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30 条记录 (耗时 0.019 秒)

    Diaphragm activated micro-electromechanical switch
    1.
    发明申请
    Diaphragm activated micro-electromechanical switch 有权
    隔膜激活微机电开关

    公开(公告)号：US20060017533A1

    公开(公告)日：2006-01-26

    申请号：US10523310

    申请日：2002-08-26

    申请人： Christopher Jahnes ,  Jennifer Lund ,  Katherine Saenger ,  Richard Volant

    发明人： Christopher Jahnes ,  Jennifer Lund ,  Katherine Saenger ,  Richard Volant

    IPC分类号： H01H51/22

    CPC分类号： H01H59/0009

    摘要： A micro-electromechanical (MEM) RF switch provided with a deflectable membrane (60) activates a switch contact or plunger (40). The membrane incorporates interdigitated metal electrodes (70) which cause a stress gradient in the membrane when activated by way of a DC electric field. The stress gradient results in a predictable bending or displacement of the membrane (60), and is used to mechanically displace the switch contact (30). An RF gap area (25) located within the cavity (250) is totally segregated from the gaps (71) between the interdigitated metal electrodes (70). The membrane is electrostatically displaced in two opposing directions, thereby aiding to activate and deactivate the switch. The micro-electromechanical switch includes: a cavity (250); at least one conductive path (20) integral to a first surface bordering the cavity; a flexible membrane (60) parallel to the first surface bordering the cavity (250), the flexible membrane (60) having a plurality of actuating electrodes (70); and a plunger (40) attached to the flexible membrane (60) in a direction away from the actuating electrodes (70), the plunger (40) having a conductive surface that makes electric contact with the conductive paths, opening and closing the switch.

    摘要翻译： 设置有可偏转膜（60）的微机电（MEM）RF开关激活开关触点或柱塞（40）。 膜包含交叉指向的金属电极（70），其通过DC电场激活时引起膜中的应力梯度。 应力梯度导致膜（60）的可预测的弯曲或位移，并且用于机械地移动开关触点（30）。 位于空腔（250）内的RF间隙区域（25）与交叉指向的金属电极（70）之间的间隙（71）完全分离。 膜在两个相反的方向上静电位移，从而有助于启动和停用开关。 微机电开关包括：空腔（250）; 至少一个导电通路（20），与所述空腔相邻的第一表面成一体; 柔性膜（60），其平行于与所述腔（250）接壤的所述第一表面，所述柔性膜（60）具有多个致动电极（70）; 以及沿远离所述致动电极（70）的方向附接到所述柔性膜（60）的柱塞（40），所述柱塞（40）具有导电表面，所述导电表面与所述导电路径电接触，所述开关闭合。

    Multilayer interconnect structure containing air gaps and method for making
    5.
    发明申请
    Multilayer interconnect structure containing air gaps and method for making 有权
    包含气隙的多层互连结构和制造方法

    公开(公告)号：US20070259516A1

    公开(公告)日：2007-11-08

    申请号：US11429708

    申请日：2006-05-08

    申请人： Christopher Jahnes ,  Satyanarayana Nitta ,  Kevin Petrarca ,  Katherine Saenger

    发明人： Christopher Jahnes ,  Satyanarayana Nitta ,  Kevin Petrarca ,  Katherine Saenger

    IPC分类号： H01L21/4763

    CPC分类号： H01L21/7682 ,  H01L21/76808 ,  H01L21/76831 ,  H01L21/76835 ,  H01L23/5222 ,  H01L23/53295 ,  H01L2221/1026 ,  H01L2221/1031 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A multilevel air-gap-containing interconnect structure and a method of fabricating the same are provided. The multilevel air-gap-containing interconnect structure includes a collection of interspersed line levels and via levels, with via levels comprising conductive vias embedded in one or more dielectric layers in which the dielectric layers are solid underneath and above line features in adjacent levels, and perforated between line features. The line levels contain conductive lines and an air-gap-containing dielectric. A solid dielectric bridge layer, containing conductive contacts and formed by filling in a perforated dielectric layer, is disposed over the collection of interspersed line and via levels.

    摘要翻译： 提供了一种具有多级气隙的互连结构及其制造方法。 多层含气隙的互连结构包括散布的线电平和通孔电平的集合，其中通孔层包括嵌入在一个或多个电介质层中的导电通孔，其中电介质层在相邻电平之下的电极特征和固定电极层之上，以及 线之间穿孔特征。 线路电平包含导电线和含气隙的电介质。 包含导电接触并通过填充有孔电介质层形成的固体介质桥接层设置在散布的线路和通孔层的集合上。

    Lateral microelectromechanical system switch
    10.
    发明申请
    Lateral microelectromechanical system switch 有权
    侧向微机电系统开关

    公开(公告)号：US20050024169A1

    公开(公告)日：2005-02-03

    申请号：US10915742

    申请日：2004-08-11

    申请人： Hariklia Deligianni ,  Christopher Jahnes ,  Jennifer Lund ,  Lawrence Larson

    发明人： Hariklia Deligianni ,  Christopher Jahnes ,  Jennifer Lund ,  Lawrence Larson

    IPC分类号： H01H59/00 ,  H01H53/00

    CPC分类号： H01H59/0009 ,  H01H2001/0068 ,  H01H2001/0078

    摘要： A switch comprising a substrate, an elongated movable part, a pair of electrical contacts disposed at one side of said part, an actuation electrode disposed at the one side of the part and separated from the pair of electrical contacts, wherein the part, the contacts and the electrode are disposed on the substrate, wherein the elongated movable part is arranged and dimensioned such that the part is movable in a generally lateral direction toward the contacts; the movable part includes a central elongated member fixed to a head having an electrical contact disposed at the one side. One end of the movable part is attached to the substrate by means of various anchoring arrangements.

    摘要翻译： 一种开关，其包括基板，细长可动部分，设置在所述部分一侧的一对电触点，设置在该部分的一侧并与所述一对电触头分离的致动电极，其中所述部分，所述触点 并且所述电极设置在所述基板上，其中所述细长可动部分被布置和尺寸设定成使得所述部件能够沿大致横向方向朝向所述触点移动; 可移动部分包括固定到头部的中心细长构件，其具有设置在一侧的电触头。 可移动部分的一端通过各种锚定装置附接到基板。