-
公开(公告)号：US07988398B2
公开(公告)日：2011-08-02
申请号：US10962787
申请日：2004-10-09
IPC分类号： H01L21/677 , H01L21/306 , B65H1/00 , C23F1/00
CPC分类号： H01L21/677 , H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67724 , H01L21/67727 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： Substrate processing apparatus having a chamber, a generally linear array of process modules, a substrate transport, and a drive system. The chamber is capable of being isolated from the outside atmosphere. Each process module of the array is communicably connected to the chamber to allow a substrate to be transferred between the chamber and process module. The substrate transport is located in and is movably supported from the chamber. The transport is capable of moving along a linear path defined by the chamber for transporting the substrate between process modules. The drive system is connected to the chamber for driving and moving the transport along the linear path. The chamber comprises a selectable number of chamber modules serially abutted to defined the chamber. Each module has an integral portion of the drive system.
摘要翻译： 具有室的基板处理装置，大致线性的工艺模块阵列，基板输送和驱动系统。 该室能够与外界气氛隔绝。 阵列的每个处理模块可通信地连接到腔室，以允许衬底在室和过程模块之间传送。 衬底输送器位于腔室中并且可移动地从腔室支撑。 输送器能够沿着由腔室限定的线性路径移动，以在处理模块之间传送基板。 驱动系统连接到室，用于沿着线性路径驱动和移动传送装置。 腔室包括可选数量的腔室模块，其串联地邻接以限定腔室。 每个模块都具有驱动系统的整体部分。
-
公开(公告)号：US20110038692A1
公开(公告)日：2011-02-17
申请号：US12542588
申请日：2009-08-17
IPC分类号： H01L21/673 , H01L21/677 , H01L21/67
CPC分类号： H01L21/67742 , H01L21/67196
摘要： A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
摘要翻译： 一种具有第一室，运输车辆和另一室的半导体工件处理设备。 第一个房间能够与外界气氛隔绝。 运输车辆位于第一室中，并且可从第一室移动地支撑，用于相对于第一室线性运动。 运输车辆包括基座和可移动地安装到基座并且能够相对于基座进行多通道移动的整体半导体工件传送臂。 另一个室通过第一室的可关闭的开口可通信地连接到第一室。 开口的尺寸设计成允许运输车辆通过开口在第一室和另一个室之间转运。
-
公开(公告)号：US20120141235A1
公开(公告)日：2012-06-07
申请号：US13293717
申请日：2011-11-10
IPC分类号： H01L21/677
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。
-
公开(公告)号：US20080298944A1
公开(公告)日：2008-12-04
申请号：US12117355
申请日：2008-05-08
IPC分类号： B66C23/00
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。
-
公开(公告)号：US09623555B2
公开(公告)日：2017-04-18
申请号：US13293717
申请日：2011-11-10
IPC分类号： B25J9/04
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
-
公开(公告)号：US20110232844A1
公开(公告)日：2011-09-29
申请号：US13159034
申请日：2011-06-13
IPC分类号： H01L21/306
CPC分类号： H01L21/67161 , H01L21/67173 , H01L21/67709 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/67742 , Y10S414/139
摘要： A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.
摘要翻译： 提供了一种具有限定基本上线性的基板输送路径的输送室的衬底处理装置，每个可连接到腔室的衬底保持模块的线性阵列。 衬底传输具有至少一个能够在多于一个基本上线性的衬底传送路径上保持和移动衬底的传送器。 运输室具有不同的输送管，其至少一个可在输送管的两端密封，并且构造成保持与输送管不同的隔离气氛，每个不同的输送管具有一个基板输送路径 其中不同于位于另一个输送管中的另一个输送路径，并且彼此可连通地连接，其中至少一个输送管被配置为提供基板输送通过输送管的不间断过境。
-
公开(公告)号：US08747050B2
公开(公告)日：2014-06-10
申请号：US13617171
申请日：2012-09-14
IPC分类号： B25J18/00 , B25J9/12 , B25J9/10 , H01L21/677 , H01L21/687
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
摘要翻译： 一种基板输送装置，其特征在于，包括：第一无转矩回转马达，其具有第一定子和第一转子，所述第一定子线性分布，所述第一转子与第一臂连结，第二无轴旋转马达，包括第二定子和第二转子， 第二定子是线性分布的，第二转子耦合到第二臂，第二臂连接到第一臂，第一衬底支撑件联接到第一和第二臂中的至少一个，其中第一定子和第二定子 被构造成使得第一和第二臂和第一基板支撑件在定子内部，并且在第一和第二无轴旋转马达之间的连接处的马达输出和第一和第二臂中的相应的一个是合力设置在 第一和第二臂。
-
公开(公告)号：US08602706B2
公开(公告)日：2013-12-10
申请号：US12542588
申请日：2009-08-17
IPC分类号： H01L21/677
CPC分类号： H01L21/67742 , H01L21/67196
摘要： A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
-
公开(公告)号：US20110280693A1
公开(公告)日：2011-11-17
申请号：US13195401
申请日：2011-08-01
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67724 , H01L21/67727 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.
摘要翻译： 一种基板处理设备，包括具有端部并且限定多于一个基本上线性的基板输送区域的输送室，其中每个输送区域沿着输送室在输送室的相对壁之间纵向延伸，并且多于一个基本上线性的基板 运输区域被配置为用于使得能够从端部传送基板的供应区域，并且多于一个的基本线性的基板输送区域中的至少一个被配置为用于使基板传送到端部的返回区域，以及至少一个基板 位于并可移动地安装到输送室的输送器，用于沿着多于一个的基本上线性的基底输送区输送基底，其中每个基底输送区被配置为允许至少一个基底输送从一个输送区移动到另一个输送区。
-
公开(公告)号：US07959395B2
公开(公告)日：2011-06-14
申请号：US11442509
申请日：2006-05-26
IPC分类号： H01L21/677
CPC分类号： H01L21/67161 , H01L21/67173 , H01L21/67709 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/67742 , Y10S414/139
摘要： Substrate processing apparatus having a transport chamber, a linear array of substrate holding modules alongside the transport chamber, and a substrate transport located in the chamber. The chamber can hold an isolated atmosphere, and defines more than one substantially linear transport paths extending longitudinally along the transport chamber. The transport in the chamber is capable of transporting the substrate along the linear transport paths. The transport has a transporter capable of holding and moving the substrate. The transporter interfaces a wall of the transport chamber for moving along at least one of linear paths. The transport chamber has interfaces for mating with other substrate holding modules at opposite ends of the transport chamber. Each interface has an opening through which at least one of the more than one linear transport paths extends, and the transport chamber has a selectably variable longitudinal length between the interfaces.
摘要翻译： 具有输送室的基板处理装置，位于输送室旁边的基板保持模块的线性阵列，以及位于该室中的基板输送。 腔室可以保持隔离的气氛，并且限定沿着传送室纵向延伸的不止一个基本线性的传送路径。 腔室中的输送能够沿着线性输送路径输送基底。 运输具有能够保持和移动基板的运输机。 输送器与输送室的壁接触，用于沿着至少一个线性路径移动。 运输室具有用于与运输室的相对端处的其它衬底保持模块配合的界面。 每个界面具有开口，多于一个的线性传送路径中的至少一个延伸穿过该开口，并且传送室在接口之间具有可选择地可变的纵向长度。
-
-
-
-
-
-
-
-
-
搜索结果
30 条记录 (耗时 0.027 秒)