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    SUSCEPTOR WITH BACKSIDE AREA OF CONSTANT EMISSIVITY
    2.
    发明申请
    SUSCEPTOR WITH BACKSIDE AREA OF CONSTANT EMISSIVITY 有权
    具有不断发生的背景区域的障碍物

    公开(公告)号：US20080274604A1

    公开(公告)日：2008-11-06

    申请号：US11744760

    申请日：2007-05-04

    申请人： Errol Sanchez ,  David Carlson ,  Craig Metzner

    发明人： Errol Sanchez ,  David Carlson ,  Craig Metzner

    IPC分类号： H01L21/20 ,  C23C16/00

    CPC分类号： H01L21/68757 ,  C23C16/4581 ,  C23C16/481 ,  C23C16/52

    摘要： Methods and apparatus for providing constant emissivity of the backside of susceptors are provided. Provided is a susceptor comprising: a susceptor plate having a surface for supporting a wafer and a backside surface opposite the wafer supporting surface; a layer comprising an oxide, a nitride, an oxynitride, or combinations thereof located on the backside surface of the susceptor plate, the layer being stable in the presence of a reactive process gas. The layer comprises, for example, silicon dioxide, silicon nitride, silicon oxynitride, or combinations thereof. Also provided is a method comprising: providing a susceptor in a deposition chamber, the susceptor comprising a susceptor plate and a layer comprising an oxide, a nitride, an oxynitride, or combinations thereof, the layer being stable in the presence of the reactive process gases; locating the wafer on a support surface of the susceptor plate. The method can further comprises selectively depositing an epitaxial layer or a non-epitaxial layer on a surface of the wafer. The method further comprises selectively etching to maintain the oxide, nitride, oxynitride, or combinations thereof layer.

    摘要翻译： 提供了用于提供感受器背面恒定发射率的方法和装置。 本发明提供一种基座，其特征在于，包括：具有用于支撑晶片的表面的基座板和与所述晶片支撑面相对的背面; 位于基座板的背面上的包含氧化物，氮化物，氧氮化物或其组合的层，该层在反应性工艺气体存在下是稳定的。 该层包括例如二氧化硅，氮化硅，氮氧化硅或其组合。 还提供了一种方法，其包括：在沉积室中提供感受器，所述基座包括基座板和包含氧化物，氮化物，氧氮化物或其组合的层，所述层在反应性工艺气体存在下是稳定的 ; 将晶片定位在基座板的支撑表面上。 该方法还可以包括在晶片的表面上选择性地沉积外延层或非外延层。 该方法还包括选择性蚀刻以维持氧化物，氮化物，氧氮化物或其组合层。

    Halogen lamp assembly with integrated heat sink
    3.
    发明申请
    Halogen lamp assembly with integrated heat sink 有权
    卤素灯组件，集成散热器

    公开(公告)号：US20050146257A1

    公开(公告)日：2005-07-07

    申请号：US10752145

    申请日：2004-01-06

    申请人： Robert Trujillo ,  Roger Anderson ,  David Carlson ,  Michael Hale

    发明人： Robert Trujillo ,  Roger Anderson ,  David Carlson ,  Michael Hale

    IPC分类号： H01J7/24 ,  H01J61/52 ,  H01K1/58 ,  H01K1/64 ,  H01L21/00

    CPC分类号： H01L21/67115 ,  H01K1/58

    摘要： A halogen lamp assembly 20 for a substrate processing chamber 100 has a halogen lamp 22 and a ceramic heat sink monolith 24. The halogen lamp 22 includes a filament 28 and a pair of electrical connectors 30 encapsulated in an envelope 26 having a pinch seal end 34. The ceramic heat sink monolith 24 includes a block 38 and an array of spaced apart posts 40 projecting outwardly from the block 38. The block 38 includes a cavity 42 that has a recessed inner surface 44 shaped to mate with the pinch seal end 34 of the lamp 22 and an opening that allows the electrical connectors 30 of the halogen lamp 22 to pass through.

    摘要翻译： 用于衬底处理室100的卤素灯组件20具有卤素灯22和陶瓷散热器整体24.卤素灯22包括细丝28和一对电连接器30，该电连接器30封装在具有夹紧密封端34的封套26中 陶瓷散热器整料24包括块38和从块38向外突出的间隔开的柱40的阵列。块38包括空腔42，凹部42具有凹陷的内表面44，该内表面44成形为与挤压密封端34配合 灯22和允许卤素灯22的电连接器30通过的开口。

    Halogen lamp assembly with integrated heat sink
    4.
    发明授权
    Halogen lamp assembly with integrated heat sink 有权
    卤素灯组件，集成散热器

    公开(公告)号：US07522822B2

    公开(公告)日：2009-04-21

    申请号：US10752145

    申请日：2004-01-06

    申请人： Robert Trujillo ,  Roger Anderson ,  David Carlson ,  Michael Hale

    发明人： Robert Trujillo ,  Roger Anderson ,  David Carlson ,  Michael Hale

    IPC分类号： A21B2/00

    CPC分类号： H01L21/67115 ,  H01K1/58

    摘要： A halogen lamp assembly 20 for a substrate processing chamber 100 has a halogen lamp 22 and a ceramic heat sink monolith 24. The halogen lamp 22 includes a filament 28 and a pair of electrical connectors 30 encapsulated in an envelope 26 having a pinch seal end 34. The ceramic heat sink monolith 24 includes a block 38 and an array of spaced apart posts 40 projecting outwardly from the block 38. The block 38 includes a cavity 42 that has a recessed inner surface 44 shaped to mate with the pinch seal end 34 of the lamp 22 and an opening that allows the electrical connectors 30 of the halogen lamp 22 to pass through.

