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    Methods, Systems, and Computer Program Products for Printing Patterns on Photosensitive Surfaces
    1.
    发明申请
    Methods, Systems, and Computer Program Products for Printing Patterns on Photosensitive Surfaces 有权
    方法，系统和计算机程序产品，用于在感光表面上打印图案

    公开(公告)号：US20080079923A1

    公开(公告)日：2008-04-03

    申请号：US11836343

    申请日：2007-08-09

    申请人： Azat Latypov ,  Karel Mast

    发明人： Azat Latypov ,  Karel Mast

    IPC分类号： G03B27/72 ,  G03B27/54

    CPC分类号： G03F7/70475 ,  G03B27/54 ,  G03F7/70291

    摘要： A method, system, and computer program product are provided for printing a pattern on a photosensitive surface using a maskless lithography system including a spatial light modulator (SLM). The method, system, and computer program product define two or more exposure areas within a predetermined region of the surface, each area corresponding to selected pixels of the SLM. An overlap region is formed between the two or more exposure areas, the overlapping region being defined by respective overlapping edges of the exposure areas, the overlapping edges corresponding to overlapping pairs of the selected pixels from each area. The pixels within each pair are alternately activated such that only one of the pixels within the pair is used to produce the pattern.

    摘要翻译： 提供了一种使用包括空间光调制器（SLM）的无掩模光刻系统在感光表面上印刷图案的方法，系统和计算机程序产品。 方法，系统和计算机程序产品在表面的预定区域内定义两个或更多个曝光区域，每个区域对应于SLM的所选像素。 在两个或多个曝光区域之间形成重叠区域，重叠区域由曝光区域的相应重叠边缘限定，重叠边缘对应于来自每个区域的所选像素的重叠对。 每对中的像素被交替地激活，使得只有一对中的像素之一用于产生图案。