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公开(公告)号:US5644038A
公开(公告)日:1997-07-01
申请号:US616599
申请日:1996-03-15
申请人: Ari Aviram , William Ross Brunsvold , Daniel Bucca , Willard Earl Conley, Jr. , David Earle Seeger
发明人: Ari Aviram , William Ross Brunsvold , Daniel Bucca , Willard Earl Conley, Jr. , David Earle Seeger
IPC分类号: C07C309/76 , G03F7/022
CPC分类号: G03F7/022 , C07C309/76 , Y10S430/143 , Y10S430/168
摘要: Quinone diazo compounds having bonded to the diazo ring or directly bonded to a ring of the compound, certain non-metallic atoms that improve the photosensitivity thereof are provided. These quinone diazo compounds are useful as photoactive compounds in photoresist compositions, and particularly positive photoresist composition employed in x-ray or electron beam radiation. Also provided is a method for preparing compounds of the present invention.
摘要翻译: 提供了与重氮键结合或直接键合到化合物环上的喹诺酮重氮化合物,提供了提高其光敏性的某些非金属原子。 这些醌重氮化合物可用作光致抗蚀剂组合物中的光敏化合物,并且特别是用于x射线或电子束辐射的正性光致抗蚀剂组合物。 还提供了制备本发明化合物的方法。