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1.发明授权Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom 有权用于确定和/或改善薄膜谐振器装置中的高功率可靠性的方法和装置，以及由此产生的薄膜谐振器装置公开(公告)号：US06674291B1
公开(公告)日：2004-01-06
申请号：US09669681
申请日：2000-09-26
IPC分类号： G01R2702
CPC分类号： H03H9/172 , G01R31/2824 , H01L24/81 , H01L2224/8121 , H01L2224/81815 , H01L2924/01019 , H01L2924/14 , H03H3/02 , H03H9/02125 , Y10T29/42 , Y10T29/49144 , Y10T29/49155 , Y10T29/49156 , H01L2924/00
摘要： The effects of electromigration have been shown to lead to damage of metal electrodes of electronic devices such as thin film resonator (TFR) devices in only a few hours, for a test input power that is within the operational range of these devices. It has been determined that this failure is sensitive to the frequency of the input power. The present invention provides a method and apparatus for determining high power reliability in electronic devices, so as to enable an accurate determination of the failure time of the electronic device, and hence projected lifetime. This determination is independent from the frequency of an input power applied to the electronic device as part of the method for testing the device. Based on the above results, a TFR device has been developed, which includes a protective or electromigration-reducing layer such as titanium being deposited atop an electrode of the device. The TFR device with the modified electrode structure can operate at higher power levels and has a longer operational lifetime than what is currently available.
摘要翻译： 已经显示电迁移的影响导致仅在几个小时内对诸如薄膜谐振器（TFR）器件的电子器件的金属电极的损坏，用于在这些器件的工作范围内的测试输入功率。 已经确定这种故障对输入功率的频率敏感。 本发明提供一种用于确定电子设备中的高功率可靠性的方法和装置，以便能够准确地确定电子设备的故障时间，并因此能够预测寿命。 作为用于测试设备的方法的一部分，该确定与施加到电子设备的输入功率的频率无关。 基于上述结果，已经开发了一种TFR器件，其包括保护或电迁移减少层，例如钛沉积在器件的电极上。 具有改进的电极结构的TFR器件可以在更高的功率水平下工作，并且具有比目前可用的更长的工作寿命。
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公开(公告)号：US06420202B1
公开(公告)日：2002-07-16
申请号：US09571919
申请日：2000-05-16
IPC分类号： H01L2100
摘要： A process for configuring a thin film resonator to advantageously shape a desired acoustic mode of the resonator such that the electrical and acoustic performance of the resonator is enhanced. As a result of the contouring or shaping, a minimum amount of acoustic energy occurs near the edge of the resonator, from which energy may leak or at which undesired waves may be created by a desired mode. The process is used during batch-fabrication of thin-film resonators which are used in high frequency RF filtering or frequency control applications. Utilizing photolithography, the shaping can be achieved in a manner derived from the known methods used to manufacture lens arrays. Using the process, the lateral motion of acoustic waves within the resonator may be controlled and the acoustic energy of the sound wave positioned at a desired location within the resonator.
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公开(公告)号：US06635519B2
公开(公告)日：2003-10-21
申请号：US10043969
申请日：2002-01-10
IPC分类号： H01L2100
摘要： In the thin film resonator, a piezoelectric membrane is disposed over a substrate. A first support structure defines a space over the substrate and supports the edges of the piezoelectric membrane such that the piezoelectric membrane is disposed over this space. A further support structure is disposed within the space to the piezoelectric membrane.
摘要翻译： 在薄膜谐振器中，压电膜设置在基板上。 第一支撑结构限定了衬底上的空间并且支撑压电膜的边缘，使得压电膜设置在该空间上。 另外的支撑结构设置在压缩膜的空间内。
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公开(公告)号：US06657517B2
公开(公告)日：2003-12-02
申请号：US10028191
申请日：2001-12-20
IPC分类号： H03H9205
CPC分类号： H03H3/04 , H03H2003/0428 , Y10T29/42
摘要： Differing metallic electrodes having the same or differing thickness are formed at different locations on a support structure and/or on a single thickness film of piezoelectric material in order to form a multiple frequency resonator device having greatly separated acoustic resonance frequencies. A plurality of multiple frequency resonators can be combined to form a blank of frequency selective devices in order to handle the many different RF bands, at widely varying frequencies, that wireless communication technologies demand today.
