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公开(公告)号：US10532433B2
公开(公告)日：2020-01-14
申请号：US16111413
申请日：2018-08-24
Applicant: DISCO CORPORATION
Inventor： Junichi Kuki , Joel Koerwer , Keinosuke Maeda
Abstract: A laser beam profiler unit for measuring an intensity distribution of a laser beam oscillated from a laser oscillator includes a magnifying optical system for magnifying a spot diameter of the laser beam oscillated from the laser oscillator and focused by a condensing lens, a first transmission prism for attenuating the laser beam, a second transmission prism for further attenuating a laser beam reflected by the first transmission prism, an image capturing element for detecting the laser beam reflected by the second transmission prism, and an analyzer for analyzing an intensity distribution of a spot of the laser beam from data of the laser beam detected by the image capturing element.
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公开(公告)号：US11892282B2
公开(公告)日：2024-02-06
申请号：US17663490
申请日：2022-05-16
Applicant: DISCO CORPORATION
Inventor： Hiroto Yoshida , Nobuyasu Kitahara , Kuo Wei Wu , Kunimitsu Takahashi , Naoki Murazawa , Joel Koerwer
IPC: G01B11/06
CPC classification number: G01B11/0625
Abstract: A protective film thickness measuring method includes a step of applying light to a top surface of a wafer in a state in which no protective film is formed and measuring a first reflection intensity of the light reflected from the top surface, a step of forming the protective film including a light absorbing material, a step of irradiating the protective film with exciting light of a wavelength at which the light absorbing material fluoresces and measuring a second reflection intensity including fluorescence of the protective film and the light reflected from the top surface, and a step of excluding reflection intensity of patterns formed on the top surface, by subtracting the measured first reflection intensity from the measured second reflection intensity, and calculating fluorescence intensity of the protective film.
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公开(公告)号：US10183359B2
公开(公告)日：2019-01-22
申请号：US15946038
申请日：2018-04-05
Applicant: DISCO CORPORATION
Inventor： Joel Koerwer , Seiichi Sai
Abstract: There is provided a condensing point position detecting method of detecting a position in an optical axis direction of a condensing point of a laser beam condensed by a condenser of a laser processing apparatus. The condensing point position detecting method includes: an irradiation mark forming step of forming a plurality of irradiation marks in a substrate by irradiating the substrate held by a chuck table with the laser beam while moving the condenser in the optical axis direction with respect to the substrate; and a condensing point position detecting step of detecting an irradiation mark having a proper shape from the plurality of irradiation marks formed in the substrate, and detecting the position of the condensing point forming the proper irradiation mark as a position of an accurate condensing point.
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公开(公告)号：US20170014947A1
公开(公告)日：2017-01-19
申请号：US15205603
申请日：2016-07-08
Applicant: DISCO CORPORATION
Inventor： Wataru Odagiri , Taku Iwamoto , Kentaro Odanaka , Hironari Ohkubo , Shuichiro Tsukiji , Kouichi Nehashi , Joel Koerwer
IPC: B23K26/03 , B23K26/08 , H01L21/268 , B23K26/402 , H01L21/67 , H01L21/78 , B23K26/06 , B23K26/364
CPC classification number: B23K26/032 , B23K26/364 , B23K26/402 , B23K2103/50 , B23K2103/56 , H01L21/2686 , H01L21/67092 , H01L21/82 , H01L22/12 , H01L22/26
Abstract: A laser beam irradiation unit of laser processing apparatus includes a pulse laser beam oscillating unit, a condenser that condenses a pulse laser beam and emits the beam to a workpiece held by a chuck table, a dichroic mirror disposed between the pulse laser beam oscillating unit and the condenser, a strobe light irradiation unit that emits light to a path on which the dichroic mirror and the condenser are disposed, a beam splitter disposed between the strobe light irradiation unit and the dichroic mirror, and an imaging unit disposed on the path of light split by the beam splitter. A controller actuates the strobe light irradiation unit and the imaging unit according to the timing of the pulse laser beam, and detects the width of a laser-processed groove immediately after emission of the pulse laser beam on the basis of an image signal from the imaging unit.
