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公开(公告)号:US20090183680A1
公开(公告)日:2009-07-23
申请号:US12106452
申请日:2008-04-21
申请人: Ming-Hung Huang , Kung-Hsu Yeh , Cheng-An Yang , Chien-Li Ho
发明人: Ming-Hung Huang , Kung-Hsu Yeh , Cheng-An Yang , Chien-Li Ho
IPC分类号: C23C16/509
CPC分类号: H01J37/32082 , H01J37/32009 , H01J37/32541 , H01J37/3255
摘要: An electrode with improved plasma uniformity is disclosed, which is used for a chamber capable of generating a plasma. The electrode comprises an electrode plate and a perturbation slot. By well designing the perturbation slot of the electrode, the disclosed electrode can improve the uniformity of the plasma density, and is suitable for use in various types of substrate and can be widely applied in a plasma process system.
摘要翻译: 公开了一种具有改善等离子体均匀性的电极,其用于能够产生等离子体的室。 电极包括电极板和扰动槽。 通过设计电极的扰动槽,所公开的电极可以提高等离子体密度的均匀性,并且适用于各种类型的衬底,并且可以广泛地应用于等离子体处理系统中。
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公开(公告)号:US20090230019A1
公开(公告)日:2009-09-17
申请号:US12213249
申请日:2008-06-17
申请人: Cheng-AN Yang , Chien-Li Ho , Kung-Hsu Yeh , Ming-Hung Huang
发明人: Cheng-AN Yang , Chien-Li Ho , Kung-Hsu Yeh , Ming-Hung Huang
IPC分类号: H01L21/673 , B65D85/30
CPC分类号: C23C16/4587 , C30B25/105 , C30B25/12 , C30B29/06 , H01L21/67326 , H01L21/6734
摘要: A substrate cassette having an electrode array includes a base frame, a plurality of first electrode plates, a plurality of second electrode plates, and a plurality of struts. The base frame includes at least one conductive member located at a bottom side thereof and each having a plurality of first channels and second channels parallel to the first channels. The first and second channels are alternately arranged. The base frame includes a plurality of fixtures located at a top side thereof. An insulator is mounted in each of the second channels. Each of the struts is mounted to two opposite sides of a bottom edge of each of the corresponding first and second electrode plates. The struts and the corresponding fixtures are vertically opposite to each other to jointly define a limited space for receiving substrates, wherein the struts carry the substrates. Therefore, the substrate cassette is applicable to the CVD process.
摘要翻译: 具有电极阵列的基板盒包括基架,多个第一电极板,多个第二电极板和多个支柱。 底架包括位于其底侧的至少一个导电构件,每个具有多个第一通道和与第一通道平行的第二通道。 第一和第二通道交替布置。 底架包括位于其顶侧的多个固定装置。 绝缘体安装在每个第二通道中。 每个支柱安装到每个对应的第一和第二电极板的底部边缘的两个相对侧。 支柱和相应的夹具彼此垂直相对,以共同限定用于接收基板的有限空间,其中支柱承载基板。 因此,基板盒适用于CVD工艺。
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公开(公告)号:US20090183681A1
公开(公告)日:2009-07-23
申请号:US12057008
申请日:2008-03-27
申请人: Ming-Hung Huang , Kung-Hsu Yeh , Cheng-An Yang , Chien-Li Ho
发明人: Ming-Hung Huang , Kung-Hsu Yeh , Cheng-An Yang , Chien-Li Ho
IPC分类号: C23C16/00
CPC分类号: H01J37/32541 , H01J37/32091
摘要: A slotted electrode with uniform distribution of electric field and a process apparatus using the slotted electrode are disclosed. The slotted electrode comprises an electrode plate; a perturbation slot segment; a first edge perturbation slot segment; two second edge perturbation slot segments. By using the slot segments of the electrode plate, the electrode plate can improve the uniformity of plasma density, and is suitable for use in various types of substrate and can be widely applied in a plasma process system.