摘要翻译： 形成具有相同或不同厚度的不同金属电极在支撑结构上的不同位置和/或压电材料的单个厚度膜上形成，以形成具有极大分离的声共振频率的多频谐振器装置。 多个多频谐振器可以被组合以形成频率选择装置的空白，以便处理无线通信技术今天需要的广泛变化的频率的许多不同RF频带。
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5.发明授权公开(公告)号：US06305226B1
公开(公告)日：2001-10-23
申请号：US09385745
申请日：1999-08-30
IPC分类号： G01N2900
CPC分类号： G01N29/06 , Y10S977/837 , Y10S977/849 , Y10S977/85 , Y10S977/852 , Y10S977/865
摘要： This invention relates to a method and apparatus for imaging acoustic fields in high-frequency acoustic resonators. More particularly, the invention is directed to a scanning RF mode microscope system that detects and monitors vibration of high frequency resonators that vibrate in the frequency range of approximately 1 MHz to 20 GHz. The system then maps with sub-Angstrom resolution vibration modes of such devices and obtains quantitative measurements of the piezoelectric properties of the materials.
摘要翻译： 本发明涉及用于对高频声谐振器中的声场进行成像的方法和装置。 更具体地，本发明涉及一种扫描RF模式显微镜系统，其检测和监测在大约1MHz至20GHz的频率范围内振动的高频谐振器的振动。 然后系统用这种器件的亚分辨率振动模式映射，并获得材料的压电特性的定量测量。
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6.发明授权Method and apparatus for studying vibrational modes of an electro-acoustic device 失效用于研究电声装置的振动模式的方法和装置公开(公告)号：US06587212B1
公开(公告)日：2003-07-01
申请号：US09702713
申请日：2000-10-31
IPC分类号： G01B902
CPC分类号： G01B11/00
摘要： A method for studying vibrational modes of an electro-acoustic device includes driving the electro-acoustic device to produce at least one vibrational mode therein, collecting phase and amplitude data from the electro-acoustic device using optical interferometry, and mapping the at least one vibrational mode based upon the collected phase and amplitude data. The phase and amplitude data may be processed to provide an instantaneous three-dimensional view of the at least one vibrational mode. Furthermore, a sequence of instantaneous three-dimensional views may be constructed to form a motion picture of the at least one vibrational mode. Additionally, collecting may include raster scanning to provide phase and amplitude data across a surface of the electro-acoustic device.
摘要翻译： 一种用于研究电声装置的振动模式的方法包括驱动电声装置以在其中产生至少一个振动模式，使用光学干涉测量从电声装置收集相位和振幅数据，并将至少一个振动 模式基于收集的相位和振幅数据。 可以处理相位和振幅数据以提供至少一个振动模式的瞬时三维视图。 此外，可以构造一系列瞬时三维视图以形成至少一个振动模式的运动图像。 另外，收集可以包括光栅扫描以提供横跨电声装置的表面的相位和幅度数据。
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公开(公告)号：US6014477A
公开(公告)日：2000-01-11
申请号：US926213
申请日：1997-09-09
CPC分类号： G02B6/3568 , G02B26/02 , G02F1/0126 , G02B6/3512 , G02B6/3548 , G02B6/358
摘要： A switching element according to this invention comprises a photostrictive member. Exposing the member to control light results in a dimensional change in the material. This change is utilized for changing the relative position between an optical fiber and another element, exemplarily a further fiber, a corrugated member, or a mirror, such that signal radiation is directed to a predetermined output port. A variety of exemplary switching elements are disclosed, including interferometric, beam-steering, evanescent field and mode conversion switching elements. Disclosed are also optical communication systems that utilize such switching elements, including passive optical networks.
摘要翻译： 根据本发明的开关元件包括光致伸缩构件。 暴露成员控制光导致材料的尺寸变化。 该改变用于改变光纤和另一元件之间的相对位置，例如另外的光纤，波纹部件或反射镜，使得信号辐射被引导到预定的输出端口。 公开了各种示例性的开关元件，包括干涉测量，光束转向，消逝场和模式转换开关元件。 还公开了利用这种开关元件（包括无源光网络）的光通信系统。
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公开(公告)号：US06603241B1
公开(公告)日：2003-08-05
申请号：US09576807
申请日：2000-05-23
申请人： Bradley Paul Barber , Harold Alexis Huggins , Ronald Eugene Miller , Donald Winslow Murphy , Yiu-Huen Wong
发明人： Bradley Paul Barber , Harold Alexis Huggins , Ronald Eugene Miller , Donald Winslow Murphy , Yiu-Huen Wong
IPC分类号： H03H925
CPC分类号： H03H9/175
摘要： A reflector stack or acoustic mirror arrangement for an acoustic device is described which may attain the highest possible impedance mismatch between alternating higher and lower impedance reflecting layers of the stack, so as to maximize bandwidth. The arrangement may also reduce manufacturing costs by requiring fewer layers for the device, as compared to conventional acoustic mirrors. The thinner reflecting stack is accordingly fabricated in reduced time to lower cost, by incorporating materials providing a larger acoustic impedance mismatch than those currently obtainable. The bandwidth of the resulting acoustic resonator device may be widened, particularly when a low density material such as aerogel, CVD SiO2 and/or sputter deposited SiO2 is applied as topmost layer in the reflector stack/acoustic mirror arrangement of the device.
