Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET)
    6.
    发明授权
    Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET) 有权
    使具有前缘屏蔽(LES)和前缘锥度(LET)的PMR写入器的过程

    公开(公告)号:US08400733B2

    公开(公告)日:2013-03-19

    申请号:US12954422

    申请日:2010-11-24

    IPC分类号: G11B5/147

    摘要: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

    摘要翻译: 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极,磁性材料沉积在平坦化表面上,形成图案化的抗蚀剂材料,并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。

    PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET)
    8.
    发明申请
    PROCESS TO MAKE PMR WRITER WITH LEADING EDGE SHIELD (LES) AND LEADING EDGE TAPER (LET) 失效
    具有导向边缘屏蔽(LES)和导线边缘(LET)的PMR写入的过程

    公开(公告)号:US20120125886A1

    公开(公告)日:2012-05-24

    申请号:US12954485

    申请日:2010-11-24

    IPC分类号: G01R1/16

    摘要: Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

    摘要翻译: 提供了具有锥形前缘的前缘屏蔽和锥形磁极的制造方法。 前缘屏蔽可以通过利用CMP停止层形成。 CMP停止层可以有助于防止磁性材料的过度抛光。 对于具有锥形前缘的锥形磁极,将磁性材料沉积在平坦化表面上,形成图案化的抗蚀剂材料,并且暴露的磁性材料被蚀刻以形成磁性材料的至少一个锥形表面。