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公开(公告)号：US5663486A
公开(公告)日：1997-09-02
申请号：US454358
申请日：1995-08-07
IPC分类号： G01P21/00 , B23Q1/36 , F16F1/26 , F16F3/02 , F16F15/06 , F16F15/073 , G01V7/00 , G01V7/02 , G01V7/16 , G01V13/00 , G01N37/00
CPC分类号： F16F15/073 , B23Q1/36 , F16F1/26 , F16F3/02 , G01V13/00 , G01V7/005 , F16F2230/0052
摘要： A mechanical linear guide for making a body move in an axial direction, comprising a system which is preferably made up of reinforced leaf springs and/or hole-type hinges, and which is rotationally symmetrical about an axial direction and mirror-symmetrical about a plane perpendicular to the axial direction. The system is connected to a fixed base at six points (A, D, I, L, M, P), and a body (18) is suspended between two points (F, G) in such a way that it can carry out only movement in the axial direction, and not in the lateral direction.
摘要翻译： PCT No.PCT / NL93 / 00265 Sec。 371日期：1995年8月7日 102（e）日期1995年8月7日PCT提交1993年12月14日PCT公布。 第WO94 / 13976号公报 日期1994年6月23日用于使身体沿轴向移动的机械线性引导件，包括优选由加强的板簧和/或孔型铰链构成并且围绕轴向和镜子旋转对称的系统 围绕垂直于轴向方向的平面对称。 该系统在六点（A，D，I，L，M，P）处连接到固定基座，并且主体（18）悬挂在两点（F，G）之间，使得它可以执行 只能在轴向移动，而不是横向移动。
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公开(公告)号：US4040307A
公开(公告)日：1977-08-09
申请号：US680963
申请日：1976-04-27
CPC分类号： F16H1/16 , F16H55/24 , F16H2057/0213 , Y10T74/19828
摘要： A worm gear transmission having a worm wheel which is journalled in a housing and a worm rotatably journalled at one end in a bearing pivotably connected to the housing, and at the other end in a second bearing engaged by an adjustable pre-load spring which presses the worm towards the wheel. The pivotably arranged bearing is also axially displaceable and is coupled to a first member which cooperates with a second member, rigidly coupled to the housing at least in the axial direction, such that, upon axial displacement of the pivoted bearing by torque loading, one of the members undergoes transverse displacement which is coupled to vary the pre-load force in the spring.
摘要翻译： 一种蜗轮传动装置，其具有轴颈安装在壳体中的蜗轮和可旋转地轴颈安装在可枢转地连接到壳体的轴承中的蜗杆，另一端在与可调节的预加载弹簧接合的第二轴承中， 蜗轮朝向车轮。 可枢转地布置的轴承还可以轴向移动并且联接到第一构件，其与第二构件协作，第二构件至少在轴向方向上刚性地联接到壳体，使得在通过扭矩加载轴向移动枢转轴承时， 构件经历横向位移，该位移联接以改变弹簧中的预加载力。
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3.发明授权Lithographic apparatus, device manufacturing method, and device manufacturing thereby 有权平版印刷设备，器件制造方法和由此制造的器件公开(公告)号：US06791664B2
公开(公告)日：2004-09-14
申请号：US10050041
申请日：2002-01-17
申请人： Frank Auer , Franciscus Andreas Cornelis Johannes Spanjers , Jan Holterman , Marinus Pieter Koster , Theodorus Jacobus Adrianus De Vries
发明人： Frank Auer , Franciscus Andreas Cornelis Johannes Spanjers , Jan Holterman , Marinus Pieter Koster , Theodorus Jacobus Adrianus De Vries
IPC分类号： G03B2742
CPC分类号： G03F7/70833 , G03F7/709
摘要： Vibrational movement between the top of a lens and a main plate on which the lens is mounted is reduced by attaching between the lens and the main plate a lens support which detects relative movement between the lens and the main plates using piezoelectric sensors and compensates for that movement to reduce vibration using piezoelectric actuators which are in series with the piezoelectric sensors. The control signal which is generated to actuate the actuated piezoelectrics is generated by a controller.
摘要翻译： 通过在透镜和主板之间安装透镜支架来减少透镜顶部和安装透镜的主板之间的振动运动，该透镜支架使用压电传感器检测透镜和主板之间的相对运动，并补偿该透镜 使用与压电传感器串联的压电致动器减少振动的运动。 产生以致动致动压电体的控制信号由控制器产生。
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公开(公告)号：US3987645A
公开(公告)日：1976-10-26
申请号：US539116
申请日：1975-01-07
CPC分类号： F16D3/005
摘要： A flexible shaft coupling consisting of a rigid plate, and shaft connection segments connected to the plate by elongated resilient tongues. The coupling is formed by cut-outs from a solid plate. Besides angle errors of the shafts to be coupled, this shaft coupling also takes up eccentricity errors and displacement in the axial direction, and forms a play-free homokinetic connection between two shafts. A comparatively high torsional rigidity of the shaft coupling is ensured.
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