公开(公告)号：USRE41231E1

公开(公告)日：2010-04-20

申请号：US10310069

申请日：1995-10-13

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D85/90

CPC分类号： H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

摘要翻译： 公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：USD383898S

公开(公告)日：1997-09-23

申请号：US45221

申请日：1995-10-13

申请人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

设计人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

公开(公告)号：US5944194A

公开(公告)日：1999-08-31

申请号：US913260

申请日：1997-09-10

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D85/48 ,  B65D20060101 ,  G11B33/04 ,  G11B33/14 ,  H01L21/673 ,  H01L21/677 ,  B65D85/90

CPC分类号： H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

摘要翻译： PCT No.PCT / US95 / 12516 Sec。 371日期：1997年9月10日 102（e）1997年9月10日PCT PCT 1995年10月13日PCT公布。 公开号WO97 / 13710PC。 日期1997年04月17日公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：USRE42402E1

公开(公告)日：2011-05-31

申请号：US11351214

申请日：1995-10-13

申请人： Barry Gregerson ,  Brian Wiseman ,  Gary Gallagher

发明人： Barry Gregerson ,  Brian Wiseman ,  Gary Gallagher

IPC分类号： B65D85/90

CPC分类号： H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

摘要翻译： 公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。

公开(公告)号：USRE38221E1

公开(公告)日：2003-08-19

申请号：US09943098

申请日：2001-08-30

申请人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

发明人： Barry Gregerson ,  Gary Gallagher ,  Brian Wiseman

IPC分类号： B65D8590

CPC分类号： H01L21/67369 ,  G11B33/0405 ,  G11B33/14 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67396 ,  H01L21/67763

摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

公开(公告)号：US6010009A

公开(公告)日：2000-01-04

申请号：US913259

申请日：1997-09-10

申请人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

发明人： Kelly Peterson ,  Brian Wiseman ,  Gary Gallagher ,  Barry Gregerson

IPC分类号： G11B33/04 ,  H01L21/673 ,  B65D85/90

CPC分类号： H01L21/67379 ,  G11B33/0444 ,  H01L21/67383

摘要： A cassette (10) for storing a plurality of items in a parallel registration is disclosed. The cassette is specifically designed to be lightweight and is reinforced (50, 52, 54) to prevent warpage, bending, flexing or breaking of the cassette. Means (66, 68, 70) for indexing the cassette to a surface for precise insertion and removal of items are also described.

摘要翻译： PCT No.PCT / US95 / 12515 Sec。 371日期：1997年9月10日 102（e）1997年9月10日PCT PCT 1995年10月13日PCT公布。 公开号WO97 / 13709 日期1997年04月17日公开了一种用于存储并行登记中的多个项目的盒（10）。 盒式录像带专门设计为轻便，并加强（50,52,54），以防止卡带的翘曲，弯曲，弯曲或断裂。 还描述了用于将盒索引到表面以用于物品的精确插入和移除的装置（66,68,70）。

公开(公告)号：USD378873S

公开(公告)日：1997-04-22

申请号：US45247

申请日：1995-10-13

申请人： Barry Gregerson ,  Brian Wiseman ,  Gary Gallagher

设计人： Barry Gregerson ,  Brian Wiseman ,  Gary Gallagher

公开(公告)号：US20060244942A1

公开(公告)日：2006-11-02

申请号：US11364860

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： G03B27/58

CPC分类号： G03B27/58 ,  H01L21/67353 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67393

摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

公开(公告)号：US20060260978A1

公开(公告)日：2006-11-23

申请号：US11364562

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  G03F1/66 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67369 ,  H01L21/67376 ,  H01L21/67386

摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.

公开(公告)号：US07607543B2

公开(公告)日：2009-10-27

申请号：US11364562

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Mathius Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Mathius Tieben ,  Justin Strike

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  G03F1/66 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67369 ,  H01L21/67376 ,  H01L21/67386

摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.

摘要翻译： 本发明提供了一种掩模版容器，其配备有容纳该掩模版并容纳在主容器中的二次容器。 次级容器保持在具有冲击和隔振构件的主容器内，使得副容器在主容器内具有多个运动自由度。 掩模版被固定在次级容器内，使得从掩模版容器到掩模版的冲击和振动传播被大大衰减。