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公开(公告)号：US09472431B2
公开(公告)日：2016-10-18
申请号：US13583886
申请日：2011-03-11
申请人： Barry Gregerson , Jason Steffens , Russ V. Raschke
发明人： Barry Gregerson , Jason Steffens , Russ V. Raschke
IPC分类号： H01L21/673 , H01L21/67
CPC分类号： H01L21/67369 , H01L21/67383 , H01L21/67386
摘要： An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers respectively, and extend the wafer support to approximately the entire circumference of each wafer.
摘要翻译： 晶片容器中的改进的晶片支撑机构，其用于承载多个轴向排列的薄的大多圆形晶片基板。 容器包括具有多个相邻设置的用于接收基板的齿的盒，其中每个肋构件从盒开口顶部连续到盒开口底部，可移除顶盖部分，可移除底盖部分，衬垫组件 可移除地附接到容器顶盖和可移除地位于容器底盖中的另一个缓冲组件，并通过晶片盒的重量保持在适当位置。 顶部衬垫由在每个段的末端处具有延伸的引入特征的每个段形成，每个段中的弹簧部分和每个段具有用于接收晶片边缘的V形横截面。 顶部和底部底座分别安装在顶部和底部容器盖中，并且将晶片支撑件延伸到每个晶片的大致整个圆周。
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公开(公告)号：US20130056389A1
公开(公告)日：2013-03-07
申请号：US13583886
申请日：2011-03-11
申请人： Barry Gregerson , Jason Steffens , Russ V. Raschke
发明人： Barry Gregerson , Jason Steffens , Russ V. Raschke
CPC分类号： H01L21/67369 , H01L21/67383 , H01L21/67386
摘要： An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers respectively, and extend the wafer support to approximately the entire circumference of each wafer.
摘要翻译： 晶片容器中的改进的晶片支撑机构，其用于承载多个轴向排列的薄的大多圆形晶片基板。 容器包括具有多个相邻设置的用于接收基板的齿的盒，其中每个肋构件从盒开口顶部连续到盒开口底部，可移除顶盖部分，可移除底盖部分，衬垫组件 可移除地附接到容器顶盖和可移除地位于容器底盖中的另一个缓冲组件，并通过晶片盒的重量保持在适当位置。 顶部衬垫由在每个段的末端处具有延伸的引入特征的每个段形成，每个段中的弹簧部分和每个段具有用于接收晶片边缘的V形横截面。 顶部和底部底座分别安装在顶部和底部容器盖中，并且将晶片支撑件延伸到每个晶片的大致整个圆周。
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公开(公告)号：US20060260978A1
公开(公告)日：2006-11-23
申请号：US11364562
申请日：2006-02-26
申请人： Barry Gregerson , David Halbmaier , Stephen Sumner , Brian Wiseman , Anthony Tieben , Justin Strike
发明人： Barry Gregerson , David Halbmaier , Stephen Sumner , Brian Wiseman , Anthony Tieben , Justin Strike
IPC分类号： B65D85/00
CPC分类号： H01L21/67353 , G03F1/66 , G03F7/70741 , H01L21/67359 , H01L21/67369 , H01L21/67376 , H01L21/67386
摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.
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公开(公告)号：US5944194A
公开(公告)日：1999-08-31
申请号：US913260
申请日：1997-09-10
申请人： Barry Gregerson , Gary Gallagher , Brian Wiseman
发明人： Barry Gregerson , Gary Gallagher , Brian Wiseman
IPC分类号： B65D85/48 , B65D20060101 , G11B33/04 , G11B33/14 , H01L21/673 , H01L21/677 , B65D85/90
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67383 , H01L21/67396 , G11B33/0405 , G11B33/14 , H01L21/67763
摘要： A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.
摘要翻译： PCT No.PCT / US95 / 12516 Sec。 371日期：1997年9月10日 102（e）1997年9月10日PCT PCT 1995年10月13日PCT公布。 公开号WO97 / 13710PC。 日期1997年04月17日公开了一种用于创建微环境的容器。 容器包括壳体，门和具有独特设计的多个支撑件，其用于以间隔开的平行关系可靠地保持诸如硅晶片的物品。 支架是可移动的。 提供电路以使支撑件接地。 还提供运动耦合结构用于将容器定位在表面上，以便例如将门与晶片处理工具的端口正确对准。
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公开(公告)号：US5555981A
公开(公告)日：1996-09-17
申请号：US425259
申请日：1995-04-18
申请人： Barry Gregerson
发明人： Barry Gregerson
IPC分类号： H01L21/673 , B65D85/90
CPC分类号： H01L21/67369
摘要： A ridged, transparent, thermoplastic package for transporting disk products such as wafers, semi-conductor wafers or computer memory disks is disclosed. Elastomeric or flexible thermoplastic cushions hold the disk products in a manner which precludes them from becoming damaged during normal shipping and handling. The cushions have a plurality of disk engaging members which individually engage a disk. The disk engaging member conforms to the edge profile of the substrate wafer to securely hold the wafer. Wafer rotation is eliminated, particle generation is reduced and the cushions securely hold the disk products.
