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公开(公告)号:US20120049346A1
公开(公告)日:2012-03-01
申请号:US12871565
申请日:2010-08-30
申请人: Cheng-Chung Lin , Chung-Shi Liu , Meng-Wei Chou , Kuo Cheng Lin , Wen-Hsiung Lu , Chien Ling Hwang , Ying-Jui Huang , De-Yuan Lu
发明人: Cheng-Chung Lin , Chung-Shi Liu , Meng-Wei Chou , Kuo Cheng Lin , Wen-Hsiung Lu , Chien Ling Hwang , Ying-Jui Huang , De-Yuan Lu
IPC分类号: H01L23/498 , H01L21/768
CPC分类号: H01L24/11 , H01L21/02052 , H01L21/32125 , H01L21/76873 , H01L21/76885 , H01L23/488 , H01L24/03 , H01L24/05 , H01L24/13 , H01L2221/1084 , H01L2224/03912 , H01L2224/0401 , H01L2224/05073 , H01L2224/05541 , H01L2224/05573 , H01L2224/1111 , H01L2224/1132 , H01L2224/1145 , H01L2224/11452 , H01L2224/1146 , H01L2224/11462 , H01L2224/11464 , H01L2224/11472 , H01L2224/11474 , H01L2224/11614 , H01L2224/1181 , H01L2224/11849 , H01L2224/11903 , H01L2224/1191 , H01L2224/11912 , H01L2224/13005 , H01L2224/13017 , H01L2224/13018 , H01L2224/1308 , H01L2224/13082 , H01L2224/13083 , H01L2224/13084 , H01L2224/13111 , H01L2224/13116 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/81191 , H01L2924/00013 , H01L2924/01006 , H01L2924/01019 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01059 , H01L2924/01072 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/0541 , H01L2924/07025 , H01L2924/10329 , H01L2924/14 , H01L2924/20102 , H01L2924/3512 , H01L2924/381 , H01L2924/3841 , H01L2924/0105 , H01L2924/00014 , H01L2224/13099 , H01L2924/207
摘要: Apparatus and methods for providing solder pillar bumps. Pillar bump connections are formed on input/output terminals for integrated circuits by forming a pillar of conductive material using plating of a conductive material over terminals of an integrated circuit. A base portion of the pillar bump has a greater width than an upper portion. A cross-section of the base portion of the pillar bump may make a trapezoidal, rectangular or sloping shape. Solder material may be formed on the top surface of the pillar. The resulting solder pillar bumps form fine pitch package solder connections that are more reliable than those of the prior art.
摘要翻译: 用于提供焊料柱凸块的装置和方法。 通过在集成电路的端子上通过导电材料的电镀形成导电材料的支柱,在集成电路的输入/输出端子上形成支柱凸点连接。 柱状凸块的基部具有比上部更大的宽度。 柱形凸起的基部的横截面可以形成梯形,矩形或倾斜的形状。 焊料可以形成在柱的顶表面上。 所得到的焊料柱凸起形成比现有技术更可靠的细间距封装焊接连接。
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公开(公告)号:US08823166B2
公开(公告)日:2014-09-02
申请号:US12871565
申请日:2010-08-30
申请人: Cheng-Chung Lin , Chung-Shi Liu , Meng-Wei Chou , Kuo Cheng Lin , Wen-Hsiung Lu , Chien Ling Hwang , Ying-Jui Huang , De-Yuan Lu
发明人: Cheng-Chung Lin , Chung-Shi Liu , Meng-Wei Chou , Kuo Cheng Lin , Wen-Hsiung Lu , Chien Ling Hwang , Ying-Jui Huang , De-Yuan Lu
CPC分类号: H01L24/11 , H01L21/02052 , H01L21/32125 , H01L21/76873 , H01L21/76885 , H01L23/488 , H01L24/03 , H01L24/05 , H01L24/13 , H01L2221/1084 , H01L2224/03912 , H01L2224/0401 , H01L2224/05073 , H01L2224/05541 , H01L2224/05573 , H01L2224/1111 , H01L2224/1132 , H01L2224/1145 , H01L2224/11452 , H01L2224/1146 , H01L2224/11462 , H01L2224/11464 , H01L2224/11472 , H01L2224/11474 , H01L2224/11614 , H01L2224/1181 , H01L2224/11849 , H01L2224/11903 , H01L2224/1191 , H01L2224/11912 , H01L2224/13005 , H01L2224/13017 , H01L2224/13018 , H01L2224/1308 , H01L2224/13082 , H01L2224/13083 , H01L2224/13084 , H01L2224/13111 , H01L2224/13116 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/81191 , H01L2924/00013 , H01L2924/01006 , H01L2924/01019 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01059 , H01L2924/01072 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/0541 , H01L2924/07025 , H01L2924/10329 , H01L2924/14 , H01L2924/20102 , H01L2924/3512 , H01L2924/381 , H01L2924/3841 , H01L2924/0105 , H01L2924/00014 , H01L2224/13099 , H01L2924/207
摘要: Apparatus and methods for providing solder pillar bumps. Pillar bump connections are formed on input/output terminals for integrated circuits by forming a pillar of conductive material using plating of a conductive material over terminals of an integrated circuit. A base portion of the pillar bump has a greater width than an upper portion. A cross-section of the base portion of the pillar bump may make a trapezoidal, rectangular or sloping shape. Solder material may be formed on the top surface of the pillar. The resulting solder pillar bumps form fine pitch package solder connections that are more reliable than those of the prior art.
