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    LASER PROCESSING APPARATUS
    2.
    发明申请
    LASER PROCESSING APPARATUS 有权
    激光加工设备

    公开(公告)号：US20160151857A1

    公开(公告)日：2016-06-02

    申请号：US14953640

    申请日：2015-11-30

    Applicant: DISCO CORPORATION

    Inventor： Wataru Odagiri ,  Kouichi Nehashi ,  Joel Koerwer ,  Hironari Ohkubo ,  Shuichiro Tsukiji ,  Ryugo Oba ,  Kentaro Odanaka ,  Takashi Sampei

    IPC: B23K26/06 ,  H01L21/78 ,  B23K26/082 ,  H01L21/687 ,  B23K26/035 ,  B23K26/04

    CPC classification number: B23K26/0626 ,  B23K26/032 ,  B23K26/035 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/359 ,  B23K2101/40 ,  H01L21/67092 ,  H01L21/78

    Abstract: A laser beam irradiation unit of a laser processing apparatus includes a pulse laser oscillator, a condenser which converges and irradiates a pulse laser beam upon a workpiece held on a chuck table, a dichroic mirror disposed between the pulse laser oscillator and the condenser, a strobo flash irradiation unit which irradiates light on a route of the dichroic mirror and the condenser, a beam splitter disposed between the strobo flash irradiation unit and the dichroic mirror, and an image pickup unit disposed on the route of the light split by the beam splitter. A control unit renders the strobo flash irradiation unit and the image pickup unit operative in a timed relationship with the pulse laser beam oscillated from the pulse laser beam oscillator and irradiated upon the workpiece and detects a processed state on the basis of an image signal from the image pickup unit.

    Abstract translation: 激光加工装置的激光束照射单元包括脉冲激光振荡器，将夹持在夹盘上的工件上的脉冲激光束会聚并照射的冷凝器，设置在脉冲激光振荡器和冷凝器之间的分色镜， 闪光照射单元，其在分色镜和聚光器的路线上照射光，设置在闪光灯照射单元和分色镜之间的分束器和设置在由分束器分开的光的路线上的图像拾取单元。 控制单元使闪光灯照射单元和图像拾取单元以与从脉冲激光束振荡器振荡的脉冲激光束定时关系起作用并照射到工件上，并且基于来自所述脉冲激光束振荡器的图像信号检测处理状态 摄像单元

    LASER PROCESSING APPARATUS
    4.
    发明申请
    LASER PROCESSING APPARATUS 审中-公开
    激光加工设备

    公开(公告)号：US20170014947A1

    公开(公告)日：2017-01-19

    申请号：US15205603

    申请日：2016-07-08

    Applicant: DISCO CORPORATION

    Inventor： Wataru Odagiri ,  Taku Iwamoto ,  Kentaro Odanaka ,  Hironari Ohkubo ,  Shuichiro Tsukiji ,  Kouichi Nehashi ,  Joel Koerwer

    IPC: B23K26/03 ,  B23K26/08 ,  H01L21/268 ,  B23K26/402 ,  H01L21/67 ,  H01L21/78 ,  B23K26/06 ,  B23K26/364

    CPC classification number: B23K26/032 ,  B23K26/364 ,  B23K26/402 ,  B23K2103/50 ,  B23K2103/56 ,  H01L21/2686 ,  H01L21/67092 ,  H01L21/82 ,  H01L22/12 ,  H01L22/26

    Abstract: A laser beam irradiation unit of laser processing apparatus includes a pulse laser beam oscillating unit, a condenser that condenses a pulse laser beam and emits the beam to a workpiece held by a chuck table, a dichroic mirror disposed between the pulse laser beam oscillating unit and the condenser, a strobe light irradiation unit that emits light to a path on which the dichroic mirror and the condenser are disposed, a beam splitter disposed between the strobe light irradiation unit and the dichroic mirror, and an imaging unit disposed on the path of light split by the beam splitter. A controller actuates the strobe light irradiation unit and the imaging unit according to the timing of the pulse laser beam, and detects the width of a laser-processed groove immediately after emission of the pulse laser beam on the basis of an image signal from the imaging unit.

    Abstract translation: 激光加工装置的激光束照射单元包括脉冲激光束振荡单元，冷凝脉冲激光束并将光束发射到由卡盘台保持的工件的冷凝器，设置在脉冲激光束振荡单元与脉冲激光束振荡单元之间的分色镜， 所述聚光器，对配置有所述分色镜和所述冷凝器的路径发光的闪光灯照射单元，配置在所述闪光灯照射单元和所述分色镜之间的分束器，以及设置在所述光路上的摄像单元 由分束器分裂。 控制器根据脉冲激光束的定时来驱动闪光灯照射单元和摄像单元，并且基于来自成像的图像信号来检测在发射脉冲激光束之后立即激光处理槽的宽度 单元。

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