Two probe low profile tuner
    1.
    发明授权

    公开(公告)号:US12199592B1

    公开(公告)日:2025-01-14

    申请号:US17981415

    申请日:2022-11-05

    Abstract: A low profile two probe load-pull slide screw impedance tuner uses two tuning probes sharing the same slabline; they are inserted diametrically at fixed depth (distance from the center conductor) from both sides into the channel and move only horizontally along the slabline. The tuner does not have adjustable vertical axes controlling the penetration of the probes and its low profile is optimized for on-wafer operations. The carriages holding the probes are moved at high speed along the slabline using linear electric actuators. The “S” shaped center conductor allows for a neutral zero 50 Ohm state. An efficient de-embedding calibration method serves speeding up the measurement procedure additionally.

    Very low frequency tuner with adjustable dielectric

    公开(公告)号:US12155364B1

    公开(公告)日:2024-11-26

    申请号:US17541404

    申请日:2021-12-03

    Abstract: A low RF frequency electro-mechanical load pull impedance tuner uses four rotary, remotely controlled variable shunt capacitors and four fixed series transmission lines to create up to 108 independently controllable impedance states at each frequency covering the entire Smith chart in the frequency range between below 1 and 5 MHz; the capacitors and control motors and gear are immersed in a mixture of dielectric fluids inside individual sealed containers including also adequate liquid stirring mechanisms. Appropriate, Error Function based optimization algorithms, allow fast impedance tuning at the fundamental frequency at the output of DUT's operated in high gain compression. Stepper motors, drivers and control software are used to remotely control the variable shunt capacitors of the tuner and allow it to be automated, pre-calibrated and used in an automated load pull measuring setup.

    Combination probes for load pull tuner

    公开(公告)号:US11621468B1

    公开(公告)日:2023-04-04

    申请号:US17471837

    申请日:2021-09-10

    Abstract: Combination tuning probes for slide screw load pull tuners allow larger frequency coverage Fmax/Fmin and higher GAMMA beyond the capacity of existing tuning probes. This is done by combining two or more equally or unequally long tuning slugs into a combination probe, the slugs being mounted in the same mobile tuner carriage using two or more independent vertical axes. To avoid spurious resonance phenomena the tuning slugs are driven parallel vertically in close proximity or sliding on each-other, are linked to each-other and guided appropriately allowing smooth, un-inhibited and continuous vertical movement of the metallic bodies.

    On-wafer tuner system and method
    4.
    发明授权

    公开(公告)号:US11506708B1

    公开(公告)日:2022-11-22

    申请号:US17102936

    申请日:2020-11-24

    Abstract: A balanced on-wafer load pull tuner system includes an intelligent, independent and universal mechanical balancing and contact controlling device, supporting automatic microwave single or multi-probe slide screw tuners. It allows contacting and stable on-wafer testing of sub-micrometric devices. Ultra-low loss rigid airlines (bend-lines) used to connect the tuner with the semiconductor chips, in order to improve the tuning range at the DUT reference plane, transfer mechanical movements of the wafer probes attached to the rigid bend-lines, when the tuner mobile carriages move horizontally. A precisely controlled counter-weight allows contacting the DUT and balanced load pull operation by controlling the center of gravity of the assembly.

    Waveguide slide screw tuner with rotating disc probes

    公开(公告)号:US11156656B1

    公开(公告)日:2021-10-26

    申请号:US16262112

    申请日:2019-01-30

    Abstract: A waveguide low profile slide-screw impedance tuner for seamless on-wafer integration uses rotating metallic tuning probe. This ensures high resolution in the area where the probe penetration is maximum (high GAMMA), a smooth increase of depth (basic anti-electrical discharge—“Corona” form) and compensation for the negative phase trajectory at higher GAMMA, native to traditional vertically moving stub-probes in waveguide tuners. Also, using rotating disc-probes simplifies the tuner mechanics, eliminates the cumbersome precise vertical axis and gear and flattens the tuner profile for best direct connection with wafer-probes.