摘要翻译: 用于提供焊料柱凸块的装置和方法。 通过在集成电路的端子上通过导电材料的电镀形成导电材料的支柱,在集成电路的输入/输出端子上形成支柱凸点连接。 柱状凸块的基部具有比上部更大的宽度。 柱形凸起的基部的横截面可以形成梯形,矩形或倾斜的形状。 焊料可以形成在柱的顶表面上。 所得到的焊料柱凸起形成比现有技术更可靠的细间距封装焊接连接。
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公开(公告)号:US10128206B2
公开(公告)日:2018-11-13
申请号:US12904506
申请日:2010-10-14
申请人: Chih-Wei Lin , Ming-Da Cheng , Wen-Hsiung Lu , Meng-Wei Chou , Hung-Jui Kuo , Chung-Shi Liu
发明人: Chih-Wei Lin , Ming-Da Cheng , Wen-Hsiung Lu , Meng-Wei Chou , Hung-Jui Kuo , Chung-Shi Liu
IPC分类号: H01L21/768 , H01L23/48 , H01L23/00
摘要: The invention relates to a bump structure of a semiconductor device. An exemplary structure for a semiconductor device comprises a substrate; a contact pad over the substrate; a passivation layer extending over the substrate having an opening over the contact pad; and a conductive pillar over the opening of the passivation layer, wherein the conductive pillar comprises an upper portion substantially perpendicular to a surface of the substrate and a lower portion having tapered sidewalls.
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公开(公告)号:US09059109B2
公开(公告)日:2015-06-16
申请号:US13427787
申请日:2012-03-22
申请人: Hung-Jen Lin , Tsung-Ding Wang , Chien-Hsiun Lee , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
发明人: Hung-Jen Lin , Tsung-Ding Wang , Chien-Hsiun Lee , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
IPC分类号: H01L23/31 , H01L21/56 , H01L23/00 , H01L23/525
CPC分类号: H01L24/81 , H01L21/563 , H01L21/565 , H01L21/566 , H01L21/768 , H01L23/3114 , H01L23/3171 , H01L23/525 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/83 , H01L24/92 , H01L24/94 , H01L2224/02311 , H01L2224/0239 , H01L2224/024 , H01L2224/0347 , H01L2224/03612 , H01L2224/03614 , H01L2224/0362 , H01L2224/0401 , H01L2224/05008 , H01L2224/05073 , H01L2224/05124 , H01L2224/05147 , H01L2224/05166 , H01L2224/05187 , H01L2224/05582 , H01L2224/05611 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05666 , H01L2224/05681 , H01L2224/11334 , H01L2224/1146 , H01L2224/11849 , H01L2224/13022 , H01L2224/131 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/21 , H01L2224/27318 , H01L2224/27334 , H01L2224/27416 , H01L2224/2919 , H01L2224/73204 , H01L2224/81024 , H01L2224/81191 , H01L2224/81203 , H01L2224/81801 , H01L2224/81815 , H01L2224/83192 , H01L2224/83855 , H01L2224/92125 , H01L2224/94 , H01L2924/00014 , H01L2924/01013 , H01L2924/01047 , H01L2924/12042 , H01L2924/181 , H01L2924/2076 , H01L2224/81 , H01L2924/01029 , H01L2924/04941 , H01L2924/04953 , H01L2924/014 , H01L2224/11 , H01L2924/00
摘要: A package assembly including a semiconductor die electrically coupled to a substrate by an interconnected joint structure. The semiconductor die includes a bump overlying a semiconductor substrate, and a molding compound layer overlying the semiconductor substrate and being in physical contact with a first portion of the bump. The substrate includes a no-flow underfill layer on a conductive region. A second portion of the bump is in physical contact with the no-flow underfill layer to form the interconnected joint structure.
