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1.发明申请公开(公告)号：US20170278704A1
公开(公告)日：2017-09-28
申请号：US15618868
申请日：2017-06-09
Applicant: CANON KABUSHIKI KAISHA
Inventor： Yohei Murayama , Toshiki Ito , Chieko Mihara , Motoki Okinaka
IPC: H01L21/027 , G03F7/00 , B82Y40/00 , B82Y10/00
CPC classification number: H01L21/0274 , B29C33/62 , B29C39/026 , B29C2035/0827 , B82Y10/00 , B82Y15/00 , B82Y40/00 , G03F1/76 , G03F7/0002 , G03F7/0046 , G03F7/0048 , G03F7/027 , H01L21/3081
Abstract: It is intended to provide a photocured product that is prepared using the photo-imprint method and has favorable pattern precision and improvement in pattern defects. The present invention provides a photocured product obtained by irradiating a coating film in contact with a mold with light, the photocured product containing a fluorine atom-containing surfactant, wherein of secondary ion signals obtained by the surface analysis of the photocured product based on time-of-flight secondary ion mass spectrometry, the intensity of a C2H5O30 ion signal is higher than that of a C3H7O+ ion signal.
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2.发明申请
公开(公告)号：US20160129612A1
公开(公告)日：2016-05-12
申请号：US14921112
申请日：2015-10-23
Applicant: CANON KABUSHIKI KAISHA
Inventor： Junichi Seki , Motoki Okinaka
CPC classification number: G03F7/0002 , B29C43/3642 , B29C2043/3652
Abstract: Provided is an imprint method that molds an uncured resin applied to a substrate by a pattern portion formed on a mold and cures the uncured resin so as to form the pattern of the resin cured on the substrate. The imprint method includes a step of releasing the pattern portion from the resin such that two opposed boundaries are brought closer to each other to progress peeling while maintaining a parallel state after curing of the resin based on the assumption that the boundary at which the pattern portion is peeled from the resin is linear.
Abstract translation: 提供了一种印模方法，其通过形成在模具上的图案部分来模塑施加到基板上的未固化树脂，并固化未固化的树脂，以形成在基材上固化的树脂的图案。 压印方法包括从树脂释放图案部分的步骤，使得两个相对的边界彼此靠近以进行剥离，同时保持树脂固化后的平行状态，假设图案部分 从树脂上剥离是线性的。
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公开(公告)号：US20240100736A1
公开(公告)日：2024-03-28
申请号：US18532646
申请日：2023-12-07
Applicant: CANON KABUSHIKI KAISHA
Inventor： Koji Kitani , Motoki Okinaka , Tsutomu Miki
IPC: B28B1/00 , B33Y70/00 , C04B35/565 , C04B35/58 , C04B35/653
CPC classification number: B28B1/001 , B33Y70/00 , C04B35/565 , C04B35/58064 , C04B35/58071 , C04B35/58078 , C04B35/653 , B33Y10/00 , C04B2235/3813 , C04B2235/3826 , C04B2235/5436 , C04B2235/5463 , C04B2235/6026 , C04B2235/604 , C04B2235/665
Abstract: A shaping method includes irradiating a powder containing silicon carbide and metal boride with an energy beam based on shape data of an object of shaping to perform shaping, in which the metal boride has a melting point lower than the sublimation point of the silicon carbide.
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公开(公告)号：US09704710B2
公开(公告)日：2017-07-11
申请号：US14371293
申请日：2013-01-31
Applicant: CANON KABUSHIKI KAISHA
Inventor： Yohei Murayama , Toshiki Ito , Chieko Mihara , Motoki Okinaka
IPC: H01L21/027 , B29C33/62 , B29C39/02 , G03F7/00 , G03F7/004 , G03F7/027 , B82Y15/00 , B82Y10/00 , B82Y40/00 , G03F1/76 , H01L21/308 , B29C35/08
CPC classification number: H01L21/0274 , B29C33/62 , B29C39/026 , B29C2035/0827 , B82Y10/00 , B82Y15/00 , B82Y40/00 , G03F1/76 , G03F7/0002 , G03F7/0046 , G03F7/0048 , G03F7/027 , H01L21/3081
Abstract: It is intended to provide a photocured product that is prepared using the photo-imprint method and has favorable pattern precision and improvement in pattern defects. The present invention provides a photocured product obtained by irradiating a coating film in contact with a mold with light, the photocured product containing a fluorine atom-containing surfactant, wherein of secondary ion signals obtained by the surface analysis of the photocured product based on time-of-flight secondary ion mass spectrometry, the intensity of a C2H5O+ ion signal is higher than that of a C3H7O+ ion signal.
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公开(公告)号：US20150152208A1
公开(公告)日：2015-06-04
申请号：US14406028
申请日：2013-05-21
Applicant: CANON KABUSHIKI KAISHA
Inventor： Chieko Mihara , Toshiki Ito , Motoki Okinaka
IPC: C08F222/10
CPC classification number: C08F222/1006 , B82Y10/00 , B82Y40/00 , C08F2/44 , C08F2/50 , C08F20/18 , C08F2222/1013 , G03F7/0002 , G03F7/0046 , G03F7/027 , G03F7/11 , Y10T428/24802
Abstract: A curable composition contains a polymerizable compound and a polymerization initiator. The polymerization initiator initiates polymerization to cure the polymerizable compound. The curable composition further contains compounds having the following general formulae (1) and (2): wherein X1 is selected from a hydroxy group, a carboxy group, a sulfo group, an amino group, and an alkoxy group, l1 denotes an integer in the range of 0 to 7, m1 denotes an integer in the range of 1 to 5, and n1 denotes an integer in the range of 1 to 16, and X2 is selected from a hydroxy group, a carboxy group, a sulfo group, an amino group, and an alkoxy group, 12 denotes an integer in the range of 0 to 7, m2 denotes an integer in the range of 1 to 5, and n2 denotes an integer in the range of 1 to 16.
