公开(公告)号：US20140341679A1

公开(公告)日：2014-11-20

申请号：US14223553

申请日：2014-03-24

申请人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

公开(公告)号：US20120301261A1

公开(公告)日：2012-11-29

申请号：US13567812

申请日：2012-08-06

申请人： Alexander G. Krupyshev ,  Christopher Hofmeister

发明人： Alexander G. Krupyshev ,  Christopher Hofmeister

IPC分类号： B65G49/00

CPC分类号： H02K41/03 ,  H01L21/67742 ,  H01L21/68707 ,  H02K2201/18

摘要： In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

摘要翻译： 根据所公开的实施例的一个方面，提供了一种基板输送装置。 衬底传送装置包括限定腔室的框架，至少一个至少部分地嵌入腔室的周壁的定子模块，所述至少一个定子模块限定旋转轴线。 衬底传送装置还包括至少一个转子，其基于围绕旋转轴线相对于至少一个定子模块基本上同心地设置，所述至少一个转子被配置为与所述至少一个定子模块相接合并被相应的一个 所述至少一个定子模块基本上在所述腔室内没有接触。 衬底传送装置还包括连接到至少一个转子的至少一个衬底传送臂，并具有构造成保持至少一个衬底的至少一个端部执行器。

公开(公告)号：US20120223597A1

公开(公告)日：2012-09-06

申请号：US13412392

申请日：2012-03-05

申请人： Martin Hosek ,  Christopher Hofmeister ,  John F. Zettler ,  Alexander Krupyshev ,  Sergei Syssoev ,  Krzystof Majczak

发明人： Martin Hosek ,  Christopher Hofmeister ,  John F. Zettler ,  Alexander Krupyshev ,  Sergei Syssoev ,  Krzystof Majczak

IPC分类号： H02K41/02

CPC分类号： G01B7/003

摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.

摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。

公开(公告)号：US20120141235A1

公开(公告)日：2012-06-07

申请号：US13293717

申请日：2011-11-10

申请人： Alexander G. Krupyshev ,  Robert T. Caveney ,  Martin R. Elliot ,  Christopher Hofmeister

发明人： Alexander G. Krupyshev ,  Robert T. Caveney ,  Martin R. Elliot ,  Christopher Hofmeister

IPC分类号： H01L21/677

CPC分类号： B25J9/043 ,  B25J9/042

摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。

公开(公告)号：US20110118855A1

公开(公告)日：2011-05-19

申请号：US13011970

申请日：2011-01-24

申请人： Martin Hosek ,  Stuart Beale ,  Roumen Botev ,  Matthew Coady ,  Christopher Hofmeister ,  Mark Ives ,  Jairo Moura ,  Robert Caveney

发明人： Martin Hosek ,  Stuart Beale ,  Roumen Botev ,  Matthew Coady ,  Christopher Hofmeister ,  Mark Ives ,  Jairo Moura ,  Robert Caveney

IPC分类号： G05B13/04

CPC分类号： G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

摘要翻译： 控制系统包括具有主控制器的集群架构，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分，以及包括由主控制器控制的集群控制器的分布式控制部分。 集群控制器控制一个或多个第二个遥控器的活动。 第一和第二遥控器中的每一个被用于驱动一个或多个轴。

公开(公告)号：US20100147181A1

公开(公告)日：2010-06-17

申请号：US12696224

申请日：2010-01-29

申请人： Michael L. Bufano ,  Gerald M. Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Michael L. Bufano ,  Gerald M. Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： E01B25/00

CPC分类号： H01L21/67715 ,  H01L21/67736 ,  H01L21/67775

摘要： An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

摘要翻译： 提供了一种示例性实施例的基板输送系统。 该系统具有导轨和至少一个运输车辆。 运输车辆适于保持至少一个基底并且能够被支撑并沿导轨移动。 导轨包括用于车辆的至少一个行进车道和从行驶车道偏移的至少一个通道，允许车辆可选择地接近行驶车道和离开行驶车道。

公开(公告)号：US20090162179A1

公开(公告)日：2009-06-25

申请号：US12330780

申请日：2008-12-09

申请人： Martin Hosek ,  Christopher Hofmeister ,  Alexander Krupyshev

发明人： Martin Hosek ,  Christopher Hofmeister ,  Alexander Krupyshev

IPC分类号： B65G35/00

CPC分类号： H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67727 ,  H01L21/67742 ,  H01L21/67766