摘要翻译: 一种包装组件,其包括通过互连的接合结构电耦合到衬底的半导体管芯。 半导体管芯包括覆盖半导体衬底的凸块和覆盖半导体衬底并与凸点的第一部分物理接触的模塑复合层。 衬底包括导电区域上的无流动底部填充层。 凸块的第二部分与无流动底部填充层物理接触以形成互连的连接结构。
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公开(公告)号:US08603860B2
公开(公告)日:2013-12-10
申请号:US13280163
申请日:2011-10-24
申请人: Meng-Tse Chen , Kuei-Wei Huang , Wei-Hung Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
发明人: Meng-Tse Chen , Kuei-Wei Huang , Wei-Hung Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
CPC分类号: H01L24/75 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/94 , H01L24/97 , H01L2224/131 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/75272 , H01L2224/75314 , H01L2224/75704 , H01L2224/7598 , H01L2224/81191 , H01L2224/81208 , H01L2224/8121 , H01L2224/81815 , H01L2224/94 , H01L2224/97 , H01L2924/00012 , H01L2924/00014 , H01L2224/81 , H01L2924/014
摘要: A method includes loading a first package component on a concave boat, and placing a second package component over the first package component. A load clamp is placed over the second package component, wherein the load clamp is supported by a temperature-variable spacer of the concave boat. A reflow step is performed to bond the second package component to the first package component. During a temperature-elevation step of the reflow step, the temperature-variable spacer is softened in response to an increase in temperature, and a height of the softened temperature-variable spacer is reduced, until the load clamp is stopped by a rigid spacer of the concave boat.
摘要翻译: 一种方法包括将第一包装部件装载在凹形船上,以及将第二包装部件放置在第一包装部件上。 负载夹具放置在第二包装部件上,其中负载夹具由凹形舟皿的温度可变的间隔件支撑。 执行回流步骤以将第二包装部件粘合到第一包装部件。 在回流步骤的升温步骤期间,温度可变的间隔件响应于温度升高而软化,并且软化的温度可变间隔件的高度减小,直到负载夹具被刚性间隔件 凹船。
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6.
公开(公告)号:US09412717B2
公开(公告)日:2016-08-09
申请号:US13289719
申请日:2011-11-04
申请人: Meng-Tse Chen , Hsiu-Jen Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
发明人: Meng-Tse Chen , Hsiu-Jen Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
CPC分类号: H01L24/97 , B29C33/68 , B29C43/18 , H01L21/563 , H01L21/566 , H01L2224/16225 , H01L2924/01322 , H01L2924/181 , H01L2924/00
摘要: Methods and apparatus for a forming molded underfills. A method is disclosed including loading a flip chip substrate into a selected one of the upper mold chase and lower mold chase of a mold press at a first temperature; positioning a molded underfill material in the at least one of the upper and lower mold chases while maintaining the first temperature which is lower than a melting temperature of the molded underfill material; forming a sealed mold cavity and creating a vacuum in the mold cavity; raising the temperature of the molded underfill material to a second temperature greater than the melting point to cause the molded underfill material to flow over the flip chip substrate forming an underfill layer and forming an overmolded layer; and cooling the flip chip substrate to a third temperature substantially lower than the melting temperature of the molded underfill material. An apparatus is disclosed.
