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1.发明申请公开(公告)号：US20100187714A1
公开(公告)日：2010-07-29
申请号：US12691813
申请日：2010-01-22
IPC分类号： B32B3/26
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A pattern generation method of generating a three-dimensional pattern to be formed at a template for use in a method of forming a pattern by filling a resist material in the three-dimensional pattern of the template includes performing at least one of adjustment of a depth of the three-dimensional pattern and division of the three-dimensional pattern, based on a relationship between a filling time of the resist material and a dimension or shape of the three-dimensional pattern.
摘要翻译： 通过在模板的三维图案中填充抗蚀剂材料来生成在用于形成图案的方法中的模板上形成的三维图案的图案生成方法包括：执行至少一个调整深度 基于抗蚀剂材料的填充时间与三维图案的尺寸或形状之间的关系，三维图案和三维图案的划分。
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公开(公告)号：US20110012297A1
公开(公告)日：2011-01-20
申请号：US12718778
申请日：2010-03-05
申请人： Ayumi KOBIKI , Takeshi Koshiba , Hidefumi Mukai , Seiro Miyoshi
发明人： Ayumi KOBIKI , Takeshi Koshiba , Hidefumi Mukai , Seiro Miyoshi
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A pattern transfer method for transferring an uneven pattern onto a resist material is disclosed. The uneven pattern is formed in a template having a through-groove in a predetermined region. The resist material is applied to a substrate. The template is made to come into contact with the resist material. The resist material is filled to concave portion in the uneven pattern. The residual resist material leaked from a gap between the substrate and the template to the outside is sucked through the through-groove in a state where the template is in contact with the resist material. The resist material is made to cure in a state where the template is in contact with the resist material after the suction of the residual resist material. The template is separated from the cured resist material.
摘要翻译： 公开了一种用于将不均匀图案转印到抗蚀剂材料上的图案转印方法。 不规则图案形成在具有预定区域中的通槽的模板中。 将抗蚀剂材料施加到基底上。 使模板与抗蚀剂材料接触。 抗蚀剂材料以不均匀图案填充到凹部。 在模板与抗蚀剂材料接触的状态下，从基板和模板之间的间隙向外部泄漏的残留抗蚀剂材料通过贯通槽进行吸引。 抗蚀剂材料在残留抗蚀剂材料的吸附之后，在模板与抗蚀剂材料接触的状态下使其固化。 将模板与固化的抗蚀剂材料分离。
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