公开(公告)号：US07492455B1

公开(公告)日：2009-02-17

申请号：US11483888

申请日：2006-07-10

申请人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

发明人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/10 ,  G01N21/274 ,  G01N2021/213

摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

摘要翻译： 一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。 优选的光谱椭偏仪系统没有在数据采集期间移动的部件，并且其提供渐进多个顺序离散而不是连续变化的偏振状态。

公开(公告)号：US07304737B1

公开(公告)日：2007-12-04

申请号：US11497920

申请日：2006-08-03

申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/215

摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.

摘要翻译： 光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统 的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。

公开(公告)号：US07245376B2

公开(公告)日：2007-07-17

申请号：US11284213

申请日：2005-11-22

申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008

摘要： Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.

摘要翻译： 改进的低像差继电器系统在旋转补偿器椭圆偏振器，偏振计等系统中作为空间滤波器。

公开(公告)号：US07623237B1

公开(公告)日：2009-11-24

申请号：US11452483

申请日：2006-06-14

申请人： Martin M. Liphardt ,  Thomas E. Tiwald ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  Ronald A. Synowicki ,  John A. Woollam

发明人： Martin M. Liphardt ,  Thomas E. Tiwald ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  Ronald A. Synowicki ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01N21/55

摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。

公开(公告)号：US07535566B1

公开(公告)日：2009-05-19

申请号：US11453656

申请日：2006-06-15

申请人： Blaine D. Johs ,  Galen L. Pfeiffer ,  Jeffrey S. Hale ,  Christopher A. Goeden ,  Brian D. Guenther ,  Martin M. Liphardt ,  Ping He

发明人： Blaine D. Johs ,  Galen L. Pfeiffer ,  Jeffrey S. Hale ,  Christopher A. Goeden ,  Brian D. Guenther ,  Martin M. Liphardt ,  Ping He

IPC分类号： G01J4/00 ,  G02B5/20 ,  F21V9/06

CPC分类号： G01N21/211 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0224 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01N21/274 ,  G01N2021/213 ,  G02B27/141

摘要： An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively emphasizing intensity in another wavelength range, (eg. UV wavelengths).

摘要翻译： 一种用于反射地引导电磁辐射的分光束同时在第一波长范围（例如可见波长）中强调强度的电磁光束色移和引导装置，同时相对强调另一波长范围内的强度， （例如UV波长）。

公开(公告)号：US07336361B1

公开(公告)日：2008-02-26

申请号：US11256891

申请日：2005-10-25

申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01J4/00 ,  G01N21/211 ,  G01N2021/213

摘要： A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.

摘要翻译： 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统还具有至少一个多元件透镜，并且可选地存在于环境控制室中。

公开(公告)号：US08159672B1

公开(公告)日：2012-04-17

申请号：US12592015

申请日：2009-11-19

申请人： Martin M. Liphardt ,  Thomas E. Tiwald ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  Ronald A. Synowicki ,  John A. Woollam

发明人： Martin M. Liphardt ,  Thomas E. Tiwald ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  Ronald A. Synowicki ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01N21/55

摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。

公开(公告)号：US07215424B1

公开(公告)日：2007-05-08

申请号：US11103229

申请日：2005-04-12

申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213

摘要： Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.

摘要翻译： 准无彩色多元素透镜在管状安装夹具中相对于彼此精确地安装，以及其在聚焦（和任选地重新准直））中的应用，使分光电磁束成为非常小的， 相对不分散的，材料系统上的区域斑点。

公开(公告)号：US07193710B1

公开(公告)日：2007-03-20

申请号：US10829620

申请日：2004-04-22

申请人： Blaine D. Johs ,  Martin M. Liphardt ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

发明人： Blaine D. Johs ,  Martin M. Liphardt ,  Jeffrey S. Hale ,  Craig M. Herzinger ,  Steven E. Green ,  Ping He ,  John A. Woollam

IPC分类号： G01J4/00

CPC分类号： G01J4/04 ,  G01N21/211 ,  G01N2021/213

摘要： Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.

摘要翻译： 公开了一种分光椭偏仪系统，其包括偏振器和分析器元件，其在数据采集期间保持固定在适当的位置，以及至少一个连续旋转或逐步旋转的补偿器，其透过电磁束并且施加连续可变或多个顺序离散的极化状态 在电磁辐射束上; 以及至少一个透射电磁光束的多重元件透镜。

公开(公告)号：US07075650B1

公开(公告)日：2006-07-11

申请号：US10613118

申请日：2003-07-07

申请人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

发明人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N21/274 ,  G01N2021/213

摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

摘要翻译： 一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。 优选的光谱椭偏仪系统在数据收集期间没有移动的部分，并且其提供顺序的多个顺序离散而不是连续变化的偏振状态。