/115 , B81C1/00206 , B81C1/0038 , H01L21/02126 , H01L21/02164 , H01L21/02214 , H01L21/02271 , H01L21/02304 , H01L21/3127 , H01L21/3141 , H01L21/31604 , H01L21/31612 , H01L21/3162 , H01L23/29 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要: A moisture barrier coating for protecting a substrate from moisture, comprises an inorganic layer disposed over the substrate, the inorganic layer comprising an oxide or nitride of an element selected from the group consisting of silicon, aluminum, titanium, zirconium, hafnium and combinations thereof; and an organic silicon-containing layer disposed over the inorganic layer.
摘要翻译: 一种用于保护基底免受湿气侵害的防潮涂层,包括设置在该基底上的无机层,该无机层包括选自硅,铝,钛,锆,铪及其组合的元素的氧化物或氮化物; 以及设置在无机层上的有机含硅层。