Abstract translation: 激光加工装置的激光束照射单元包括脉冲激光束振荡单元，冷凝脉冲激光束并将光束发射到由卡盘台保持的工件的冷凝器，设置在脉冲激光束振荡单元与脉冲激光束振荡单元之间的分色镜， 所述聚光器，对配置有所述分色镜和所述冷凝器的路径发光的闪光灯照射单元，配置在所述闪光灯照射单元和所述分色镜之间的分束器，以及设置在所述光路上的摄像单元 由分束器分裂。 控制器根据脉冲激光束的定时来驱动闪光灯照射单元和摄像单元，并且基于来自成像的图像信号来检测在发射脉冲激光束之后立即激光处理槽的宽度 单元。
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公开(公告)号：US20160045980A1
公开(公告)日：2016-02-18
申请号：US14823589
申请日：2015-08-11
Applicant: DISCO CORPORATION
Inventor： Kenji Asano , Keiji Nomaru , Joel Koerwer , Naotoshi Kirihara , Yudai Hata , Yusaku Ito
IPC: B23K26/073 , B23K26/08 , B23K26/03 , B23K26/06 , B23K26/067
CPC classification number: B23K26/705
Abstract: Disclosed herein is a laser beam spot shape detection method for detecting a spot shape of a laser beam oscillated by laser beam oscillator and collected by a condenser in a laser machining apparatus, the laser beam spot shape detection method including: a concave mirror holding step of holding a concave mirror having a spherical face forming a reflecting face with a chuck table; a focal point positioning step of positioning the focal point of the condenser in a proximity including the center of the spherical face forming the reflecting face of the concave mirror held by the chuck table; a laser beam irradiation step of irradiating a laser beam onto the held concave mirror, and an imaging step of capturing images of reflected light with a camera.
Abstract translation: 本发明公开了一种激光束点形状检测方法，用于检测由激光束振荡器振荡并由激光加工装置中的冷凝器收集的激光束的光斑形状，该激光束点形状检测方法包括：凹面镜保持步骤 保持具有形成具有卡盘台的反射面的球面的凹面镜; 焦点定位步骤，将聚光器的焦点定位在包括形成由卡盘台保持的凹面镜的反射面的球面的中心附近; 将激光束照射到保持的凹面镜上的激光束照射步骤，以及用相机拍摄反射光的图像的成像步骤。
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Patent Agency Ranking
公开(公告)号：US20190061063A1
公开(公告)日：2019-02-28
申请号：US16111413
申请日：2018-08-24
Applicant: DISCO CORPORATION
Inventor： Junichi Kuki , Joel Koerwer , Keinosuke Maeda
CPC classification number: B23K26/705 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/073 , G01J1/0477 , G01J1/4257 , G02B27/281
Abstract: A laser beam profiler unit for measuring an intensity distribution of a laser beam oscillated from a laser oscillator includes a magnifying optical system for magnifying a spot diameter of the laser beam oscillated from the laser oscillator and focused by a condensing lens, a first transmission prism for attenuating the laser beam, a second transmission prism for further attenuating a laser beam reflected by the first transmission prism, an image capturing element for detecting the laser beam reflected by the second transmission prism, and an analyzer for analyzing an intensity distribution of a spot of the laser beam from data of the laser beam detected by the image capturing element.
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公开(公告)号：US10207362B2
公开(公告)日：2019-02-19
申请号：US15205603
申请日：2016-07-08
Applicant: DISCO CORPORATION
Inventor： Wataru Odagiri , Taku Iwamoto , Kentaro Odanaka , Hironari Ohkubo , Shuichiro Tsukiji , Kouichi Nehashi , Joel Koerwer
IPC: B23K26/03 , B23K26/06 , B23K26/08 , B23K26/36 , B23K26/402 , H01L21/67 , H01L21/78 , H01L21/26 , B23K26/364 , H01L21/268 , H01L21/82 , B23K103/00 , H01L21/66
Abstract: A laser beam irradiation unit of laser processing apparatus includes a pulse laser beam oscillating unit, a condenser that condenses a pulse laser beam and emits the beam to a workpiece held by a chuck table, a dichroic mirror disposed between the pulse laser beam oscillating unit and the condenser, a strobe light irradiation unit that emits light to a path on which the dichroic mirror and the condenser are disposed, a beam splitter disposed between the strobe light irradiation unit and the dichroic mirror, and an imaging unit disposed on the path of light split by the beam splitter. A controller actuates the strobe light irradiation unit and the imaging unit according to the timing of the pulse laser beam, and detects the width of a laser-processed groove immediately after emission of the pulse laser beam on the basis of an image signal from the imaging unit.
