Method of manufacturing carbon nanotube
    3.
    发明授权
    Method of manufacturing carbon nanotube 有权
    制造碳纳米管的方法

    公开(公告)号:US08029760B2

    公开(公告)日:2011-10-04

    申请号:US12240238

    申请日:2008-09-29

    IPC分类号: D01F9/12 D01F9/127

    摘要: According to a method of manufacturing carbon nanotubes, minute concavities and convexities are formed at a surface of a substrate, a catalyst metal layer having a predetermined film thickness is formed on the surface having the concavities and convexities, the substrate is subject to a heat treatment at a predetermined temperature to change the catalyst metal layer into a plurality of isolated fine particles. The catalyst metal fine particles have a uniform particle diameter and uniform distribution. Then, the substrate supporting the plurality of fine particles is placed in a carbon-containing gas atmosphere to grow carbon nanotubes on the catalyst metal fine particles by a CVD method using the carbon-containing gas. The carbon nanotubes can be formed to have a desired diameter and a desired shell number with superior reproducibility.

    摘要翻译: 根据制造碳纳米管的方法,在基板的表面形成微小的凹凸,在具有凹凸的表面上形成具有规定的膜厚的催化剂金属层,对基板进行热处理 在预定温度下将催化剂金属层改变成多个分离的细颗粒。 催化剂金属微粒具有均匀的粒径和均匀的分布。 然后,将支撑多个微粒的基板置于含碳气体气氛中,通过使用含碳气体的CVD法在催化剂金属微粒上生长碳纳米管。 碳纳米管可以形成为具有期望的直径和期望的壳数,具有优异的再现性。