摘要翻译： 公开了用于传送诸如晶片，半导体晶片或计算机存储盘的盘产品的脊状，透明的热塑性包装。 弹性或柔性的热塑性垫子以一种排除它们在正常运输和处理期间不会损坏的方式固定磁盘产品。 垫子具有多个单独接合盘的盘接合构件。 盘接合构件符合衬底晶片的边缘轮廓以牢固地保持晶片。 消除晶圆旋转，减少颗粒产生，并且缓冲垫牢固地固定磁盘产品。
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公开(公告)号：US4966284A
公开(公告)日：1990-10-30
申请号：US331291
申请日：1989-03-31
申请人： Barry Gregerson , Larry Dressen
发明人： Barry Gregerson , Larry Dressen
IPC分类号： B65D85/86 , H01L21/673
CPC分类号： H01L21/67369 , H01L21/67373 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A sealable contamination proof container package bottom and top for storing and transporting a plurality of substrates or wafers in a robotic wafer carrier. The package bottom includes four sides, a continuous vertical surface for tape sealing surrounding the four sides, a lip positioned on a vertical edge, opposing hook latches on opposing sides, opposing hand grip recesses on the opposing sides and a raised bottom surface for package stacking. The package top includes four sides, a continuous vertical surface for tape sealing surrounding the four sides, a lip positioned on the vertical surface, opposing hook catches on the opposing side, a top surface with raised stacking surfaces, and two rows of wafer support springs positioned on bars on the underside of the top surface. The package top and bottom halves provide that the robotic wafer carrier mates between the package top and package bottom with the wafers or substrates in the carrier. The package top and bottom mate with the upper lip engaged with the lower lip, and the catches of the top engage with the latches of the bottom. The package halves are designed in such a fashion as to prevent wafer or substrate damage upon opening, in that the top package half is moved in a direction coinciding to the plane of the wafers or substrates with respect to positioning of the catches and latches on the package side. Appropriate sides of the package top and bottom are plumb with each other providing for a flush perimeter for ease of taping. The raised top portion of the top package half and the recessed bottom of the bottom package half provides for stacking of like packages. In an alternative embodiment, opposing rows of articulated cantilevered horizontal arms with centering V grooves on each end for engaging a wafer, disk or substrate extend inwardly from the edges of an arced top surface in the package top.
摘要翻译： 用于在机器人晶片载体中存储和运输多个基板或晶片的可密封的防污染容器封装底部和顶部。 包装底部包括四个侧面，用于围绕四个侧面的带密封件的连续垂直表面，位于垂直边缘上的唇缘，相对侧上的相对的钩闩锁，相对侧上的相对的手柄凹部和用于包装堆叠的凸起的底部表面 。 封装顶部包括四个侧面，用于围绕四个侧面的带密封件的连续垂直表面，位于垂直表面上的唇缘，相对侧上的相对的钩扣，具有凸起堆叠表面的顶表面和两排晶片支撑弹簧 位于顶部表面下侧的杆上。 封装顶部和底部半部提供机器人晶片载体在封装顶部和封装底部之间与载体中的晶片或衬底配合。 包装顶部和底部配合上唇与下唇接合，并且顶部的卡扣与底部的闩锁接合。 封装半部被设计成防止在打开时晶片或基板损坏，因为顶部封装半部分在相对于晶片或基板的平面的方向上相对于捕获器和闩锁在 包装边。 包装顶部和底部的适当侧面彼此相互垂直，提供平齐的周边以便于胶带。 顶部封装半部的凸起顶部和底部封装半部的凹入底部提供了类似封装的堆叠。 在替代实施例中，相对排的铰接悬臂水平臂在每个端部上具有定心V形槽，用于接合晶片，盘或衬底，从封装顶部的弧形顶表面的边缘向内延伸。
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公开(公告)号：US4865190A
公开(公告)日：1989-09-12
申请号：US263404
申请日：1988-10-27
申请人： Barry Gregerson , Larry Dressen
发明人： Barry Gregerson , Larry Dressen
IPC分类号： G11B23/023 , G11B33/04
CPC分类号： G11B23/023 , G11B33/0405 , Y10S206/807
摘要： A security package for prevention of shoplifting including an elongated handle structure secured to a rectangular encompassing structure for holding an article such as an audio cassette box, video cassette box or a compact disk "jewel box". A rotating locking channel with latches for positive locking which engages catch ports in a stationary channel member adjacent to the rectangular encompassing structure to receive an article such as an audio, video or compact disk box. The rotating locking channel is rotated, and the article box in a rectangular encompassing structure area is captured by the rotating of the rotating locking channel with one-way beveled latches to secure the article box within the rectangular encompassing structure. A plurality of one-way locking latch and catch mechanisms are used to accomplish a package lock.
