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    Apparatus for patterning a self-aligned coil using a damascene process
    2.
    发明授权
    Apparatus for patterning a self-aligned coil using a damascene process 有权
    用于使用镶嵌工艺图案化自对准线圈的装置

    公开(公告)号：US07075750B2

    公开(公告)日：2006-07-11

    申请号：US10652877

    申请日：2003-08-29

    申请人： Daniel Wayne Bedell ,  Quang Le ,  Edward Hin Pong Lee ,  Son Van Nguyen ,  Vladimir Nikitin ,  Murali Ramasubramanian

    发明人： Daniel Wayne Bedell ,  Quang Le ,  Edward Hin Pong Lee ,  Son Van Nguyen ,  Vladimir Nikitin ,  Murali Ramasubramanian

    IPC分类号： G11B5/147

    CPC分类号： G11B5/127

    摘要： An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.

    摘要翻译： 公开了一种使用镶嵌工艺图案化自对准线圈的装置。 在设置在第一极层上的第一绝缘层中形成线圈腔。 隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。 在线圈袋中形成铜，并在绝缘层上形成铜。 铜平坦化到绝缘层。 自对准线圈工艺将更多的铜包装到相同的线圈袋中，并松弛线圈对准公差。 由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚，所以防止了突起。

    Method of fabricating a magnetic head
    10.
    发明授权
    Method of fabricating a magnetic head 有权
    制造磁头的方法

    公开(公告)号：US07770283B2

    公开(公告)日：2010-08-10

    申请号：US11347356

    申请日：2006-02-03

    申请人： Daniel Wayne Bedell ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang

    发明人： Daniel Wayne Bedell ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.

    摘要翻译： 用于切割磁头的写入头元件的P1极的多步骤过程。 在制造P2极尖之后的第一步骤中，在P2极尖的大致垂直侧表面上沉积有一层保护材料。 此后，进行利用物质如氩的第一离子研磨步骤，通过写入间隙层研磨并陷入其下方的P1极层。 然后，从P2极尖端的侧面去除再沉积材料，并且形成在P2极端部的侧表面上的保护材料在再沉积清洁步骤期间保护P2极尖。 然后，从P2极端部的侧面除去保护材料，进行第二离子研磨工序，进一步切断P1极材料。