摘要翻译: 公开了具有均匀电场分布的开槽电极和使用开槽电极的处理装置。 开槽电极包括电极板; 扰动槽段; 第一边缘扰动槽段; 两个第二边缘扰动槽段。 通过使用电极板的槽段,电极板可以提高等离子体密度的均匀性,并且适用于各种类型的衬底,并且可以广泛地应用于等离子体处理系统中。
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公开(公告)号:US20090165705A1
公开(公告)日:2009-07-02
申请号:US12213313
申请日:2008-06-18
申请人: Kung-Hsu Yeh , Ming-Hung Huang
发明人: Kung-Hsu Yeh , Ming-Hung Huang
IPC分类号: C23C14/00
CPC分类号: H01L31/206 , C23C16/54 , H01L21/67161 , H01L21/67754 , Y02E10/50 , Y02P70/521
摘要: A batch forming system for amorphous silicon films is composed of at least one p-layer formation chamber having a sealing gate that can be opened or closed; at least one i-layer formation chamber having a sealing gate that can be opened or closed; at least one n-layer formation chamber having a sealing gate that can be opened or closed; a common vacuum chamber connected with said formation chambers; a conveyance device having a bearing surface movable to the fronts of said sealing gates respectively; and a cart for carrying a plurality of plate-shaped materials, being allowed passing through said sealing gates to enter said formation chambers respectively from said bearing surface or to exit said formation chambers and then go back to the bearing surface. Therefore, batch forming system can speedy up the production and do the batch formation of a multiplicity of the amorphous silicon films at a time.
摘要翻译: 用于非晶硅膜的分批成型系统由至少一个具有可以打开或关闭的密封门的p层形成室组成; 至少一个i层形成室具有可以打开或关闭的密封门; 至少一个n层形成室具有可以打开或关闭的密封门; 与所述形成室连接的公共真空室; 输送装置,其具有分别可移动到所述密封门的前端的支承面; 以及用于承载多个板状材料的推车,允许其通过所述密封门,分别从所述支承表面进入所述形成室,或者离开所述形成室,然后返回到所述承载表面。 因此,批量成型系统可以快速生产,并且一次批量形成多个非晶硅膜。
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5.
公开(公告)号:US20100087659A1
公开(公告)日:2010-04-08
申请号:US12555448
申请日:2009-09-08
IPC分类号: C07D303/12 , C07D209/34
CPC分类号: C08F232/08
摘要: The present invention provided a norbornene compound with cross-linkable groups and their derivative polymers, wherein said cross-linkable groups were olefin or epoxy groups. Norbornene polymers with cross-linkable side chain and their block copolymers as well as modified derivatives were prepared via living ring-open metathesis polymerization method. The resulting polymers with excellent solubility and optic properties had narrow molecular weight distribution, well-controlled molecular weight, small refraction index and high transparency. They were also suitable for preparing hybrid materials with high thermal stability and chemical resistance.
摘要翻译: 本发明提供了具有可交联基团的降冰片烯化合物及其衍生聚合物,其中所述可交联基团是烯烃或环氧基团。 通过活性开环复分解法制备具有可交联侧链的降冰片烯聚合物及其嵌段共聚物以及改性衍生物。 所得聚合物具有优异的溶解度和光学性能,分子量分布窄,分子量控制小,折射率小,透明度高。 它们也适用于制备具有高热稳定性和耐化学性的混合材料。
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6.
公开(公告)号:US20070057766A1
公开(公告)日:2007-03-15
申请号:US11225117
申请日:2005-09-14
申请人: Ming-Hung Huang , Jian-Shiang Chen , Shi-Mon Chen , Shi-Jay Weng
发明人: Ming-Hung Huang , Jian-Shiang Chen , Shi-Mon Chen , Shi-Jay Weng
IPC分类号: H04L9/32
CPC分类号: G06F21/35
摘要: The present invention discloses a radio frequency identification security device for electronic data, wherein once the user with an electronic key enters into the scanned area of an electronic lock, a security software is initiated, and the user will be allowed to read the protected data in a storage device; once the user leaves the scanned area of the electronic lock, the storage device is instantly locked. Therefore, the present invention can promote the security of data and protect the data against being stolen by an unauthorized person.
摘要翻译: 本发明公开了一种用于电子数据的射频识别安全装置,其中一旦具有电子钥匙的用户进入电子锁的扫描区域,就启动安全软件,并且允许用户读取受保护的数据 存储装置; 一旦用户离开电子锁的扫描区域,存储设备立即锁定。 因此,本发明可以促进数据的安全性,并且保护数据免遭未经授权的人的盗窃。
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公开(公告)号:US20060292103A1
公开(公告)日:2006-12-28
申请号:US11304176
申请日:2005-12-15
申请人: Ming-Hung Huang , Po-Han Chen , Ying-Fei Huang , Ya-Ping Hung
发明人: Ming-Hung Huang , Po-Han Chen , Ying-Fei Huang , Ya-Ping Hung
摘要: A composition for skin use is disclosed. The composition for skin use comprises a high concentration of protein fiber dispersed in an emulsifier system that is consisted of at least one non-silicone surfactant. The emulsifier system has no silicone-containing component, so as to improve the disadvantages of the prior emulsifier system for applying to the material of cosmetics or external medicines. In another embodiment of the present invention, the composition for skin use further comprises the high concentration of protein fibers dispersed in a wax and an emulsifier system that is consisted of at least one non-silicone surfactant.
