公开(公告)号：US08176912B2

公开(公告)日：2012-05-15

申请号：US12399395

申请日：2009-03-06

申请人： ChaBum Lee ,  Sun-Kyu Lee ,  JaeYoung Joo ,  Do-Kyun Woo

发明人： ChaBum Lee ,  Sun-Kyu Lee ,  JaeYoung Joo ,  Do-Kyun Woo

IPC分类号： F24J2/08 ,  H01L31/042 ,  H01L31/00 ,  H02N6/00 ,  G02B27/44

CPC分类号： B29D11/00365 ,  G02B5/1885 ,  G03F7/2059

摘要： A light-condensing device and a method of fabricating the same are provided. The light-condensing device includes a central block, a pair of vertical diffraction grating blocks respectively located left and right of the central block, and a pair of horizontal diffraction grating blocks respectively located above and below the central block. The vertical diffraction grating blocks include parallel vertical diffraction gratings in the form of lines extending in the direction of a vertical axis, and the horizontal diffraction grating blocks include parallel horizontal diffraction gratings in the form of lines extending in the direction of a horizontal axis.

摘要翻译： 提供了一种聚光装置及其制造方法。 该聚光装置包括中央块，分别位于中央块的左侧和右侧的一对垂直衍射光栅块和分别位于中心块上方和下方的一对水平衍射光栅块。 垂直衍射光栅块包括以垂直轴方向延伸的线形的平行垂直衍射光栅，并且水平衍射光栅块包括沿横轴方向延伸的线形的平行水平衍射光栅。

公开(公告)号：US08687200B2

公开(公告)日：2014-04-01

申请号：US13479933

申请日：2012-05-24

申请人： Sun-Kyu Lee ,  ChaBum Lee ,  Gyu Ha Kim

发明人： Sun-Kyu Lee ,  ChaBum Lee ,  Gyu Ha Kim

IPC分类号： G01B9/02 ,  G01N21/86 ,  G01V8/00 ,  G01D5/36

CPC分类号： G01B9/02081 ,  G01B9/02027 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

摘要： Measurement of motion errors of a linear stage is performed to enable accurate measurement of motion errors in linear directions and a rotational direction in the linear stage using a diffraction grating. A first beam splitter splits a laser beam emitted from a light emitting unit. A first measurement unit measures a unidirectional linear motion error of the linear stage using one laser beam component split by the first beam splitter and a second measurement unit measures an angular motion error and another unidirectional linear motion of the linear stage error using a diffracted beam component obtained by diffracting another laser beam component split by the first beam splitter through the diffraction grating. A third measurement unit circularly polarizes the beam component diffracted through the diffraction grating to measure a third unidirectional linear motion error of the linear stage.

摘要翻译： 执行线性级的运动误差的测量以使得能够使用衍射光栅精确地测量线性方向上的运动误差和线性级中的旋转方向。 第一分束器分离从发光单元发射的激光束。 第一测量单元使用由第一分束器分裂的一个激光束分量来测量线性平台的单向线性运动误差，第二测量单元使用衍射光束分量来测量角运动误差和线性级误差的另一单向线性运动 通过衍射由第一分束器分裂的另一激光束分量衍射光栅获得。 第三测量单元使通过衍射光栅衍射的束分量圆偏振，以测量线性级的第三单向线性运动误差。