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公开(公告)号:US06280299B1
公开(公告)日:2001-08-28
申请号:US09505577
申请日:2000-02-16
申请人: Daniel Kennedy , Boris Fuksshimov , Victor Belitsky , Boris Fishkin , Kyle Brown , Tom Osterheld , Jeff Beeler , Ginetto Addiego
发明人: Daniel Kennedy , Boris Fuksshimov , Victor Belitsky , Boris Fishkin , Kyle Brown , Tom Osterheld , Jeff Beeler , Ginetto Addiego
IPC分类号: B24B5702
CPC分类号: B24B53/017 , B24B37/04 , B24B57/02
摘要: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
摘要翻译: 本发明提供了一种用于将一种或多种漂洗剂递送到诸如抛光垫表面,优选一种或多种抛光流体的表面的方法和装置。 本发明还提供了一种通过将一种或多种漂洗剂的喷雾递送到表面来清洁一个或多个表面(例如抛光垫表面和基材表面)的方法,并且优选地使冲洗剂流过表面 从中心区域到外部区域,其中收集有不需要的碎屑和材料。
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公开(公告)号:US6139406A
公开(公告)日:2000-10-31
申请号:US879447
申请日:1997-06-24
申请人: Daniel Kennedy , Boris Fuksshimov , Victor Belitsky , Boris Fishkin , Kyle Brown , Tom Osterheld , Jeff Beeler , Ginetto Addiego
发明人: Daniel Kennedy , Boris Fuksshimov , Victor Belitsky , Boris Fishkin , Kyle Brown , Tom Osterheld , Jeff Beeler , Ginetto Addiego
IPC分类号: B24B37/04 , B24B53/007 , B24B57/02 , H01L21/304 , B24B7/00
CPC分类号: B24B53/017 , B24B37/04 , B24B57/02
摘要: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
摘要翻译: 本发明提供了一种用于将一种或多种漂洗剂递送到诸如抛光垫表面,优选一种或多种抛光流体的表面的方法和装置。 本发明还提供了一种通过将一种或多种漂洗剂的喷雾递送到表面来清洁一个或多个表面(例如抛光垫表面和基材表面)的方法,并且优选地使冲洗剂流过表面 从中心区域到外部区域,其中收集有不需要的碎屑和材料。
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