摘要翻译: 公开了一种用于皮肤使用的组合物。 用于皮肤用途的组合物包括分散在由至少一种非硅氧烷表面活性剂组成的乳化剂体系中的高浓度蛋白纤维。 乳化剂体系不含有机硅成分,以改善现有的乳化剂体系适用于化妆品或外用药物的缺点。 在本发明的另一个实施方案中,用于皮肤用途的组合物还包含分散在蜡中的高浓度蛋白质纤维和由至少一种非硅氧烷表面活性剂组成的乳化剂体系。
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8.
公开(公告)号:US07772341B2
公开(公告)日:2010-08-10
申请号:US12555448
申请日:2009-09-08
CPC分类号: C08F232/08
摘要: The present invention provided a norbornene compound with cross-linkable groups and their derivative polymers, wherein said cross-linkable groups were olefin or epoxy groups. Norbornene polymers with cross-linkable side chain and their block copolymers as well as modified derivatives were prepared via living ring-open metathesis polymerization method. The resulting polymers with excellent solubility and optic properties had narrow molecular weight distribution, well-controlled molecular weight, small refraction index and high transparency. They were also suitable for preparing hybrid materials with high thermal stability and chemical resistance.
摘要翻译: 本发明提供了具有可交联基团的降冰片烯化合物及其衍生聚合物,其中所述可交联基团是烯烃或环氧基团。 通过活性开环复分解法制备具有可交联侧链的降冰片烯聚合物及其嵌段共聚物以及改性衍生物。 所得聚合物具有优异的溶解度和光学性能,分子量分布窄,分子量控制小,折射率小,透明度高。 它们也适用于制备具有高热稳定性和耐化学性的混合材料。
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9.
公开(公告)号:US07132565B2
公开(公告)日:2006-11-07
申请号:US10777055
申请日:2004-02-13
IPC分类号: C07C69/74
CPC分类号: C08F232/08
摘要: The present invention provided a norbornene compound with cross-linkable groups and their derivative polymers, wherein said cross-linkable groups were olefin or epoxy groups. Norbornene polymers with cross-linkable side chain and their block copolymers as well as modified derivatives were prepared via living ring-open metathesis polymerization method. The resulting polymers with excellent solubility and optic properties had narrow molecular weight distribution, well-controlled molecular weight, small refraction ration and high transparency. They were also suitable for preparing hybrid materials with high thermal stability and chemical resistance.
摘要翻译: 本发明提供了具有可交联基团的降冰片烯化合物及其衍生聚合物,其中所述可交联基团是烯烃或环氧基团。 通过活性开环复分解法制备具有可交联侧链的降冰片烯聚合物及其嵌段共聚物以及改性衍生物。 所得聚合物具有优异的溶解度和光学性能,分子量分布窄,分子量控制小,折射率小,透明度高。 它们也适用于制备具有高热稳定性和耐化学性的混合材料。
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公开(公告)号:US20110159409A1
公开(公告)日:2011-06-30
申请号:US12703738
申请日:2010-02-10
申请人: Ming-Hung Huang , Chih-Yuan Liao
发明人: Ming-Hung Huang , Chih-Yuan Liao
IPC分类号: G03F7/00
CPC分类号: G03H1/0256 , B42D25/29 , B42D25/324 , B42D25/328 , B42D25/425 , B42D25/47 , B42D2033/04 , B42D2033/10 , B42D2033/18 , B42D2033/30 , G03H1/0011 , G03H1/0244 , G03H1/028 , G03H2001/188 , G03H2250/10 , G03H2250/12 , G03H2250/36 , G03H2250/40 , G03H2270/32
摘要: A decorated device including a body, a hologram layer, and an adhesion layer and a method of fabricating the same are provided. The hologram layer is disposed on the body and includes a transparent base layer having an uneven structure and a reflective layer substantially conformable covering the uneven structure to form a plurality of holographic patterns, wherein the reflective layer is located between the adhesion layer and the transparent base layer. The adhesion layer is disposed between a surface of the body and the hologram layer.
摘要翻译: 提供了包括主体,全息图层和粘合层的装饰装置及其制造方法。 全息图层设置在主体上,并且包括具有不平坦结构的透明基底层和基本上适形的覆盖不平坦结构的反射层,以形成多个全息图案,其中反射层位于粘附层和透明基底之间 层。 粘附层设置在本体的表面和全息图层之间。
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