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公开(公告)号：US20160151857A1
公开(公告)日：2016-06-02
申请号：US14953640
申请日：2015-11-30
Applicant: DISCO CORPORATION
Inventor： Wataru Odagiri , Kouichi Nehashi , Joel Koerwer , Hironari Ohkubo , Shuichiro Tsukiji , Ryugo Oba , Kentaro Odanaka , Takashi Sampei
IPC: B23K26/06 , H01L21/78 , B23K26/082 , H01L21/687 , B23K26/035 , B23K26/04
CPC classification number: B23K26/0626 , B23K26/032 , B23K26/035 , B23K26/04 , B23K26/0622 , B23K26/082 , B23K26/0853 , B23K26/359 , B23K2101/40 , H01L21/67092 , H01L21/78
Abstract: A laser beam irradiation unit of a laser processing apparatus includes a pulse laser oscillator, a condenser which converges and irradiates a pulse laser beam upon a workpiece held on a chuck table, a dichroic mirror disposed between the pulse laser oscillator and the condenser, a strobo flash irradiation unit which irradiates light on a route of the dichroic mirror and the condenser, a beam splitter disposed between the strobo flash irradiation unit and the dichroic mirror, and an image pickup unit disposed on the route of the light split by the beam splitter. A control unit renders the strobo flash irradiation unit and the image pickup unit operative in a timed relationship with the pulse laser beam oscillated from the pulse laser beam oscillator and irradiated upon the workpiece and detects a processed state on the basis of an image signal from the image pickup unit.
Abstract translation: 激光加工装置的激光束照射单元包括脉冲激光振荡器，将夹持在夹盘上的工件上的脉冲激光束会聚并照射的冷凝器，设置在脉冲激光振荡器和冷凝器之间的分色镜， 闪光照射单元，其在分色镜和聚光器的路线上照射光，设置在闪光灯照射单元和分色镜之间的分束器和设置在由分束器分开的光的路线上的图像拾取单元。 控制单元使闪光灯照射单元和图像拾取单元以与从脉冲激光束振荡器振荡的脉冲激光束定时关系起作用并照射到工件上，并且基于来自所述脉冲激光束振荡器的图像信号检测处理状态 摄像单元
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公开(公告)号：US20180299786A1
公开(公告)日：2018-10-18
申请号：US15946038
申请日：2018-04-05
Applicant: DISCO CORPORATION
Inventor： Joel Koerwer , Seiichi Sai
IPC: G03F7/20 , G03F9/00 , B23K26/03 , B23K26/035 , B23K26/06
CPC classification number: B23K26/035 , B23K26/032 , B23K26/0665 , B23K26/0823 , B23K26/0876 , G01B11/14 , G03F9/7023 , G03F9/7076 , H01L21/681 , H01L21/78
Abstract: There is provided a condensing point position detecting method of detecting a position in an optical axis direction of a condensing point of a laser beam condensed by a condenser of a laser processing apparatus. The condensing point position detecting method includes: an irradiation mark forming step of forming a plurality of irradiation marks in a substrate by irradiating the substrate held by a chuck table with the laser beam while moving the condenser in the optical axis direction with respect to the substrate; and a condensing point position detecting step of detecting an irradiation mark having a proper shape from the plurality of irradiation marks formed in the substrate, and detecting the position of the condensing point forming the proper irradiation mark as a position of an accurate condensing point.
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公开(公告)号：US09789567B2
公开(公告)日：2017-10-17
申请号：US14823589
申请日：2015-08-11
Applicant: DISCO CORPORATION
Inventor： Kenji Asano , Keiji Nomaru , Joel Koerwer , Naotoshi Kirihara , Yudai Hata , Yusaku Ito
IPC: B23K26/073 , B23K26/064 , B23K26/066 , B23K26/067 , B23K26/03 , B23K26/08 , B23K26/70
CPC classification number: B23K26/705
Abstract: Disclosed herein is a laser beam spot shape detection method for detecting a spot shape of a laser beam oscillated by laser beam oscillator and collected by a condenser in a laser machining apparatus, the laser beam spot shape detection method including: a concave mirror holding step of holding a concave mirror having a spherical face forming a reflecting face with a chuck table; a focal point positioning step of positioning the focal point of the condenser in a proximity including the center of the spherical face forming the reflecting face of the concave mirror held by the chuck table; a laser beam irradiation step of irradiating a laser beam onto the held concave mirror, and an imaging step of capturing images of reflected light with a camera.
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