    摘要翻译： 用于衬底处理室100的卤素灯组件20具有卤素灯22和陶瓷散热器整体24.卤素灯22包括细丝28和一对电连接器30，该电连接器30封装在具有夹紧密封端34的封套26中 陶瓷散热器整料24包括块38和从块38向外突出的间隔开的柱40的阵列。块38包括空腔42，凹部42具有凹陷的内表面44，该内表面44成形为与挤压密封端34配合 灯22和允许卤素灯22的电连接器30通过的开口。

    METHOD, APPARATUS AND COMPUTER PROGRAM PRODUCT FOR SUGGESTING IMPERFECT TIMES FOR CYCLICAL APPOINTMENTS
    7.
    发明申请
    METHOD, APPARATUS AND COMPUTER PROGRAM PRODUCT FOR SUGGESTING IMPERFECT TIMES FOR CYCLICAL APPOINTMENTS 审中-公开
    方法，设备和计算机程序产品，用于建议循环任务的不正确时间

    公开(公告)号：US20120221369A1

    公开(公告)日：2012-08-30

    申请号：US13034153

    申请日：2011-02-24

    申请人： Kent Braatem ,  David Carlson

    发明人： Kent Braatem ,  David Carlson

    IPC分类号： G06Q10/00 ,  G06Q50/00

    CPC分类号： G06Q10/06

    摘要： A method for developing cost-effective pathways for treatment using an evidence-based approach may include enabling suggestions of imperfect times for cyclical appointments may include receiving availability information defining available periods for a healthcare related asset, receiving appointment parameters defining a number and frequency of recurring appointments to be scheduled, determining, via processing circuitry, periods of overlap between the available periods and the appointment parameters, and determining an inconsistent schedule pattern based on the periods of overlap. A corresponding computer program product and apparatus are also provided.

    摘要翻译： 使用基于证据的方法开发用于治疗的成本效益途径的方法可以包括实现周期性约会的不完美时间的建议可以包括接收定义与保健相关资产的可用时段的可用性信息，接收定义重复次数和频率的约定参数 通过处理电路确定可用时间段与预约参数之间的重叠周期，以及基于重叠周期来确定不一致的调度模式。 还提供了相应的计算机程序产品和装置。

    AERIAL ROOF ESTIMATION SYSTEM AND METHOD
    8.
    发明申请
    AERIAL ROOF ESTIMATION SYSTEM AND METHOD 有权
    AERIAL屋顶估计系统和方法

    公开(公告)号：US20100179787A2

    公开(公告)日：2010-07-15

    申请号：US12148439

    申请日：2008-04-17

    申请人： Chris Pershing ,  David Carlson

    发明人： Chris Pershing ,  David Carlson

    IPC分类号： G01B13/20

    CPC分类号： G06Q30/0206 ,  G06Q10/00 ,  G06Q30/0283 ,  G06Q40/08 ,  G06Q50/16

    摘要： A system that allows the remote measurement of the size, geometry, pitch and orientation of the roof sections of a building and then uses the information to provide an estimate to repair or replace the roof, or to install equipment thereon. The system includes an aerial image file database that shows aerial images of buildings in a designated area according to address. The slope and orientation images are typically oblique perspective views and top plan views of the buildings in the area. The system also includes an image analysis and calibration feature that enables the viewer to closely estimate the size, geometry and orientation of the building's roof sections. The information can then be used to prepare a cost estimate for the repair or replacement of the roof or installation of roof equipment. By simply inputting the potential customer's address, the company is able to determine the size, geometry, pitch and orientation of the roof sections of the building at that address, and then quickly provide an accurate estimate to the customer.

    摘要翻译： 允许远程测量建筑物屋顶部分的尺寸，几何形状，俯仰和方向的系统，然后使用该信息来提供对屋顶的修理或更换或在其上安装设备的估计。 该系统包括一个航空图像文件数据库，根据地址显示指定区域内的建筑物的空中图像。 倾斜和定向图像通常是该区域的建筑物的倾斜透视图和俯视图。 该系统还包括图像分析和校准功能，使得观看者可以仔细估计建筑物屋顶部分的尺寸，几何形状和方向。 然后可以使用这些信息来准备屋顶设备的屋顶或安装的修理或更换的成本估算。 通过简单地输入潜在客户的地址，公司能够确定该地址的建筑物屋顶部分的尺寸，几何形状，倾斜度和方向，然后快速为客户提供准确的估计。

    METHODS AND APPARATUS FOR INSITU ANALYSIS OF GASES IN ELECTRONIC DEVICE FABRICATION SYSTEMS
    10.
    发明申请
    METHODS AND APPARATUS FOR INSITU ANALYSIS OF GASES IN ELECTRONIC DEVICE FABRICATION SYSTEMS 有权
    电子设备制造系统气体分析方法与装置

    公开(公告)号：US20080022751A1

    公开(公告)日：2008-01-31

    申请号：US11830832

    申请日：2007-07-30

    申请人： David Carlson ,  Satheesh Kuppurao

    发明人： David Carlson ,  Satheesh Kuppurao

    IPC分类号： G01N33/00 ,  E03B5/00

    CPC分类号： G01N33/0016 ,  Y10T137/85978

    摘要： Systems and methods are disclosed that include adjusting a pressure level of a sample gas in a testing chamber, for example, using a pressurized inert reference gas, and determining a composition of the adjusted sample gas. By adjusting the pressure level of the sample gas, the composition of the sample gas may be determined more accurately than otherwise possible. Numerous other aspects are disclosed.

    摘要翻译： 公开了一种系统和方法，其包括调节测试室中的样品气体的压力水平，例如使用加压的惰性参考气体，以及确定经调节的样品气体的组成。 通过调整样品气体的压力水平，可以比其它方法更准确地确定样品气体的组成。 公开了许多其他方面。