摘要翻译: 用于成型模制底部填料的方法和装置。 公开了一种方法,其包括在第一温度下将倒装芯片衬底加载到模压机的上模追逐和下模追逐中的所选择的一个中; 将模制的底部填充材料定位在上模具和下模具中的至少一个中,同时保持低于模制的底部填充材料的熔融温度的第一温度; 形成密封的模腔并在模腔中产生真空; 将模制的底部填充材料的温度提高到大于熔点的第二温度,以使模制的底部填充材料在形成底部填充层的倒装芯片衬底上流动并形成包覆成型层; 并将所述倒装芯片基板冷却至基本上低于所述模制底部填充材料的熔融温度的第三温度。 公开了一种装置。
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公开(公告)号:US08937388B2
公开(公告)日:2015-01-20
申请号:US13492285
申请日:2012-06-08
申请人: Yi-Wen Wu , Ming-Che Ho , Wen-Hsiung Lu , Chia-Wei Tu , Chung-Shi Liu
发明人: Yi-Wen Wu , Ming-Che Ho , Wen-Hsiung Lu , Chia-Wei Tu , Chung-Shi Liu
IPC分类号: H01L23/52
CPC分类号: H01L24/06 , H01L23/3114 , H01L23/3192 , H01L23/525 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2224/02331 , H01L2224/02351 , H01L2224/02375 , H01L2224/02381 , H01L2224/03828 , H01L2224/0401 , H01L2224/05548 , H01L2224/05551 , H01L2224/05557 , H01L2224/05572 , H01L2224/05647 , H01L2224/05655 , H01L2224/05666 , H01L2224/06051 , H01L2224/10145 , H01L2224/11334 , H01L2224/13021 , H01L2224/13024 , H01L2224/13027 , H01L2224/131 , H01L2224/13111 , H01L2924/00014 , H01L2924/01322 , H01L2924/01023 , H01L2924/01047 , H01L2924/01029 , H01L2924/00012 , H01L2924/014 , H01L2224/05552 , H01L2924/00
摘要: Methods and apparatuses for wafer level packaging (WLP) of semiconductor devices are disclosed. A contact pad of a circuit may be connected to a solder bump by way of a post passivation interconnect (PPI) line and a PPI pad. The PPI pad may comprise a hollow part and an opening. The PPI pad may be formed together with the PPI line as one piece. The hollow part of the PPI pad can function to control the amount of solder flux used in the ball mounting process so that any extra amount of solder flux can escape from an opening of the solid part of the PPI pad. A solder ball can be mounted to the PPI pad directly without using any under bump metal (UBM) as a normal WLP package would need.
摘要翻译: 公开了用于半导体器件的晶片级封装(WLP)的方法和装置。 电路的接触焊盘可以通过后钝化互连(PPI)线和PPI焊盘连接到焊料凸块。 PPI垫可以包括中空部分和开口。 PPI垫可以与PPI线一起形成为一体。 PPI垫的中空部分可用于控制球安装过程中使用的焊剂量,以便任何额外量的焊剂可以从PPI焊盘的固体部分的开口逸出。 焊锡球可以直接安装到PPI焊盘,而不使用正常的WLP封装所需的任何下凸块金属(UBM)。
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公开(公告)号:US08884431B2
公开(公告)日:2014-11-11
申请号:US13228768
申请日:2011-09-09
申请人: Chih-Wei Lin , Ming-Da Cheng , Wen-Hsiung Lu , Hsiu-Jen Lin , Bor-Ping Jang , Chung-Shi Liu , Mirng-Ji Lii , Chen-Hua Yu , Meng-Tse Chen , Chun-Cheng Lin , Yu-Peng Tsai , Kuei-Wei Huang , Wei-Hung Lin
发明人: Chih-Wei Lin , Ming-Da Cheng , Wen-Hsiung Lu , Hsiu-Jen Lin , Bor-Ping Jang , Chung-Shi Liu , Mirng-Ji Lii , Chen-Hua Yu , Meng-Tse Chen , Chun-Cheng Lin , Yu-Peng Tsai , Kuei-Wei Huang , Wei-Hung Lin
IPC分类号: H01L23/48 , H01L23/52 , H01L29/40 , H01L21/683 , H01L23/498 , H01L21/56 , H01L25/065 , H01L23/538 , H01L25/00 , H01L23/00 , H01L23/31 , H01L25/10 , H01L25/03 , H01L21/768
CPC分类号: H01L25/0657 , H01L21/52 , H01L21/565 , H01L21/568 , H01L21/6835 , H01L21/76898 , H01L23/3128 , H01L23/3135 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L24/03 , H01L24/05 , H01L24/09 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L24/92 , H01L24/97 , H01L25/03 , H01L25/0652 , H01L25/0655 , H01L25/105 , H01L25/50 , H01L2221/68331 , H01L2221/68345 , H01L2221/68377 , H01L2224/0231 , H01L2224/0401 , H01L2224/04105 , H01L2224/06515 , H01L2224/09181 , H01L2224/13082 , H01L2224/131 , H01L2224/13147 , H01L2224/16225 , H01L2224/16238 , H01L2224/73259 , H01L2224/81005 , H01L2224/81191 , H01L2224/81815 , H01L2224/9202 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06524 , H01L2225/06541 , H01L2225/06548 , H01L2924/14 , H01L2924/1461 , H01L2924/15192 , H01L2924/15311 , H01L2924/15321 , H01L2924/15322 , H01L2924/181 , H01L2924/19107 , H01L2924/00014 , H01L2224/81 , H01L2224/03 , H01L2924/014 , H01L2924/00
摘要: Packaging methods and structures for semiconductor devices are disclosed. In one embodiment, a packaged semiconductor device includes a redistribution layer (RDL) having a first surface and a second surface opposite the first surface. At least one integrated circuit is coupled to the first surface of the RDL, and a plurality of metal bumps is coupled to the second surface of the RDL. A molding compound is disposed over the at least one integrated circuit and the first surface of the RDL.