Abstract translation: 可固化组合物含有可聚合化合物和聚合引发剂。 聚合引发剂引发聚合以固化可聚合化合物。 可固化组合物还含有具有下列通式（1）和（2）的化合物：其中X 1选自羟基，羧基，磺基，氨基和烷氧基，l表示 0〜7的范围，m1表示1〜5的整数，n1表示1〜16的整数，X2表示羟基，羧基，磺基， 氨基和烷氧基，12表示0〜7的整数，m2表示1〜5的整数，n2表示1〜16的整数。
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公开(公告)号：US12220837B2
公开(公告)日：2025-02-11
申请号：US17848220
申请日：2022-06-23
Applicant: CANON KABUSHIKI KAISHA
Inventor： Motoki Okinaka
IPC: B28B1/00 , B33Y10/00 , B33Y70/00 , C04B35/573 , C04B35/65 , C04B35/657
Abstract: A method for producing an article containing silicon carbide as the main constituent includes a plurality of sets of steps of forming a layer of a raw material powder and irradiating the layer with laser light according to three-dimensional model data. The low material powder is a mixture of silicon carbide powder, metallic silicon powder, and carbon powder. The laser light used in the step of irradiation with laser light has a spatial laser power density of 11 J/mm3 to 50 J/mm3.
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公开(公告)号：US20190099914A1
公开(公告)日：2019-04-04
申请号：US16146862
申请日：2018-09-28
Applicant: CANON KABUSHIKI KAISHA
Inventor： Koji Kitani , Motoki Okinaka , Tsutomu Miki
IPC: B28B1/00 , C04B35/565 , C04B35/58 , C04B35/653
Abstract: A shaping method includes irradiating a powder containing silicon carbide and metal boride with an energy beam based on shape data of an object of shaping to perform shaping, in which the metal boride has a melting point lower than the sublimation point of the silicon carbide.
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公开(公告)号：US20130152390A1
公开(公告)日：2013-06-20
申请号：US13676359
申请日：2012-11-14
Applicant: Canon Kabushiki Kaisha
Inventor： Akihiko Okano , Takumi Suzuki , Motoki Okinaka
IPC: B41J2/16
CPC classification number: B41J2/1637 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1643 , B41J2/1645 , Y10T29/49401
Abstract: Provided is a process for producing a liquid ejection head which includes a substrate having an energy generating element and a wall member joined with the substrate to form an ejection orifice which ejects liquid and a flow path which communicates to the ejection orifice, the process including, in the following order, the steps of (B) forming, on the substrate, a flow path pattern form for forming the flow path, (C) forming, around the flow path pattern form, a cover resin layer for forming the wall member, and (D) transferring a surface form of the substrate to a surface of the cover resin layer so as to correspond to a pattern of the surface form of the substrate.
Abstract translation: 本发明提供一种液体喷射头的制造方法，该液体喷射头包括具有能量产生元件的基板和与基板接合的壁部件，以形成喷射液体的喷射孔和与喷射孔连通的流路， （B）在基板上形成用于形成流路的流路图案形状，（C）在流路图案形状周围形成用于形成壁构件的覆盖树脂层， 和（D）将基板的表面形式转印到覆盖树脂层的表面上，以对应于基板的表面形式的图案。
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公开(公告)号：US11332597B2
公开(公告)日：2022-05-17
申请号：US16719647
申请日：2019-12-18
Applicant: CANON KABUSHIKI KAISHA
Inventor： Toshiki Ito , Chieko Mihara , Kanae Kawahata , Motoki Okinaka , Youji Kawasaki
IPC: C08K5/06 , H05K3/00 , B05D3/12 , B05D3/06 , G03F7/031 , G03F7/038 , B82Y10/00 , B82Y40/00 , G03F7/004 , G03F7/00 , G03F7/027 , C08F2/24 , C08F2/48
Abstract: The present invention provides a photo-curable composition, and UV imprint method, that requires a small demolding force, wherein the photo-curable composition contains a polymerizable monomer (A), a polymerization initiator (B), and a fluorine-containing surfactant (C), and the photo-cured product of the photo-curable composition has a water contact angle of 74 degrees or less.
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10.发明授权
公开(公告)号：US10535519B2
公开(公告)日：2020-01-14
申请号：US15618868
申请日：2017-06-09
Applicant: CANON KABUSHIKI KAISHA
Inventor： Yohei Murayama , Toshiki Ito , Chieko Mihara , Motoki Okinaka
IPC: H01L21/027 , G03F7/004 , G03F7/027 , B82Y15/00 , B82Y10/00 , B82Y40/00 , B29C33/62 , B29C39/02 , G03F7/00 , G03F1/76 , H01L21/308 , B29C35/08
Abstract: It is intended to provide a photocured product that is prepared using the photo-imprint method and has favorable pattern precision and improvement in pattern defects. The present invention provides a photocured product obtained by irradiating a coating film in contact with a mold with light, the photocured product containing a fluorine atom-containing surfactant, wherein of secondary ion signals obtained by the surface analysis of the photocured product based on time-of-flight secondary ion mass spectrometry, the intensity of a C2H5O+ ion signal is higher than that of a C3H7O+ ion signal.
