公开(公告)号：US20050046311A1

公开(公告)日：2005-03-03

申请号：US10960871

申请日：2004-10-06

申请人： Charles Baumgartner ,  David Mills ,  Robert Lewandowski ,  Lowell Smith ,  Douglas Wildes

发明人： Charles Baumgartner ,  David Mills ,  Robert Lewandowski ,  Lowell Smith ,  Douglas Wildes

IPC分类号： G01N29/24 ,  A61B8/00 ,  A61B8/14 ,  B06B1/02 ,  B06B1/06 ,  B81B3/00 ,  G01H11/06 ,  H01L41/053 ,  H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  H01L41/193 ,  H02N2/00 ,  H04R1/32 ,  H04R17/00 ,  H04R19/00

CPC分类号： B06B1/0292 ,  B06B1/0685 ,  B06B1/0688 ,  G01H11/06 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/4908

摘要： An ultrasonic transducer device comprising: an ultrasonic transducer array micromachined on a substrate; flexible electrical connections connected to the transducer array; and a body of acoustically attenuative material that supports the substrate and the flexible electrical connections. The acoustic backing material may contain additional features, such as tabs or notches, for use in positioning the transducer on fixtures during manufacturing or positioning the transducer within a housing during final assembly. Tabs or other features that are used only during manufacturing may be subsequently removed from the device. The MUT device itself may also be thinned so as to provide flexibility as desired. The backing material is preferably matched in acoustic impedance to the silicon wafer so as to prevent reflection at the interface of any acoustic energy propagating rearward, i.e., in the direction away from the device front surface. The backing material may also possess a high thermal conductivity to assist in removal of heat from the device.

摘要翻译： 一种超声波换能器装置，包括：微机械加工在基底上的超声换能器阵列; 连接到换能器阵列的柔性电连接; 以及支撑衬底和柔性电连接的声衰减材料体。 声学衬垫材料可以包含附加特征，例如突片或凹口，用于在最终组装期间制造或将换能器定位在壳体内时将换能器定位在固定装置上。 仅在制造期间使用的标签或其它特征可随后从装置中移除。 MUT设备本身也可以被减薄，以便根据需要提供灵活性。 背衬材料优选地与硅晶片的声阻抗匹配，以便防止在向后传播的任何声能的界面处的反射，即远离器件前表面的方向上的反射。 背衬材料还可以具有高热导率以帮助从装置移除热量。

公开(公告)号：US20050075572A1

公开(公告)日：2005-04-07

申请号：US10676202

申请日：2003-10-01

申请人： David Mills ,  Douglas Wildes ,  Charles Baumgartner ,  Lowell Smith ,  Robert Lewandowski

发明人： David Mills ,  Douglas Wildes ,  Charles Baumgartner ,  Lowell Smith ,  Robert Lewandowski

IPC分类号： A61B8/00 ,  A61B8/14 ,  B06B1/02 ,  B81B7/00 ,  G03B42/06 ,  H04R17/00

CPC分类号： B06B1/0292

摘要： A micromachined ultrasonic transducer array that focuses in the elevation direction. A curved lens is used to narrow the beam width in the elevation direction so that contrast resolution is improved and clinically relevant. Alternatively, a curved probe is formed by bending a micromachined substrate to have a predetermined curvature. The invention is further directed to methods of manufacturing such transducers.

摘要翻译： 在高程方向聚焦的微机械超声换能器阵列。 使用弯曲透镜来缩小仰角方向的光束宽度，从而改善对比度分辨率并且临床上相关。 或者，通过弯曲微机械加工的基板以形成预定的曲率来形成弯曲的探针。 本发明进一步涉及制造这种换能器的方法。

公开(公告)号：US20050043628A1

公开(公告)日：2005-02-24

申请号：US10959343

申请日：2004-10-06

申请人： Charles Baumgartner ,  David Mills ,  Robert Lewandowski ,  Lowell Smith ,  Douglas Wildes

发明人： Charles Baumgartner ,  David Mills ,  Robert Lewandowski ,  Lowell Smith ,  Douglas Wildes

IPC分类号： G01N29/24 ,  A61B8/00 ,  A61B8/14 ,  B06B1/02 ,  B06B1/06 ,  B81B3/00 ,  G01H11/06 ,  H01L41/053 ,  H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  H01L41/193 ,  H02N2/00 ,  H04R1/32 ,  H04R17/00 ,  H04R19/00

