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    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    1.
    发明申请
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号：US20070258167A1

    公开(公告)日：2007-11-08

    申请号：US11411556

    申请日：2006-04-25

    申请人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    发明人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

    摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH NOTCHED TRAILING SHIELD AND METHOD FOR MAKING
    2.
    发明申请
    PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH NOTCHED TRAILING SHIELD AND METHOD FOR MAKING 失效
    具有记录轨迹的平面磁记录头和制造方法

    公开(公告)号：US20070263324A1

    公开(公告)日：2007-11-15

    申请号：US11379969

    申请日：2006-04-24

    申请人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Wen-Chien Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek

    发明人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Wen-Chien Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek

    IPC分类号： G11B5/48

    CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： The invention is a perpendicular magnetic recording write head with a write pole, a trapezoidal-shaped trailing shield notch, and a metal gap layer between the write pole and notch. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap layer. The write head is fabricated by a process than includes reactive ion beam etching of a thin mask film above the write pole to remove the mask film and widen the opening at the edges of the write pole. The gap layer and notch are deposited into the widened opening above the write pole. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap layer, which is formed of a different material than the surrounding filler material.

    摘要翻译： 本发明是一种具有写极，梯形后屏蔽切口和写极与刻槽之间的金属间隙层的垂直磁记录写头。 写入极具有后缘，其具有基本上限定轨道宽度的宽度并且面向凹口的前边缘，但是通过间隙层与其间隔开。 写头通过一种工艺制造，而不是包括对写极上方的薄掩模膜的反应离子束蚀刻，以去除掩模膜并加宽写入极的边缘处的开口。 间隙层和凹口沉积在写柱上方的加宽开口中。 写极具有非磁性填充材料，例如氧化铝，除了其后缘外围，其与间隙层接触，间隙层由与周围填料材料不同的材料形成。

    METHOD FOR MAKING A PERPENDICULAR MAGNETIC RECORDING WRITE HEAD
    3.
    发明申请
    METHOD FOR MAKING A PERPENDICULAR MAGNETIC RECORDING WRITE HEAD 失效
    一种完整的磁记录写头的方法

    公开(公告)号：US20070245544A1

    公开(公告)日：2007-10-25

    申请号：US11380189

    申请日：2006-04-25

    申请人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Aron Pentek

    发明人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Aron Pentek

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for making a write pole in a perpendicular magnetic recording write head uses a metal mask to pattern the primary resist and only ion milling during the subsequent patterning steps. A layer of primary resist is deposited over the magnetic write pole material and a metal mask layer is deposited on the primary resist layer. An imaging resist layer is formed on the metal mask layer and lithographically patterned generally in the desired shape of the write pole. Ion milling without a reactive gas is then performed over the imaging resist pattern to pattern the underlying metal mask layer, which is then used as the mask to define the shape of the primary resist pattern. Ion milling with oxygen is then performed over the metal mask pattern to pattern the underlying primary resist. Ion milling without a reactive gas is then performed over the primary resist pattern to form the underlying write pole.

    摘要翻译： 用于在垂直磁记录写头中制作写极的方法使用金属掩模对主抗蚀剂进行图案化，并且在随后的图案化步骤期间仅使用离子铣削。 一层主抗蚀剂沉积在磁写磁极材料上，并且金属掩模层沉积在主抗蚀剂层上。 在金属掩模层上形成成像抗蚀剂层，并且通常以写入极的所需形状进行光刻图案化。 然后在成像抗蚀剂图案上进行无反应气体的离子研磨以对下面的金属掩模层进行图案化，然后将其用作掩模以限定主抗蚀剂图案的形状。 然后在金属掩模图案上进行用氧离子研磨以对下面的主抗蚀剂进行图案化。 然后在主抗蚀剂图案上执行没有反应气体的离子研磨以形成下面的写极。

    Prevention of electrostatic wafer sticking in plasma deposition/etch tools
    6.
    发明申请
    Prevention of electrostatic wafer sticking in plasma deposition/etch tools 失效
    防止静电晶片粘附在等离子体沉积/蚀刻工具中

