摘要:
A method of producing a metal oxide semiconductor field effect transistor (MOSFET) creates a transistor by patterning a gate structure over a substrate, forming spacers on sides of the gate structure, and forming conductor regions within the substrate on alternate sides of the gate stack. The gate structure and the conductor regions make up the transistor. In order to reduce high power plasma induced damage, the method initially applies a first plasma having a first power level to the transistor to form a first stress layer over the transistor. After the first lower-power plasma is applied, the method then applies a second plasma having a second power level to the transistor to from a second stress layer over the first stress layer. The second power level is higher (e.g., at least 5 times higher) than the first power level.
摘要:
A method of producing a metal oxide semiconductor field effect transistor (MOSFET) creates a transistor by patterning a gate structure over a substrate, forming spacers on sides of the gate structure, and forming conductor regions within the substrate on alternate sides of the gate stack. The gate structure and the conductor regions make up the transistor. In order to reduce high power plasma induced damage, the method initially applies a first plasma having a first power level to the transistor to form a first stress layer over the transistor. After the first lower-power plasma is applied, the method then applies a second plasma having a second power level to the transistor to from a second stress layer over the first stress layer. The second power level is higher (e.g., at least 5 times higher) than the first power level.
摘要:
A stress nitride structure is formed on an integrated circuit field effect transistor by high density plasma (HDP) depositing a first stress nitride layer on the integrated circuit field effect transistor and then plasma enhanced chemical vapor depositing (PECVD) a second stress nitride layer on the first stress nitride layer. The first stress nitride layer is non-conformal and the second stress nitride layer is conformal. Related structures also are described.
摘要:
A stress nitride structure is formed on an integrated circuit field effect transistor by high density plasma (HDP) depositing a first stress nitride layer on the integrated circuit field effect transistor and then plasma enhanced chemical vapor depositing (PECVD) a second stress nitride layer on the first stress nitride layer. The first stress nitride layer is non-conformial and the second stress nitride layer is conformal. Related structures also are described.
摘要:
An integrated circuit system is provided including forming a circuit element on a wafer, forming a stress formation layer having a non-uniform profile over the wafer, and forming an interlayer dielectric over the stress formation layer and the wafer.
摘要:
A method of forming a nitride film is disclosed. In one embodiment, the method comprises performing an ending film deposition process that differs from the main film deposition process in terms of the flow rates of the reactive and ion source gases, and maintaining acceleration power of a CVD tool during the ending film deposition process. A post deposition process may also be used to remove a denser top layer of nitride, resulting in a nitride film having a consistent density.
摘要:
A method of forming a silicon-on-insulator (SOI) semiconductor structure in a substrate having a bulk semiconductor layer, a buried oxide (BOX) layer and an SOI layer. During the formation of a trench in the structure, the BOX layer is undercut. The method includes forming a dielectric material on the upper wall of the trench adjacent to the undercutting of the BOX layer and then etching the dielectric material to form a spacer. The spacer fixes the BOX layer undercut and protects it during subsequent steps of forming a bottle-shaped portion of the trench, forming a buried plate in the deep trench; and then forming a trench capacitor. There is also a semiconductor structure, preferably an SOI eDRAM structure, having a spacer which fixes the undercutting in the BOX layer.
摘要:
A method of forming a silicon-on-insulator (SOI) semiconductor structure in a substrate having a bulk semiconductor layer, a buried oxide (BOX) layer and an SOI layer. During the formation of a trench in the structure, the BOX layer is undercut. The method includes forming a dielectric material on the upper wall of the trench adjacent to the undercutting of the BOX layer and then etching the dielectric material to form a spacer. The spacer fixes the BOX layer undercut and protects it during subsequent steps of forming a bottle-shaped portion of the trench, forming a buried plate in the deep trench; and then forming a trench capacitor. There is also a semiconductor structure, preferably an SOI eDRAM structure, having a spacer which fixes the undercutting in the BOX layer.
摘要:
A structure comprises at least one transistor on a substrate, an insulator layer over the transistor, and an ion stopping layer over the insulator layer. The ion stopping layer comprises a portion of the insulator layer that is damaged and has either argon ion damage or nitrogen ion damage.
摘要:
Forming a shallow trench capacitor in conjunction with an FET by forming a plurality of STI trenches; for the FET, implanting a first cell well having a first polarity between a first and a second of the STI trenches; for the capacitor, implanting a second cell well having a second polarity in an area of a third of the STI trenches; removing dielectric material from the third STI trench; forming a gate stack having a first portion located between the first and the second of the STI trenches and a second portion located over and extending into the third trench; and performing a source/drain implant of the same polarity as the second cell well, thereby forming a FET in the first cell well, and a capacitor in the second cell well. The second polarity may be opposite from the first polarity. An additional implant may reduce ESR in the second cell well.