摘要： A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

摘要翻译： 用于输送装置的驱动系统包括连接到输送装置的多个永磁体，暴露于多个永磁体中的至少一个的磁场的多个静止绕组，用于给固定绕组通电以提供磁性的控制系统 输送装置上的力，以及靠近运输装置的至少一侧的铁磁部件的布置，用于提供传送装置的提升，俯仰和滚动的被动稳定。

公开(公告)号：US20080298944A1

公开(公告)日：2008-12-04

申请号：US12117355

申请日：2008-05-08

申请人： Christopher Hofmeister ,  Robert T. Caveney

发明人： Christopher Hofmeister ,  Robert T. Caveney

IPC分类号： B66C23/00

CPC分类号： B25J11/0095 ,  B25J9/106 ,  B25J9/126 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。

公开(公告)号：US20070081883A1

公开(公告)日：2007-04-12

申请号：US11239272

申请日：2005-09-29

申请人： Christopher Hofmeister ,  Steve Bibeault ,  Ulysses Gilchrist

发明人： Christopher Hofmeister ,  Steve Bibeault ,  Ulysses Gilchrist

IPC分类号： B66C1/00

CPC分类号： H01L21/68707 ,  Y10S414/141

摘要： A flat workpiece transport apparatus having a movable arm and an end effector. The end effector is connected to the arm. The end effector has a movable grip for holding a flat workpiece on the end effector. The end effector has a grip actuator operably connected to the movable grip. The grip actuator has more than one actuation members and a resiliently flexible member connecting the more than one actuation members. Each actuation member actuates at least one corresponding grip element of the movable grip to capture or release the workpiece. Flexure of the resiliently flexible member effects movement of at least one of the more than one actuation members for actuation of the at least one corresponding grip element. The resiliently flexible member is sandwiched by substantially rigid portions of the more than one actuation members.

摘要翻译： 具有可动臂和端部执行器的平坦工件输送装置。 末端执行器连接到手臂。 末端执行器具有用于将平坦的工件保持在末端执行器上的可动手柄。 端部执行器具有可操作地连接到可动夹具的夹紧致动器。 把手致动器具有不止一个致动构件和连接多于一个致动构件的弹性柔性构件。 每个致动构件致动可动夹具的至少一个对应的夹紧元件以捕获或释放工件。 弹性柔性构件的弯曲影响多于一个致动构件中的至少一个的运动，用于致动至少一个相应的夹紧元件。 弹性柔性构件被多于一个致动构件的基本上刚性的部分夹持。

公开(公告)号：US20060285945A1

公开(公告)日：2006-12-21

申请号：US11442509

申请日：2006-05-26

申请人： Christopher Hofmeister ,  Robert Caveney

发明人： Christopher Hofmeister ,  Robert Caveney

IPC分类号： H01L21/677

CPC分类号： H01L21/67161 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  Y10S414/139

摘要： Substrate processing apparatus having a transport chamber, a linear array of substrate holding modules alongside the transport chamber, and a substrate transport located in the chamber. The chamber can hold an isolated atmosphere, and defines more than one substantially linear transport paths extending longitudinally along the transport chamber. The transport in the chamber is capable of transporting the substrate along the linear transport paths. The transport has a transporter capable of holding and moving the substrate. The transporter interfaces a wall of the transport chamber for moving along at least one of linear paths. The transport chamber has interfaces for mating with other substrate holding modules at opposite ends of the transport chamber. Each interface has an opening through which at least one of the more than one linear transport paths extends, and the transport chamber has a selectably variable longitudinal length between the interfaces.

摘要翻译： 具有输送室的基板处理装置，位于输送室旁的基板保持模块的线性阵列，以及位于所述室中的基板输送。 腔室可以保持隔离的气氛，并且限定沿着传送室纵向延伸的不止一个基本线性的传送路径。 腔室中的输送能够沿着线性输送路径输送基底。 运输具有能够保持和移动基板的运输机。 输送器与输送室的壁接触，用于沿着至少一个线性路径移动。 运输室具有用于与运输室的相对端处的其它衬底保持模块配合的界面。 每个界面具有开口，多于一个的线性传送路径中的至少一个延伸穿过该开口，并且传送室在界面之间具有可选择地可变的纵向长度。