CPC分类号： B06B1/0292 ,  B06B1/0685 ,  B06B1/0688 ,  G01H11/06 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/4908

摘要： An ultrasonic transducer device comprising: an ultrasonic transducer array micromachined on a substrate; flexible electrical connections connected to the transducer array; and a body of acoustically attenuative material that supports the substrate and the flexible electrical connections. The acoustic backing material may contain additional features, such as tabs or notches, for use in positioning the transducer on fixtures during manufacturing or positioning the transducer within a housing during final assembly. Tabs or other features that are used only during manufacturing may be subsequently removed from the device. The MUT device itself may also be thinned so as to provide flexibility as desired. The backing material is preferably matched in acoustic impedance to the silicon wafer so as to prevent reflection at the interface of any acoustic energy propagating rearward, i.e., in the direction away from the device front surface. The backing material may also possess a high thermal conductivity to assist in removal of heat from the device.

摘要翻译： 一种超声波换能器装置，包括：微机械加工在基底上的超声换能器阵列; 连接到换能器阵列的柔性电连接; 以及支撑衬底和柔性电连接的声衰减材料体。 声学衬垫材料可以包含附加特征，例如突片或凹口，用于在最终组装期间制造或将换能器定位在壳体内时将换能器定位在固定装置上。 仅在制造期间使用的标签或其它特征可随后从装置中移除。 MUT设备本身也可以被减薄，以便根据需要提供灵活性。 背衬材料优选地与硅晶片的声阻抗匹配，以便防止在向后传播的任何声能的界面处的反射，即远离器件前表面的方向上的反射。 背衬材料还可以具有高热导率以帮助从装置移除热量。

公开(公告)号：US20060004290A1

公开(公告)日：2006-01-05

申请号：US10881986

申请日：2004-06-30

申请人： Lowell Smith ,  Rayette Fisher ,  David Mills ,  Charles Baumgartner

发明人： Lowell Smith ,  Rayette Fisher ,  David Mills ,  Charles Baumgartner

IPC分类号： A61B8/14

CPC分类号： A61B8/4483 ,  A61B8/00 ,  G01S7/52079 ,  G01S15/899

摘要： The present technique provides for the manufacture and/or use of an ultrasound probe configured to acquire non-imaging data in addition to imaging data. In particular, the ultrasound probe includes a micro-machined ultrasound transducer formed on the surface of a substrate using micro-electric mechanical systems techniques or other techniques associated with semiconductor processing. Non-imaging sensors are formed on the substrate, either on the surface or the interior, or on a substrate proximate to the substrate upon which the transducer is formed. The non-imaging sensors may be used to acquire non-imaging data in conjunction with the acquisition of imaging data by the transducer.

摘要翻译： 本技术提供了除了成像数据之外还配置成获取非成像数据的超声波探头的制造和/或使用。 特别地，超声波探头包括使用微电子机械系统技术或与半导体处理相关的其它技术在基板的表面上形成的微加工的超声换能器。 非成像传感器形成在衬底上，无论是在表面还是内部，或者在靠近形成换能器的衬底的衬底上。 非成像传感器可以用于通过换能器获取成像数据来获取非成像数据。

公开(公告)号：US20050146247A1

公开(公告)日：2005-07-07

申请号：US10749645

申请日：2003-12-31

申请人： Rayette Fisher ,  David Mills ,  Lowell Smith ,  Robert Lewandowski

发明人： Rayette Fisher ,  David Mills ,  Lowell Smith ,  Robert Lewandowski

IPC分类号： G01N29/24 ,  A61B8/00 ,  B06B1/02 ,  B81B1/00 ,  B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  G01S7/521 ,  H01L27/20 ,  H01L41/08 ,  H04R17/00

CPC分类号： G01N29/2406 ,  B06B1/0292

摘要： A curved sensor device, such as an ultrasonic transducer array, is fabricated from a flat micromachined sensor (such as cMUT or pMUT) array constructed using micromachined electromechanical systems (MEMS) techniques. The device comprises: a support structure comprising a spine having a profile that is generally curved and a multiplicity of teeth extending from one side of the curved spine; and a multiplicity of sensors built on the support structure. The spine can be bent forward or backward and attached to a curved front face of a support member, thereby causing the sensors to adopt a curved array.