摘要翻译： 描述了用于声学装置的反射器叠层或声镜装置，其可以在堆叠的交替的较高和较低阻抗反射层之间达到最高可能的阻抗失配，从而最大化带宽。 与传统的声反射镜相比，该装置还可以通过要求较少的器件层来降低制造成本。 因此，通过结合提供比目前可获得的更大的声阻抗失配的材料，减少了较薄的反射叠层，从而降低了成本。 特别是当诸如气凝胶，CVD SiO 2和/或溅射沉积的SiO 2之类的低密度材料作为装置的反射器叠层/声镜装置中的最顶层被施加时，所得到的声共振器装置的带宽可能变宽。
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9.发明授权Incremental tuning process for electrical resonators based on mechanical motion 有权基于机械运动的电谐振器的增量调谐过程公开(公告)号：US06339276B1
公开(公告)日：2002-01-15
申请号：US09431772
申请日：1999-11-01
申请人： Bradley Paul Barber , Yiu-Huen Wong
发明人： Bradley Paul Barber , Yiu-Huen Wong
IPC分类号： H01L4104
CPC分类号： H03H9/131 , G04F5/063 , H03H3/04 , H03H9/175 , H03H2003/0428 , H04R15/02 , H04R17/10 , H04R31/00 , Y10S29/016 , Y10T29/42 , Y10T29/435 , Y10T29/49004 , Y10T29/49005
摘要： The present invention is a method for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrodes is structured with a plurality of stacked adjustment layers, each of which has distinct etching properties from any adjacent adjustment layers. Also as part of the same invention is a resonator structure in which at least one electrode has a plurality of stacked layers of a material having different etching properties from any adjacent adjustment layers, and each layer has a thickness corresponding to a calculated frequency increment in the resonant frequency of the resonator.
摘要翻译： 本发明是一种用于调节机械谐振器的谐振频率的方法，该机械谐振器的频率取决于整个谐振器厚度。 使用交替选择性蚀刻来从顶部电极去除不同的调节层。 其中一个电极由多个堆叠的调整层构成，每个层都具有与任何相邻的调整层不同的蚀刻特性。 同样的发明的一部分也是一种共振器结构，其中至少一个电极具有与任何相邻的调整层具有不同蚀刻性能的材料的多个堆叠层，并且每个层的厚度对应于计算出的 谐振器的谐振频率。
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公开(公告)号：US06307447B1
公开(公告)日：2001-10-23
申请号：US09432040
申请日：1999-11-01
IPC分类号： H03H954
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0435 , Y10T29/42
摘要： The present invention is a method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, in a case where the resonant frequencies of the resonators are a function of each resonator thickness. According to this method the resonators are each formed with an etchable top electrode layer which includes a material having different etching properties as a topmost layer for each of the resonators having different resonant frequencies. By selectively etching these etchable layers one at a time in the presence of the others, one may adjust the resonant frequencies of each of the resonators without need to mask the resonators during the etching process. Associated with this method there is a resonator structure having a top electrode structure having a topmost layer having different etching characteristics for different resonators.
摘要翻译： 本发明是在谐振器的谐振频率为每个谐振器厚度的函数的情况下，调整形成在公共基板上的多个机械谐振器的不同谐振频率的方法。 根据该方法，谐振器各自形成有可蚀刻的顶部电极层，其包括具有不同蚀刻性质的材料作为具有不同谐振频率的每个谐振器的最顶层。 通过在其他存在的情况下一次一个地选择性地蚀刻这些可蚀刻层，可以调整每个谐振器的谐振频率，而不需要在蚀刻过程期间掩蔽谐振器。 与该方法相关联的是具有顶部电极结构的谐振器结构，其具有不同谐振器的具有不同蚀刻特性的最顶层。
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