公开(公告)号：US06928746B2

公开(公告)日：2005-08-16

申请号：US10367080

申请日：2003-02-14

申请人： Chantal J. Arena-Foster ,  Allan Wendell Awtrey ,  Nicholas Alan Ryza ,  Paul Schilling

发明人： Chantal J. Arena-Foster ,  Allan Wendell Awtrey ,  Nicholas Alan Ryza ,  Paul Schilling

IPC分类号： B81C1/00 ,  F26B3/00 ,  F26B5/06 ,  G03F7/40

CPC分类号： B81C1/00 ,  B81C2201/117 ,  G03F7/40

摘要： A method for drying an object, having a polymeric film, wherein the object is submerged in a rinse liquid. The object is removed from the rinse liquid and the object is placed in a solvent bath before a sufficient amount of the rinse liquid can evaporate from the object. The density of a solvent in the solvent bath depends on a direction of orientation of the polymeric film with respect to a force. The object is removed from the solvent bath. A drying process is performed.

摘要翻译： 一种用于干燥具有聚合物膜的物体的方法，其中物体浸没在漂洗液体中。 将物体从冲洗液体中取出，并且将物体放置在溶剂浴中，在足够量的冲洗液体可以从物体蒸发之前。 溶剂浴中溶剂的密度取决于聚合物膜相对于力的取向方向。 将物体从溶剂浴中取出。 进行干燥处理。

公开(公告)号：US07044662B2

公开(公告)日：2006-05-16

申请号：US10911085

申请日：2004-08-03

申请人： Chantal J. Arena-Foster ,  Allan Wendell Awtrey ,  Nicholas Alan Ryza ,  Paul Schilling

发明人： Chantal J. Arena-Foster ,  Allan Wendell Awtrey ,  Nicholas Alan Ryza ,  Paul Schilling

IPC分类号： G03D5/00

CPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

摘要： An apparatus for developing a polymeric film without the need for a water rinse step is disclosed. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber of the apparatus. A fluid and developer is introduced into the pressure chamber and the object is processed at supercritical conditions to develop the polymeric film such that the polymeric film is not substantially deformed. The pressure chamber is then vented.

摘要翻译： 公开了一种用于显影聚合物膜而不需要水冲洗步骤的装置。 具有支撑聚合物膜的表面的物体被放置在设备的压力室内的支撑区域上。 将流体和显影剂引入压力室中，并且物体在超临界条件下进行处理以开发聚合物膜，使得聚合物膜基本上不变形。 然后将压力室排气。

公开(公告)号：US06924086B1

公开(公告)日：2005-08-02

申请号：US10367078

申请日：2003-02-14

申请人： Chantal J. Arena-Foster ,  Allan Wendell Awtrey ,  Nicholas Alan Ryza ,  Paul Schilling

发明人： Chantal J. Arena-Foster ,  Allan Wendell Awtrey ,  Nicholas Alan Ryza ,  Paul Schilling

IPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

CPC分类号： B05D3/02 ,  G03C5/26 ,  G03F7/30

摘要： A method of developing a polymeric film without the need for a water rinse step. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber. A fluid and developer is introduced into the pressure chamber and the object is processed at supercritical conditions to develop the polymeric film such that the polymeric film is not substantially deformed. The pressure chamber is then vented.

摘要翻译： 一种在不需要水冲洗步骤的情况下开发聚合物膜的方法。 具有支撑聚合物膜的表面的物体被放置在压力室内的支撑区域上。 将流体和显影剂引入压力室中，并且物体在超临界条件下进行处理以开发聚合物膜，使得聚合物膜基本上不变形。 然后将压力室排气。