摘要翻译： 诸如超声换能器阵列的弯曲传感器装置由使用微加工机电系统（MEMS）技术构造的平面微机械传感器（例如cMUT或pMUT）阵列制造。 该装置包括：支撑结构，其包括具有大致弯曲的轮廓的脊柱和从弯曲脊的一侧延伸的多个齿; 以及建立在支撑结构上的多个传感器。 脊柱可以向前或向后弯曲并且附接到支撑构件的弯曲前表面，从而使传感器采用弯曲阵列。

公开(公告)号：US20050127793A1

公开(公告)日：2005-06-16

申请号：US10737216

申请日：2003-12-15

申请人： Charles Baumgartner ,  David Mills

发明人： Charles Baumgartner ,  David Mills

IPC分类号： A61B8/00 ,  B06B1/02 ,  G10K11/00 ,  G10K11/165 ,  H01L41/08

CPC分类号： G10K11/002

摘要： A fine-pitch acoustic transducer array that has a backing made of acoustically attenuative material. The backing material is prepared by homogeneously combining a matrix component and filler components having an average particle size less than one-fifth (preferably less than one-tenth) of the smallest dimension of the elements making up the array. In certain embodiments, the acoustically attenuative material comprises 25-45 wt. % tungsten particles, 15-35 wt. % silicone particles and 40-60 wt. % epoxy.

摘要翻译： 具有由声衰减材料制成的背衬的细间距声换能器阵列。 通过均匀组合基质组分和平均粒径小于构成阵列的元素的最小尺寸的五分之一（优选小于十分之一）的填料组分来制备背衬材料。 在某些实施方案中，声学减弱材料包含25-45wt。 ％钨颗粒，15-35重量％ ％硅氧烷颗粒和40-60重量％ ％环氧树脂。

公开(公告)号：US20060170014A1

公开(公告)日：2006-08-03

申请号：US11393317

申请日：2006-03-30

申请人： Lowell Smith ,  David Mills ,  Jeffrey Fortin ,  Wei-Cheng Tian ,  John Logan

发明人： Lowell Smith ,  David Mills ,  Jeffrey Fortin ,  Wei-Cheng Tian ,  John Logan

IPC分类号： H01L21/00 ,  H01L29/82 ,  H01L27/14

CPC分类号： B06B1/0292

摘要： A capacitive micromachined ultrasound transducer (cMUT) cell is presented. The cMUT cell includes a lower electrode. Furthermore, the cMUT cell includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode, wherein the diaphragm comprises one of a first epitaxial layer or a first polysilicon layer. In addition, a stress reducing material is disposed in the first epitaxial layer.

公开(公告)号：US20050169107A1

公开(公告)日：2005-08-04

申请号：US10978196

申请日：2004-10-29

申请人： Kai Thomenius ,  Rayette Fisher ,  Robert Wodnicki ,  Christopher Hazard ,  Lowell Smith ,  David Mills

发明人： Kai Thomenius ,  Rayette Fisher ,  Robert Wodnicki ,  Christopher Hazard ,  Lowell Smith ,  David Mills

IPC分类号： A61B8/00 ,  B06B1/02 ,  B06B1/06 ,  H04R17/00 ,  E03B7/07 ,  F16K37/00 ,  F17D3/00 ,  G01S15/00 ,  H04B1/02

CPC分类号： H03M11/00 ,  B06B1/0207 ,  B06B1/0292 ,  G01N29/262 ,  G01N2291/044 ,  G01N2291/106

摘要： A device comprising an array of sensors that are reconfigurable by means of a switching network. The sensors may be optical, thermal or pressure sensors or ultrasonic transducers. More specifically, the device comprises: a multiplicity of sensor elements; a plurality of bus lines; a set of access switches for selectively connecting a set of the sensor elements in a row to a bus line, one of the access switches being connected to a first sensor element; a multiplicity of sets of matrix switches, each of the sets of matrix switches selectively connecting a respective sensor element of the multiplicity of sensor elements to a respective set of adjacent sensor elements, one of the matrix switches being connected to the first sensor element and to a second sensor element that is not a member of the set of sensor elements; and control circuitry that controls the access switches and the matrix switches in accordance with a selected switching configuration such that the first sensor element is connected to the bus line via said one access switch, while at the same time the second sensor element is connected to said one access switch via said one matrix switch.