摘要翻译: 公开了用于半导体器件的封装方法和结构。 在一个实施例中,封装的半导体器件包括具有第一表面和与第一表面相对的第二表面的再分配层(RDL)。 至少一个集成电路耦合到RDL的第一表面,并且多个金属凸块耦合到RDL的第二表面。 模制化合物设置在RDL的至少一个集成电路和第一表面上。
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公开(公告)号:US20130075921A1
公开(公告)日:2013-03-28
申请号:US13240629
申请日:2011-09-22
申请人: Meng-Tse Chen , Chih-Wei Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
发明人: Meng-Tse Chen , Chih-Wei Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
IPC分类号: H01L23/498 , H01L21/60 , H01L21/50
CPC分类号: H01L23/49816 , H01L21/486 , H01L21/563 , H01L21/6835 , H01L23/49827 , H01L23/49894 , H01L24/16 , H01L2221/68345 , H01L2224/13023 , H01L2224/13082 , H01L2224/131 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/16237 , H01L2224/32225 , H01L2224/73204 , H01L2224/81005 , H01L2224/83005 , H01L2924/12042 , H01L2924/15331 , H01L2924/00012 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要: A method includes applying a polymer-comprising material over a carrier, and forming a via over the carrier. The via is located inside the polymer-comprising material, and substantially penetrates through the polymer-comprising material. A first redistribution line is formed on a first side of the polymer-comprising material. A second redistribution line is formed on a second side of the polymer-comprising material opposite to the first side. The first redistribution line is electrically coupled to the second redistribution line through the via.
摘要翻译: 一种方法包括在载体上涂覆含聚合物的材料,并在载体上形成通孔。 通孔位于含聚合物的材料的内部,并且基本上穿透包含聚合物的材料。 在包含聚合物的材料的第一面上形成第一再分配线。 第二再分配线形成在与第一侧相对的含聚合物材料的第二侧上。 第一再分配线通过通孔电耦合到第二再分配线。
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公开(公告)号:US20120299181A1
公开(公告)日:2012-11-29
申请号:US13118108
申请日:2011-05-27
申请人: Meng-Tse Chen , Wei-Hung Lin , Sheng-Yu Wu , Chun-Cheng Lin , Kuei-Wei Huang , Yu-Peng Tsai , Chih-Wei Lin , Wen-Hsiung Lu , Hsiu-Jen Lin , Bor-Ping Jang , Ming-Da Cheng , Chung-Shi Liu
发明人: Meng-Tse Chen , Wei-Hung Lin , Sheng-Yu Wu , Chun-Cheng Lin , Kuei-Wei Huang , Yu-Peng Tsai , Chih-Wei Lin , Wen-Hsiung Lu , Hsiu-Jen Lin , Bor-Ping Jang , Ming-Da Cheng , Chung-Shi Liu
IPC分类号: H01L23/488 , H01L21/56
CPC分类号: H01L24/17 , H01L21/565 , H01L21/566 , H01L23/3114 , H01L23/3128 , H01L23/49827 , H01L24/16 , H01L24/81 , H01L25/105 , H01L25/50 , H01L2224/131 , H01L2224/16055 , H01L2224/16113 , H01L2224/16146 , H01L2224/16225 , H01L2224/16227 , H01L2225/1023 , H01L2225/1058 , H01L2924/01029 , H01L2924/014 , H01L2924/12042 , H01L2924/1304 , H01L2924/14 , H01L2924/1432 , H01L2924/1434 , H01L2924/15174 , H01L2924/15311 , H01L2924/15321 , H01L2924/181 , H01L2924/00
摘要: A method of packaging includes placing a package component over a release film, wherein solder balls on a surface of the package component are in physical contact with the release film. Next, A molding compound filled between the release film and the package component is cured, wherein during the step of curing, the solder balls remain in physical contact with the release film.
摘要翻译: 包装方法包括将包装部件放置在脱模膜上,其中包装部件表面上的焊球与剥离膜物理接触。 接下来,填充在剥离膜和包装部件之间的模塑料固化,其中在固化步骤期间,焊球与剥离膜保持物理接触。
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