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公开(公告)号:US20060106921A1
公开(公告)日:2006-05-18
申请号:US10988805
申请日:2004-11-15
IPC分类号: G06F15/177 , G06F15/173 , G06F15/16
CPC分类号: G05B19/41865 , Y02P90/20
摘要: The present invention discloses a new data collection method employed by a middle layer between the host and the equipment, which improves the speed and consistency of data collection. The middle layer incorporated with the proposed data collection method functions as a data format converter as well as a data processor/classifier, which helps to filter and format messages before delivering data to the host or equipment. The proposed data collection method enables the middle layer to perform local reply, local data sampling, and group data polling, thus relieving processing resources of both the equipment and the host. This allows implementation of APC on older wafer fabrication processes using old equipment.
摘要翻译: 本发明公开了一种由主机与设备之间的中间层采用的新数据采集方式,提高了数据采集的速度和一致性。 与提出的数据收集方法结合的中间层作为数据格式转换器以及数据处理器/分类器起作用,其在向主机或设备传送数据之前有助于过滤和格式化消息。 所提出的数据采集方法使得中间层能够执行本地应答,本地数据采样和组数据轮询,从而减轻了设备和主机的处理资源。 这允许使用旧设备在旧的晶圆制造工艺上实现APC。