摘要翻译： 一种用于防止商店行窃的安全包，包括固定到矩形包围结构的细长手柄结构，用于保持诸如音频盒盒，盒式磁带盒或光盘“宝石盒”的物品。 具有用于正锁定的闩锁的旋转锁定通道，其接合与矩形包围结构相邻的固定通道构件中的接合端口，以接收诸如音频，视频或光盘盒的物品。 旋转的锁定通道旋转，并且通过旋转锁定通道与单向斜面闩锁来旋转矩形包围结构区域中的物品盒，以将制品盒固定在矩形包围结构内。 使用多个单向锁定闩锁和抓住机构来完成包装锁定。
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公开(公告)号：US4582219A
公开(公告)日：1986-04-15
申请号：US703507
申请日：1985-02-20
IPC分类号： E05C19/06 , H01L21/673 , B65D45/16
CPC分类号： H01L21/67373 , E05C19/06 , H01L21/67379 , Y10T292/0894
摘要： Storage box including a box, a box door, and two locking clips. The storage box is used with standard mechanical interface (SMIF) transfer equipment, and is sealable, dust proof, and stackable. The box door includes cross-bar locators for cross-bar wafer cassettes, and a notch for cover alignment with the SMIF box door. The box door will also accept other types of wafer processing cassettes. Each of the locking clips engage into a clip enclosure outboard of the box, and includes a locking slot for the locking clip, as well as a latch pin opening which provides for movement of the latch pin.
摘要翻译： 储物箱包括一个盒子，一个盒子门和两个锁定夹。 存储箱与标准机械接口（SMIF）传输设备一起使用，可密封，防尘，可堆叠。 箱门包括用于横杆晶片盒的横杆定位器和用于与SMIF箱门对准的凹口。 盒门也将接受其他类型的晶圆处理盒。 每个锁定夹接合到箱体外部的夹子外壳中，并且包括用于锁定夹的锁定槽以及提供闩锁销的移动的闩锁销开口。
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公开(公告)号：US09312157B2
公开(公告)日：2016-04-12
申请号：US14238693
申请日：2012-08-13
IPC分类号： H01L21/673
CPC分类号： H01L21/67389 , H01L21/67369 , H01L21/67373 , H01L21/67376 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.
摘要翻译： 适用于450mm等大晶圆的前开口晶片容器利用具有单独紧固件的组件，以方便的方式将组件锁定在一起，从而提供牢固的连接和成本效率。 容器部分具有敞开的前部并且在底表面上容纳通过扭锁连接器固定的底板，所述扭转锁连接器还提供用于清洗索环的凹部。 运动耦合部件容易且牢固地锁定在基板上。 内部晶片支撑部件利用具有固定突片和锁定棘爪的单独的锁定插入件锁定在侧壁上的托架上。 当门安装和就座时，晶片保持器提供支撑和计数增强的与450mm晶片相关联的晶片下垂。
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公开(公告)号：US20150041353A1
公开(公告)日：2015-02-12
申请号：US14238693
申请日：2012-08-13
IPC分类号： H01L21/673
CPC分类号： H01L21/67389 , H01L21/67369 , H01L21/67373 , H01L21/67376 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.
摘要翻译： 适用于450mm等大晶圆的前开口晶片容器利用具有单独紧固件的组件，以方便的方式将组件锁定在一起，从而提供牢固的连接和成本效率。 容器部分具有敞开的前部并且在底表面上容纳通过扭锁连接器固定的底板，所述扭转锁连接器还提供用于清洗索环的凹部。 运动耦合部件容易且牢固地锁定在基板上。 内部晶片支撑部件利用具有固定突片和锁定棘爪的单独的锁定插入件锁定在侧壁上的托架上。 当门安装和就座时，晶片保持器提供支撑和计数增强的与450mm晶片相关联的晶片下垂。
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