    公开(公告)号：US20050255705A1

    公开(公告)日：2005-11-17

    申请号：US10845651

    申请日：2004-05-14

    申请人： Donald Allen ,  Richard Contreras ,  Michael Feldbaum ,  Dominic Truchetta

    发明人： Donald Allen ,  Richard Contreras ,  Michael Feldbaum ,  Dominic Truchetta

    IPC分类号： C23F1/00 ,  H01L21/00 ,  H01L21/306 ,  H01L21/31 ,  H01L21/469 ,  H01L21/683

    CPC分类号： H01L21/67069 ,  H01J37/32082 ,  H01L21/6831

    摘要： To remove unwanted electrostatic charge from a substrate or substrate clamping mechanism in a plasma processing chamber following the plasma processing of the substrate, the process of shutting down the RF power supply is altered. Specifically, the present invention is a stepped RF power shut down sequence in which the RF power is lowered in a first step from full power to approximately 5 to 10 watts for a short period of time, such as approximately 1 second, and thereafter the RF power is turned off. As a result of this RF power shut down sequence, with its intermediate step, the plasma during the intermediate step acts to neutralize or discharge the electrostatic charge that has built up upon the wafer and/or clamping mechanism during full power operation. When the electrostatic charge has been removed, the wafer sticking problem is resolved.

    摘要翻译： 为了在基板的等离子体处理之后的等离子体处理室中的基板或基板夹紧机构中除去不需要的静电电荷，则改变关闭RF电源的过程。 具体地说，本发明是一个步进式RF功率关闭序列，其中RF功率在第一步骤中从全功率降低到大约5到10瓦特，在短时间内，例如大约1秒，然后RF 电源关闭。 作为这种RF功率关闭顺序的结果，通过其中间步骤，中间步骤期间的等离子体用于在全功率操作期间中和或排出已经积聚在晶片和/或夹紧机构上的静电电荷。 当静电电荷被去除时，晶片粘附问题得以解决。

    Damascene method for forming write coils of magnetic heads
    7.
    发明申请
    Damascene method for forming write coils of magnetic heads 有权
    用于形成磁头写入线圈的镶嵌方法

    公开(公告)号：US20050125990A1

    公开(公告)日：2005-06-16

    申请号：US10735112

    申请日：2003-12-12

    申请人： Donald Allen ,  Richard Contreras ,  Michael Feldbaum ,  Murali Ramasubramanian

    发明人： Donald Allen ,  Richard Contreras ,  Michael Feldbaum ,  Murali Ramasubramanian

    IPC分类号： B44C1/22 ,  G11B5/127 ,  G11B5/17 ,  G11B5/31 ,  G11B5/39 ,  H04R31/00

    CPC分类号： B82Y10/00 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/4906 ,  Y10T29/49064 ,  Y10T29/49073

    摘要： An improved damascene method of forming a write coil of a magnetic head includes forming a hard mask layer over an insulator layer; forming a photoresist layer over the hard mask layer; performing an image patterning process to produce a write coil pattern in the photoresist layer; etching to remove portions of the hard mask layer in accordance with the write coil pattern; etching to remove portions of the insulator layer in accordance with the write coil pattern; etching to remove the remaining portion of the etched hard mask layer; electroplating a material comprising copper (Cu) within the etched portion of the insulator material; and performing a chemical-mechanical polishing (CMP) process over the resulting structure. By removing the remainder of the hard mask material before the CMP, the quality of the CMP is improved. Although any suitable hard mask material may be utilized, if the insulator layer is a hard-baked resist then Ta2O5 having a relatively high selectivity, low brittleness, and improved adhesion is preferred as the hard mask material.

    摘要翻译： 形成磁头的写入线圈的改进的镶嵌方法包括在绝缘体层上形成硬掩模层; 在所述硬掩模层上形成光致抗蚀剂层; 执行图像构图处理以在光致抗蚀剂层中产生写入线圈图案; 蚀刻以根据写入线圈图案去除硬掩模层的部分; 蚀刻以根据写入线圈图案去除绝缘体层的部分; 蚀刻以去除蚀刻的硬掩模层的剩余部分; 在绝缘体材料的蚀刻部分内电镀包含铜（Cu）的材料; 并对结果进行化学机械抛光（CMP）处理。 通过在CMP之前除去硬掩模材料的其余部分，改善了CMP的质量。 尽管可以使用任何合适的硬掩模材料，但是如果绝缘体层是硬烘烤抗蚀剂，则具有相对较高选择性，低脆性和改进的Ta 2 O 5 粘合作为硬掩模材料是优选的。

    STRESS AND/OR TENSION MONITORING SYSTEMS AND METHODS
    8.
    发明申请
    STRESS AND/OR TENSION MONITORING SYSTEMS AND METHODS 失效
    应力和/或张力监测系统和方法