    Active harmonic load pull impedance tuner

    公开(公告)号:US11041882B1

    公开(公告)日:2021-06-22

    申请号:US16563338

    申请日:2019-09-06

    Abstract: An active split-signal Fo and 2Fo harmonic impedance load pull tuner uses a single signal source, a wideband harmonic amplitude and phase modulator-frequency doubler. The Fo source signal path is divided between input and output of the DUT; the output portion is processed to generate independently controlled synchronous amplitude and phase controlled Fo and 2Fo signals, which are then amplified and re-injected into the output of the DUT after being pre-matched using a passive harmonic tuner. A harmonic receiver is used to synthesize in situ the required Fo and 2Fo load impedances. Passive 3Fo tuning is also possible independently.

    Method for experimental optimization of RF matching networks

    公开(公告)号:US11006288B1

    公开(公告)日:2021-05-11

    申请号:US16351938

    申请日:2019-03-13

    Abstract: An automated highly efficient “design-test-optimize” recursive loop method for experimentally optimizing embedding networks of active RF networks especially subject to wideband modulated signals, whereby the results of a matching network design are fed into the active load pull system, which synthesizes the response of the specific network design iteration and tests the transistor in real time under the emulated load conditions of the network. The weighed difference between expected and test results are used in an error function and the “design-test” loop is repeated until the error is minimized. The capacity of passive and active modulated tuners and network analysis software tools are jointly used, sharing calculated and measured data. The result of the automated optimization procedure ends into a compromise, which, if acceptable, can be processed into manufacturing with realistically expectable results.

    Coaxial adjustable wave probe
    8.
    发明授权

    公开(公告)号:US10734697B1

    公开(公告)日:2020-08-04

    申请号:US16165531

    申请日:2018-10-19

    Abstract: Wideband coaxial low loss signal couplers use an electro-magnetic loop placed perpendicularly in a mantle hole of the external wall of the coaxial airline. The signal coupling factor increases with frequency thus favoring detection of harmonic components generated by the nonlinearly operated RF transistors. In order to adapt also to various power levels and associated harmonic receiver sensitivity the coupling factor can be adjusted either by controlling the penetration of the loop inside the airline cavity or by rotating the loop around its vertical axis.

    Hybrid electronic tuner
    9.
    发明授权

    公开(公告)号:US10520541B1

    公开(公告)日:2019-12-31

    申请号:US15788430

    申请日:2017-10-19

    Abstract: A hybrid RF electronic impedance tuner is made using multiple PIN diodes or MOSFETs mounted in a low loss slabline, between the bottom surface of the center conductor and ground. The diodes and FETs are DC controlled individually and spaced appropriately along the slabline for maximum Gamma and bandwidth. The electronic tuner is combined with a feed forward active loop using an adjustable wave-probe coupler and a fixed coupler or circulator to enhance the reflected signal towards the DUT. As a result, reflection factor up to 1 at DUT reference plane is reached, combined with the high tuning speed of the electronic tuner.

    Hybrid harmonic tuner
    10.
    发明授权

    公开(公告)号:US10345370B1

    公开(公告)日:2019-07-09

    申请号:US15800147

    申请日:2017-11-01

    Abstract: A hybrid harmonic tuner uses a reverse injection technique, a modified adjustable Gamma Boosting Unit (GBU) cascaded with a passive multi-carriage harmonic impedance tuner in the same slabline and housing. The GBU samples a portion of the forward travelling signal at the fundamental frequency, adjusts its phase and amplitude, amplifies it and injects it back, in reverse direction into the main signal path. In the hybrid tuner technique, as is herein implemented, the forward coupler (wave-probe) is mounted on the vertical axis of a slide screw tuner-type carriage and, being horizontally and vertically controlled, it eliminates the need of a separated phase shifter and attenuator, which makes the solution better, simpler and more effective; harmonic tuning is performed using only the multi-carriage passive tuner.

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