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公开(公告)号：US07429537B2
公开(公告)日：2008-09-30
申请号：US11292823
申请日：2005-12-02
IPC分类号： H01L21/302
CPC分类号： H01L21/67051 , B08B3/02 , H01L21/67028
摘要： A method for rinsing and drying a workpiece includes placing the workpiece into a chamber and spinning the workpiece. A rinsing fluid, such as water, is applied onto the workpiece through a first outlet in the chamber, with the rinsing fluid moving outwardly towards the edge of the workpiece via centrifugal force, to rinse the workpiece. A drying fluid, such as an alcohol vapor, is applied onto the workpiece through the first outlet, with the drying fluid moving outwardly towards the edge of the workpiece via centrifugal force, to dry the workpiece. The drying fluid advantageously follows a meniscus of the rinsing fluid across the workpiece surface. The rinsing fluid, or the drying fluid, or both fluids, may be applied near or at a central area of the workpiece.
摘要翻译： 用于冲洗和干燥工件的方法包括将工件放置在室中并旋转工件。 冲洗流体例如水通过腔室中的第一出口施加到工件上，漂洗流体通过离心力向外移动到工件的边缘，以冲洗工件。 干燥流体，例如醇蒸汽，通过第一出口施加到工件上，干燥流体通过离心力向外移动到工件的边缘，以干燥工件。 干燥流体有利地沿着穿过工件表面的冲洗流体的弯液面。 冲洗流体或干燥流体或两种流体可以施加在工件的中心区域附近或其附近。
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公开(公告)号：US07399713B2
公开(公告)日：2008-07-15
申请号：US10632495
申请日：2003-07-31
申请人： Brian K. Aegerter , Curt T. Dundas , Tom L. Ritzdorf , Gary L. Curtis , Michael Jolley , Steven L. Peace
发明人： Brian K. Aegerter , Curt T. Dundas , Tom L. Ritzdorf , Gary L. Curtis , Michael Jolley , Steven L. Peace
IPC分类号： H01L21/302
CPC分类号： H01L21/6715 , C23F1/18 , C23F1/30 , H01L21/32134 , H01L21/67017 , H01L21/6708 , Y10S134/902 , Y10S438/906
摘要： This invention provides a process for treating a workpiece having a front side, a back side, and an outer perimeter. In accordance with the process, a processing fluid is selectively applied or excluded from an outer peripheral margin of at least one of the front or back sides or the workpiece. Exclusion and/or application of the processing fluid occurs by applying one or more processing fluids to the workpiece as the workpiece and corresponding reactor are spinning about an axis of rotation that is generally orthogonal to the center of the face of the workpiece being processed. The flow rate of the one or more processing fluids, fluid pressure, and/or spin rate are used to control the extent to which the processing fluid is selectively applied or excluded from the outer peripheral margin.
摘要翻译： 本发明提供了一种用于处理具有前侧，后侧和外周的工件的方法。 根据该过程，从前侧或后侧或工件中的至少一个的外周边缘选择性地施加或排除处理流体。 处理流体的排除和/或应用通过将一种或多种加工流体施加到工件上而发生，因为工件和相应的反应器围绕大致正交于被加工工件的面的中心的旋转轴旋转。 使用一种或多种加工流体的流量，流体压力和/或旋转速率来控制从外周边缘选择性地施加或排除处理流体的程度。
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公开(公告)号：US06632292B1
公开(公告)日：2003-10-14
申请号：US09672572
申请日：2000-09-28
IPC分类号： B08B700
CPC分类号： H01L21/6715 , C23F1/18 , C23F1/30 , H01L21/32134 , H01L21/67017 , H01L21/6708 , Y10S134/902 , Y10S438/906
摘要： This invention provides a process for treating a workpiece having a front side, a back side, and an outer perimeter. In accordance with the process, a processing fluid is selectively applied or excluded from an outer peripheral margin of at least one of the front or back sides or the workpiece. Exclusion and/or application of the processing fluid occurs by applying one or more processing fluids to the workpiece as the workpiece and corresponding reactor are spinning about an axis of rotation that is generally orthogonal to the center of the face of the workpiece being processed. The flow rate of the one or more processing fluids, fluid pressure, and/or spin rate are used to control the extent to which the processing fluid is selectively applied or excluded from the outer peripheral margin.
摘要翻译： 本发明提供了一种用于处理具有前侧，后侧和外周的工件的方法。 根据该过程，从前侧或后侧或工件中的至少一个的外周边缘选择性地施加或排除处理流体。 处理流体的排除和/或应用通过将一种或多种加工流体施加到工件上而发生，因为工件和相应的反应器围绕大致正交于被加工工件的面的中心的旋转轴旋转。 使用一种或多种加工流体的流量，流体压力和/或旋转速率来控制从外周边缘选择性地施加或排除处理流体的程度。
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公开(公告)号：US06413436B1
公开(公告)日：2002-07-02
申请号：US09437926
申请日：1999-11-10
申请人： Brian Aegerter , Curt T. Dundas , Michael Jolley , Tom L. Ritzdorf , Steven L. Peace , Gary L. Curtis , Raymon F. Thompson
发明人： Brian Aegerter , Curt T. Dundas , Michael Jolley , Tom L. Ritzdorf , Steven L. Peace , Gary L. Curtis , Raymon F. Thompson
IPC分类号： C23F102
CPC分类号： H01L21/67017 , C23F1/18 , H01L21/32134 , H01L21/6708 , Y10S438/928 , Y10S438/963
摘要： In a process for treating a workpiece such as a semiconductor wafer, a processing fluid is selectively applied or excluded from an outer peripheral margin of at least one of the front or back sides of the workpiece. Exclusion and/or application of the processing fluid occurs by applying one or more processing fluids to the workpiece while the workpiece and a reactor holding the workpiece are spinning. The flow rate of the processing fluids, fluid pressure, and/or spin rate are used to control the extent to which the processing fluid is selectively applied or excluded from the outer peripheral margin.