    公开(公告)号：US20070193363A1

    公开(公告)日：2007-08-23

    申请号：US11559202

    申请日：2006-11-13

    申请人： Donald Allen ,  Li Lee ,  Clay McMullen

    发明人： Donald Allen ,  Li Lee ,  Clay McMullen

    IPC分类号： G01N3/10

    CPC分类号： G01M5/0025 ,  B63B9/00 ,  E21B17/01 ,  G01M5/0041 ,  G01M5/0066

    摘要： There is disclosed a system comprising a structure, from 1 to 10 dynamic tension sensors, adapted to monitor a dynamic tension level of at least one point along a length of the structure, and a controller adapted to calculate a dynamic bending stress or strain level at a plurality of points along the length of the structure as a function of time. In some embodiments, the system also includes a vessel connected to the structure, wherein the vessel is floating in a body of water.

    摘要翻译： 公开了一种系统，其包括结构，1至10个动态张力传感器，其适于监测沿着结构的长度的至少一个点的动态张力水平，以及控制器，适于计算动态弯曲应力或应变水平 沿着结构长度的多个点作为时间的函数。 在一些实施例中，系统还包括连接到结构的容器，其中容器浮在水体中。

    Acoustic wave filter with double reflective gratings and method for producing the same
    9.
    发明授权
    Acoustic wave filter with double reflective gratings and method for producing the same 失效
    具有双反射光栅的声波滤波器及其制造方法

    公开(公告)号：US5760664A

    公开(公告)日：1998-06-02

    申请号：US756867

    申请日：1996-11-26

    申请人： Donald Allen

    发明人： Donald Allen

    IPC分类号： H03H9/25 ,  H03H9/64

    CPC分类号： H03H9/6459 ,  H03H9/25 ,  H03H9/6436

    摘要： An acoustic wave resonator is provided on a substrate of 45.degree. X-cut, Z-propagating lithium tetraborate. The resonator includes an inner and an outer set of reflective gratings. The inner set of reflective gratings is separated from the transducer of the resonator by a set of first gaps having a synchronous coupling value of n.lambda./2. The outer set of reflective gratings is separated from the inner set of reflective gratings by a set of second gaps having a peak coupling value of (4m+1).lambda./8. This configuration of the resonator produces a wide bandwidth frequency response substantially free of spurious frequency modes and having a good shape factor.

    摘要翻译： 在45度X切割Z传播的四硼酸锂的基板上设置声波谐振器。 谐振器包括内部和外部反射光栅组。 通过具有同步耦合值nλ/ 2的一组第一间隙将内部反射光栅组与谐振器的换能器分离。 通过具有峰值耦合值（4m + 1）λ/ 8的一组第二间隙将外部反射光栅组与内部反射光栅组分离。 谐振器的这种配置产生基本上没有杂散频率模式并且具有良好形状因子的宽带宽频率响应。

    Gas Mixture for Dosing Liquids with Sulphur Dioxide and Method for using the Same
    10.
    发明申请
    Gas Mixture for Dosing Liquids with Sulphur Dioxide and Method for using the Same 审中-公开
    用于二氧化硫的液体的气体混合物及其使用方法

    公开(公告)号：US20100272872A1

    公开(公告)日：2010-10-28

    申请号：US12664985

    申请日：2008-06-12

    申请人： Donald Allen

    发明人： Donald Allen

    IPC分类号： A23C9/152 ,  C09K3/00 ,  A23L2/54 ,  A23L3/3409 ,  C12G1/04 ,  C12C5/02 ,  C12H1/14 ,  B65B3/00

    CPC分类号： C12H1/14 ,  A23C9/1524 ,  A23D9/007 ,  A23L2/54 ,  A23L3/3409 ,  C12C5/02 ,  C12G1/04

    摘要： A gas mixture containing from about 5% by volume to about 40% by volume of sulphur dioxide with the balance, except for incidental constituents not adversely affecting the basic properties of the gas mixture, being a carrier gas. Also disclosed is a method for dosing a volume of liquid with sulphur dioxide, the method including introducing the gas mixture into a volume of liquid at a flow rate and for a period of time sufficient to add a dosage amount of sulphur dioxide to a volume of liquid.

    摘要翻译： 作为载气，含有约5体积％至约40体积％的余量的二氧化硫的气体混合物除了不会对气体混合物的基本性能产生不利影响的偶然成分外。 还公开了一种用二氧化硫对一定体积的液体进行计量的方法，该方法包括以一定的流速将气体混合物引入一定体积的液体中，并且持续足以将剂量的二氧化硫添加到一定量的 液体。