Mechanical linear guide
    1.
    发明授权
    Mechanical linear guide 失效
    机械直线导轨

    公开(公告)号:US5663486A

    公开(公告)日:1997-09-02

    申请号:US454358

    申请日:1995-08-07

    摘要: A mechanical linear guide for making a body move in an axial direction, comprising a system which is preferably made up of reinforced leaf springs and/or hole-type hinges, and which is rotationally symmetrical about an axial direction and mirror-symmetrical about a plane perpendicular to the axial direction. The system is connected to a fixed base at six points (A, D, I, L, M, P), and a body (18) is suspended between two points (F, G) in such a way that it can carry out only movement in the axial direction, and not in the lateral direction.

    摘要翻译: PCT No.PCT / NL93 / 00265 Sec。 371日期:1995年8月7日 102(e)日期1995年8月7日PCT提交1993年12月14日PCT公布。 第WO94 / 13976号公报 日期1994年6月23日用于使身体沿轴向移动的机械线性引导件,包括优选由加强的板簧和/或孔型铰链构成并且围绕轴向和镜子旋转对称的系统 围绕垂直于轴向方向的平面对称。 该系统在六点(A,D,I,L,M,P)处连接到固定基座,并且主体(18)悬挂在两点(F,G)之间,使得它可以执行 只能在轴向移动,而不是横向移动。

    Robotically drivable interface mechanism
    2.
    发明授权
    Robotically drivable interface mechanism 失效
    机器人驱动的接口机制

    公开(公告)号:US06290275B1

    公开(公告)日:2001-09-18

    申请号:US09357154

    申请日:1999-07-19

    IPC分类号: B25J1504

    摘要: Robotically drivable interface mechanism for coupling to a device and for coupling to an end effector attachable to the end of a robot arm. The interface mechanism having a first coupler to couple with an associated second coupler on the device and a third coupler to couple with an associate fourth coupler on the end effector. The first coupler is connectable to an actuator included in the end effector, when the interface mechanism is coupled to the end effector. The first coupler has at least one first roller for cooperating with the second coupler formed by at least one slot in the device.

    摘要翻译: 机器人可驱动的接口机构,用于联接到设备并且用于联接到可附接到机器人手臂的端部的末端执行器。 所述接口机构具有第一耦合器以耦合到所述装置上的相关联的第二耦合器,以及第三耦合器以与所述端部执行器上的关联第四耦合器耦合。 当接口机构联接到末端执行器时,第一联接器可连接到包括在端部执行器中的致动器。 第一联接器具有至少一个第一辊,用于与由装置中的至少一个槽形成的第二联接件配合。

    LIGHT SENSOR
    3.
    发明申请
    LIGHT SENSOR 审中-公开
    光传感器

    公开(公告)号:US20100230581A1

    公开(公告)日:2010-09-16

    申请号:US12293700

    申请日:2007-03-26

    IPC分类号: H01L27/144

    摘要: Light sensor, comprising a non-translucent layer (1) having a translucent aperture (2), and a sensor array layer (3), comprising an array of op to-electrical sensor elements (3a-d), as well as a translucent solid first carrier layer (4) to which said non-translucent layer is applied at one side and said sensor array layer at the other side. A multitude of such light sensors can be manufactured by taking a first substrate (4) which is suitable as a translucent solid first carrier layer for said multitude of light sensors, applying the non-translucent layers (1) including an aperture (2) in each of them for said multitude of light sensors at one side of the first substrate and applying the sensor array layers (3) for said multitude of light sensors at the other side of the first substrate and, finally, separating the individual light sensors (7a-b). The light sensor may comprise an integrated opto-electric power supply (8, 9).

    摘要翻译: 光传感器,包括具有半透明孔(2)的非半透明层(1)和传感器阵列层(3),所述传感器阵列层(3)包括一组运算电传感器元件(3a-d),以及半透明 固体第一载体层(4),一侧涂有所述非半透明层,另一侧涂敷所述传感器阵列层。 可以通过采用适合作为所述多个光传感器的半透明固体第一载体层的第一基板(4)来制造多个这样的光传感器,将包括孔(2)的非半透明层(1) 它们中的每一个用于在第一基板的一侧处的所述多个光传感器,并且在第一基板的另一侧上施加用于所述多个光传感器的传感器阵列层(3),并且最后将各个光传感器(7a -b)。 光传感器可以包括集成的光电电源(8,9)。

    Lithographic apparatus and device manufacturing method
    9.
    发明申请
    Lithographic apparatus and device manufacturing method 有权
    平版印刷设备和器件制造方法

    公开(公告)号:US20060102277A1

    公开(公告)日:2006-05-18

    申请号:US10988832

    申请日:2004-11-16

    IPC分类号: B32B37/00

    摘要: A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded layers. At least one of the bonded layers includes a plurality of recesses facing another of the bonded layers, so as to reduce a bonding surface between the bonded layers.

    摘要翻译: 公开了一种光刻设备。 该装置包括布置成调节辐射束的照明系统和被配置为支撑要放置在辐射束的光束路径中的物品的物品支撑件。 物品支撑件包括多个粘合层。 至少一个接合层包括面对另一个接合层的多个凹槽,以便减少接合层之间的接合表面。