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1.发明授权Methodology for providing good data at all wavelengths over a spectroscopic range 有权在光谱范围内提供所有波长的良好数据的方法公开(公告)号：US07151605B1
公开(公告)日：2006-12-19
申请号：US11009489
申请日：2004-12-11
IPC分类号： G01J4/00
CPC分类号： G01J3/28 , G01J3/42 , G01N21/274
摘要： Disclosed is methodology for obtaining data of improved precision, including detection and replacement of data determined to be suspect to provide good data over a spectroscopic range of wavelengths.
摘要翻译： 公开了用于获得改进精度的数据的方法，包括检测和替换被确定为在波长范围内提供良好数据的数据。
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2.发明授权Methodology for improving precision of data acquired by spectrophotometer systems 有权用于提高分光光度计系统获取的数据精度的方法公开(公告)号：US06831740B2
公开(公告)日：2004-12-14
申请号：US09862881
申请日：2001-08-09
IPC分类号： G01J342
CPC分类号： G01J3/28 , G01J3/42 , G01N21/274
摘要： Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines.
摘要翻译： 公开了分光光度计系统和方法，用于从其获得改进精度的数据，包括基于多个基线的比较来替换被确定为可疑的数据。
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公开(公告)号：US07623237B1
公开(公告)日：2009-11-24
申请号：US11452483
申请日：2006-06-14
申请人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
发明人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/55
摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。
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公开(公告)号：US08159672B1
公开(公告)日：2012-04-17
申请号：US12592015
申请日：2009-11-19
申请人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
发明人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/55
摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
摘要翻译： 用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置 入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。
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公开(公告)号：US07239391B2
公开(公告)日：2007-07-03
申请号：US11098669
申请日：2005-04-02
CPC分类号： G01N21/211 , G01J4/00
摘要： Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data set is not sufficient to allow definite one for one parameter evaluation, and wherein a global fit procedure can be applied to obtain good parameter starting values for use in a parameter evaluating regression procedure.
摘要翻译： 光谱椭偏仪系统介导的用于量化层的数学模型中定义参数的方法，该方法包含多层不同材料，其中至少一些吸收电磁辐射，其中所获取的数据集不足以允许确定 一个用于一个参数评估，并且其中可以应用全局拟合过程以获得用于参数评估回归过程的良好参数起始值。
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公开(公告)号：US07385697B2
公开(公告)日：2008-06-10
申请号：US10849740
申请日：2004-05-20
申请人： John A. Woollam , Corey L. Bungay , Thomas E. Tiwald , Martin M. Liphardt , Ronald A. Synowicki , Gregory K. Pribil , Craig M. Herzinger , Blaine D. Johs , James N. Hilfiker
发明人： John A. Woollam , Corey L. Bungay , Thomas E. Tiwald , Martin M. Liphardt , Ronald A. Synowicki , Gregory K. Pribil , Craig M. Herzinger , Blaine D. Johs , James N. Hilfiker
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.
摘要翻译： 在回归过程中同时使用从RADIO，MICRO，FIR，IR，NIR-VIS-NUV，UV，DUV，VUV EUV，XRAY中选择的至少两个范围的波长，以评估数学色散结构中的参数以建模介电函数。
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7.发明申请公开(公告)号：US20170254748A1
公开(公告)日：2017-09-07
申请号：US15530775
申请日：2017-02-27
CPC分类号： G01N21/4133 , G01N21/211 , G01N2021/214
摘要： Methodology of characterizing surface properties and determining refractive index and extinction coefficient of a prism shaped material, including simultaneously for a multiplicity of wavelengths, using an easy to practice technique.
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公开(公告)号：US07777883B2
公开(公告)日：2010-08-17
申请号：US12157407
申请日：2008-06-10
IPC分类号： G01J4/00
CPC分类号： G01N21/211
摘要： A system for reducing reflections of a beam of electromagnetic radiation from the opposite, back, surface of an anisotropic sample, including methodology for investigating the incident, front, surface thereof with electromagnetic radiation, and analyzing the data as if the sample is isotropic.
摘要翻译： 用于减少来自各向异性样品的相对背面的电磁辐射束的反射的系统，包括用电磁辐射研究其入射光源，其前表面的方法，以及如同该样品是各向同性的那样分析数据。
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公开(公告)号：US10309897B2
公开(公告)日：2019-06-04
申请号：US15530775
申请日：2017-02-27
摘要： Methodology of characterizing surface properties and determining refractive index and extinction coefficient of a prism shaped material, including simultaneously for a multiplicity of wavelengths, using an easy to practice technique.
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公开(公告)号：US08692985B1
公开(公告)日：2014-04-08
申请号：US13815624
申请日：2013-03-13
IPC分类号： G01N21/41
CPC分类号： G01N21/41 , G01N21/4133 , G01N21/43
摘要： Methodology of determining refractive index and extinction coefficient of a prism shaped material, including simultaneously for a multiplicity of wavelengths using an easy to practice technique.
摘要翻译： 确定棱镜形材料的折射率和消光系数的方法，包括使用易于实践的技术同时使用多种波长。
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