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公开(公告)号：US20190151726A1
公开(公告)日：2019-05-23
申请号：US16197176
申请日：2018-11-20
申请人： Michael Jolley
发明人： Michael Jolley , Kenneth Courian
CPC分类号： A63B57/207 , A63B47/02 , A63B53/14 , A63B57/353 , A63B57/50 , A63B60/06 , A63B60/22 , A63B2209/08
摘要： Golf tool devices and golf clubs having those devices attached to, or incorporated with, their grips are disclosed. In some embodiments, the golf tool device includes a housing and a tool assembly attached to the housing. The tool assembly includes a base jaw and a gripper jaw pivotably connected to the base jaw. The tool assembly additionally includes a spring connected to the gripper jaw and configured to urge the gripper jaw toward the base jaw. The golf tool device additionally includes a mode selector assembly configured to selectively switch operation of the gripper jaw between at least two modes. The at least two modes include a first mode in which the gripper jaw moves in response to urging of the spring, and a second mode in which the gripper jaw is secured in a first position that is spaced away from the base jaw against urging of the spring.
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公开(公告)号：US07368927B2
公开(公告)日：2008-05-06
申请号：US11175600
申请日：2005-07-05
IPC分类号： G01R31/02
CPC分类号： G01R1/0735 , G01R1/07371
摘要： A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.
摘要翻译： 探头，其包括当弹性膜的一个表面之一变形时能够发挥恢复力的弹性膜。 导电探针包括具有第一端和第二端的梁，探针尖靠近第一端以接触待测器件。 靠近梁的第二端的梁接触。 梁可移动以使弹性膜的至少一个表面变形。
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公开(公告)号：US20190262678A1
公开(公告)日：2019-08-29
申请号：US16407594
申请日：2019-05-09
申请人： Michael Jolley
发明人： Michael Jolley , Kenneth Courian
摘要： Golf tool devices and golf clubs having those devices attached to, or incorporated with, their grips are disclosed. In some embodiments, the golf tool device includes a housing and a tool assembly attached to the housing. The tool assembly includes a base jaw and a gripper jaw pivotably connected to the base jaw. The tool assembly additionally includes a spring connected to the gripper jaw and configured to urge the gripper jaw toward the base jaw. The golf tool device additionally includes a mode selector assembly configured to selectively switch operation of the gripper jaw between at least two modes. The at least two modes include a first mode in which the gripper jaw moves in response to urging of the spring, and a second mode in which the gripper jaw is secured in a first position that is spaced away from the base jaw against urging of the spring.
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公开(公告)号：US10369440B2
公开(公告)日：2019-08-06
申请号：US16197176
申请日：2018-11-20
申请人： Michael Jolley
发明人： Michael Jolley , Kenneth Courian
摘要： Golf tool devices and golf clubs having those devices attached to, or incorporated with, their grips are disclosed. In some embodiments, the golf tool device includes a housing and a tool assembly attached to the housing. The tool assembly includes a base jaw and a gripper jaw pivotably connected to the base jaw. The tool assembly additionally includes a spring connected to the gripper jaw and configured to urge the gripper jaw toward the base jaw. The golf tool device additionally includes a mode selector assembly configured to selectively switch operation of the gripper jaw between at least two modes. The at least two modes include a first mode in which the gripper jaw moves in response to urging of the spring, and a second mode in which the gripper jaw is secured in a first position that is spaced away from the base jaw against urging of the spring.
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公开(公告)号：US07514944B2
公开(公告)日：2009-04-07
申请号：US12075341
申请日：2008-03-10
IPC分类号： G01R31/02
CPC分类号： G01R1/0735 , G01R1/07371
摘要： A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.
摘要翻译： 探头，其包括当弹性膜的一个表面之一变形时能够发挥恢复力的弹性膜。 导电探针包括具有第一端和第二端的梁，探针尖靠近第一端以接触待测器件。 靠近梁的第二端的梁接触。 梁可移动以使弹性膜的至少一个表面变形。
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公开(公告)号：US20060006889A1
公开(公告)日：2006-01-12
申请号：US11175600
申请日：2005-07-05
申请人： Kenneth Smith , Michael Jolley , Victoria Syckel
发明人： Kenneth Smith , Michael Jolley , Victoria Syckel
IPC分类号： G01R31/02
CPC分类号： G01R1/0735 , G01R1/07371
摘要： A probe head with membrane suspended probes.
摘要翻译： 探针头与膜悬浮探针。
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