摘要翻译： 一种包括可通过交换网络重新配置的传感器阵列的设备。 传感器可以是光学，热或压力传感器或超声换能器。 更具体地，该装置包括：多个传感器元件; 多条总线; 一组接入开关，用于选择性地将一行中的传感器元件连接到总线，其中一个接入开关连接到第一传感器元件; 多个矩阵开关组，每组矩阵开关选择性地将多个传感器元件的相应传感器元件连接到相应的一组相邻传感器元件，矩阵开关中的一个连接到第一传感器元件，并且 第二传感器元件，其不是该组传感器元件的构件; 以及控制电路，其根据选择的开关配置来控制接入开关和矩阵开关，使得第一传感器元件经由所述一个接入开关连接到总线，同时第二传感器元件连接到所述 一个接入开关经由所述一个矩阵开关。

公开(公告)号：US20050096546A1

公开(公告)日：2005-05-05

申请号：US10978175

申请日：2004-10-29

申请人： Christopher Hazard ,  Robert Wodnicki ,  Rayette Fisher ,  Kai Thomenius ,  Lowell Smith ,  David Mills

发明人： Christopher Hazard ,  Robert Wodnicki ,  Rayette Fisher ,  Kai Thomenius ,  Lowell Smith ,  David Mills

IPC分类号： A61B8/00 ,  B06B1/02 ,  B06B1/06 ,  H04R17/00 ,  A61B8/02

CPC分类号： G10K11/34 ,  A61B2562/028 ,  B06B1/0292 ,  G01S7/52046 ,  G01S15/8925

摘要： The reconfigurable ultrasound array disclosed herein is one that allows groups of subelements to be connected together dynamically so that the shape of the resulting element can be made to match the shape of the wave front. This can lead to improved performance and/or reduced channel count. Reconfigurability can be achieved using a switching network. A methodology and an algorithm are disclosed that allows the performance of this switching network to be improved by properly choosing the configuration of the switching network.

摘要翻译： 本文公开的可重构超声波阵列是允许一组子元件动态地连接在一起的结构，使得所得到的元件的形状可以与波前的形状相匹配。 这可以导致改进的性能和/或减少的通道数。 可以使用交换网络实现可重构性。 公开了一种通过适当选择交换网络的配置来改善该交换网络的性能的方法和算法。

公开(公告)号：US20110160591A1

公开(公告)日：2011-06-30

申请号：US12649735

申请日：2009-12-30

申请人： Lowell Smith ,  Mirsaid Seyed-Bolorforosh ,  Kai Thomenius ,  David Mills ,  Scott D. Cogan ,  Ashit Pandit ,  Srikanth Muthya

发明人： Lowell Smith ,  Mirsaid Seyed-Bolorforosh ,  Kai Thomenius ,  David Mills ,  Scott D. Cogan ,  Ashit Pandit ,  Srikanth Muthya

IPC分类号： A61B8/00

CPC分类号： A61B8/0866 ,  A61B5/02411 ,  A61B8/02 ,  A61B8/4227 ,  A61B8/4472

摘要： A continuous, non-invasive fetal heart rate measurement is produced using an ultrasound probe positioned on the abdomen of the mother. The ultrasound probe includes a plurality of ultrasound transducers that are positioned within a housing having a transmission surface. The transmission surface is configured to defocus the individual ultrasound beams created by the plurality of ultrasound transducers. The transmission surface defocuses the ultrasound beam and creates a wider area of coverage for the ultrasound probe. The controller contained within the heart rate monitor selectively activates different combinations of the plurality of ultrasound transducers to reduce the signal-to-noise ratio while allowing the ultrasound probe to locate the fetal heart beat and subsequently increase the signal-to-noise ratio during continuous heart rate monitoring.

摘要翻译： 使用定位在母亲腹部的超声探头产生连续的非侵入性胎儿心率测量。 超声波探头包括多个超声换能器，其位于具有透射表面的壳体内。 传输表面被配置为使由多个超声换能器产生的各个超声波束聚焦。 传输表面使超声波束聚焦，并为超声波探头创建更广泛的覆盖区域。 包含在心率监测器内的控制器选择性地激活多个超声换能器的不同组合以降低信噪比，同时允许超声探头定位胎儿心跳，并且随后在连续期间增加信噪比 心率监测。