Stressed metal contact with enhanced lateral compliance
    2.
    发明申请
    Stressed metal contact with enhanced lateral compliance 有权
    强化金属接触,增强侧向顺应性

    公开(公告)号:US20050130462A1

    公开(公告)日:2005-06-16

    申请号:US10737272

    申请日:2003-12-15

    IPC分类号: H01R12/00

    CPC分类号: H01R13/2407

    摘要: An electrical interconnect structure that includes a spring portion that extends out of a plane. The electrical interconnect including curved regions to improve the lateral compliance of the interconnect. The curved region may be incorporated into a release region of the spring. The release region may include either or both an uplifted region and a planar region. The curves in the release region are arranged to improve the spring contact with a mating surface and also improve lateral compliance compared to prior art spring designs.

    摘要翻译: 一种电互连结构,其包括从平面延伸的弹簧部分。 电互连包括弯曲区域,以改善互连的横向顺应性。 弯曲区域可以结合到弹簧的释放区域中。 释放区域可以包括隆起区域和平坦区域中的一个或两个。 释放区域中的曲线布置成改进与配合表面的弹簧接触,并且与现有技术的弹簧设计相比,还改善了侧向顺从性。

    STRUCTURE AND METHOD FOR RELEASING STRESSY METAL FILMS
    5.
    发明申请
    STRUCTURE AND METHOD FOR RELEASING STRESSY METAL FILMS 审中-公开
    用于释放应力金属膜的结构和方法

    公开(公告)号:US20080095996A1

    公开(公告)日:2008-04-24

    申请号:US11959813

    申请日:2007-12-19

    IPC分类号: B32B7/02

    CPC分类号: B81C1/0015 Y10T428/24942

    摘要: A method and structure for forming a spring structure that avoids undesirable kinks in the spring is described. The method converts a portion of a release layer such that the converted portion resists etching. The converted portion then serves as an anchor region for a spring structure deposited over the release layer. When the non-converted portions of the release layer are etched, the spring curls out of the plane of a plane.

    摘要翻译: 描述了形成弹簧结构的方法和结构,其避免了弹簧中不希望的扭结。 该方法将释放层的一部分转换成转换部分抵抗蚀刻。 转换的部分然后用作沉积在释放层上的弹簧结构的锚定区域。 当剥离层的未转化部分被蚀刻时,弹簧卷曲在平面的平面之外。

    High force metal plated spring structure
    7.
    发明申请
    High force metal plated spring structure 有权
    高强度金属电镀弹簧结构

    公开(公告)号:US20050006829A1

    公开(公告)日:2005-01-13

    申请号:US10615653

    申请日:2003-07-08

    CPC分类号: F16F1/027

    摘要: Lithographically defined and etched spring structures are produced by various methods such that they avoid the formation of a plated metal wedge on an underside of the spring structure after release. A post is utilized to offset the spring from an underlying substrate by a distance greater than the thickness of the plated metal. A trench is etched into the substrate below the spring to provide clearance during deflection of the spring. Another spring includes a knee (bend) that provides the necessary clearance during deflection. A plating process is limited to the upper side of another spring. A released spring is used as a shadow mask for patterning resist that prevents wedge formation during plating. Various tip arrangements are disclosed that can be utilized with each spring structure

    摘要翻译: 通过各种方法制造光刻定义和蚀刻的弹簧结构,使得它们在释放之后避免在弹簧结构的下侧上形成电镀金属楔。 使用柱子将弹簧从下面的衬底偏移大于电镀金属的厚度的距离。 在弹簧下方的衬底中蚀刻沟槽,以在弹簧偏转期间提供间隙。 另一个弹簧包括在偏转期间提供必要的间隙的膝盖(弯头)。 电镀工艺限于另一弹簧的上侧。 释放的弹簧用作用于图案化抗蚀剂的荫罩,其防止电镀期间的楔形成。 公开了可以与每个弹簧结构一起使用的各种尖端装置

    Electromechanical switch
    9.
    发明申请
    Electromechanical switch 失效
    机电开关

    公开(公告)号:US20070126536A1

    公开(公告)日:2007-06-07

    申请号:US11292421

    申请日:2005-12-02

    IPC分类号: H01H51/22

    CPC分类号: H01H59/0009 H01H2059/0081

    摘要: In one aspect, an electromechanical switching device is illustrated. The electromechanical switching device includes a relay with at least one first conductive portion, at least one second conductive portion, and at least one actuation component that moves the at least one first conductive portion and the at least one second conductive portion into and out of conductive contact. The at least one first conductive portion includes a conductive stationary end coupled to a substrate and a conductive free-floating end. The at least one actuation component includes an actuation stationary end coupled to the substrate and an actuation free-floating end. The actuation free floating end, when the at least one actuation component is not energized, curls, which curls the conductive free floating end into or out of conductive contact with the at least one second conductive portion.

    摘要翻译: 在一个方面,示出了机电开关装置。 机电开关装置包括具有至少一个第一导电部分,至少一个第二导电部分和至少一个致动部件的继电器,所述至少一个致动部件将至少一个第一导电部分和至少一个第二导电部分移入和移出导电部分 联系。 所述至少一个第一导电部分包括耦合到衬底的导电固定端和导电自由浮动端。 所述至少一个致动部件包括联接到所述基板的致动固定端和致动自由浮动端。 当所述至少一个致动部件未通电时,所述致动自由浮动端部卷曲,所述自由浮动端部将所述导电自由浮动端部与所述至少一个第二导电部分导电接触或者脱离所述至少一个第二导电部分的导电接触。