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107 条记录 (耗时 0.025 秒)

    Stable cell platform
    4.
    发明授权
    Stable cell platform 失效
    稳定的细胞平台

    公开(公告)号：US07114693B1

    公开(公告)日：2006-10-03

    申请号：US09676362

    申请日：2000-09-29

    申请人： Donald J. K. Olgado ,  Timothy J. Franklin ,  Avi Tepman

    发明人： Donald J. K. Olgado ,  Timothy J. Franklin ,  Avi Tepman

    IPC分类号： F16M13/00

    CPC分类号： H01L21/67126 ,  C25D7/12 ,  G05B2219/40351 ,  G05B2219/41457 ,  H01L21/2885 ,  H01L21/67051 ,  H01L21/67742 ,  H01L21/68707 ,  H05K3/241

    摘要： A stable platform supports a cell, the stable platform comprises a lower mainframe, an upper mainframe, and a dampener system. The upper mainframe includes a plurality of recesses. Each recess is configured to receive a cell. The dampener system connects the lower mainframe to the upper mainframe. In one embodiment, the dampener system comprises a dampener element, such as sand, to dampen vibrations between the lower mainframe and the lower mainframe.

    摘要翻译： 稳定的平台支持电池，稳定的平台包括下主机，上主机和减振器系统。 上主机包括多个凹槽。 每个凹槽被配置成接收单元。 阻尼器系统将下主机连接到上主机。 在一个实施例中，阻尼器系统包括阻尼器元件，例如沙子，以阻尼下主机和下主机之间的振动。

    BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY
    5.
    发明申请
    BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY 审中-公开
    批量设备机器人和方法阵列工程转让光伏工厂

    公开(公告)号：US20080292433A1

    公开(公告)日：2008-11-27

    申请号：US11747391

    申请日：2007-05-11

    申请人： Robert Z. Bachrach ,  Avi Tepman ,  Alexander S. Polyak

    发明人： Robert Z. Bachrach ,  Avi Tepman ,  Alexander S. Polyak

    IPC分类号： B65H5/00

    CPC分类号： C23C16/54 ,  C23C14/568 ,  H01L31/18

    摘要： The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work-pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.

    摘要翻译： 本发明通常包括用于自动化大批量批量工件制造工厂的设备，其包括能够每小时生产1,000个或更多个工件的高生产率工厂结构中的工件处理和工件加工。 工件可以从堆叠的供应提供给设备到并行阵列。 另外，工件可以通过阵列在制造架构之间转移到阵列批量传输。 工件可以在并行批量传输操作的同时在制造架构内转移。 机器人操作可以在机器人设备之间，机器人设备和处理设备之间以及处理设备内。

    SCRUBBER BOX AND METHODS FOR USING THE SAME
    6.
    发明申请
    SCRUBBER BOX AND METHODS FOR USING THE SAME 有权
    SCRUBBER BOX及其使用方法

    公开(公告)号：US20080210258A1

    公开(公告)日：2008-09-04

    申请号：US12102846

    申请日：2008-04-14

    申请人： Joseph Yudovsky ,  Avi Tepman ,  Kenneth R. Reynolds ,  Younes Achkire ,  Dan A. Marohl ,  Steve G. Ghanayem ,  Alexander S. Polyak ,  Gary Ettinger ,  Haochuan Zhang ,  Hui Chen

    发明人： Joseph Yudovsky ,  Avi Tepman ,  Kenneth R. Reynolds ,  Younes Achkire ,  Dan A. Marohl ,  Steve G. Ghanayem ,  Alexander S. Polyak ,  Gary Ettinger ,  Haochuan Zhang ,  Hui Chen

    IPC分类号： B08B7/00 ,  A47L25/00

    CPC分类号： H01L21/67046 ,  B08B1/04

    摘要： A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

    摘要翻译： 提供了一种洗涤器箱，其包括适于接收用于清洁的基底的罐，支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达，其安装到每个支撑件上并适于旋转洗涤器 电刷，支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座，经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器 以便允许洗涤器刷子基本上同时实现或断开与基板的接触，以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器，以便调节洗涤器之间的束缚角度 刷子

    Staggered target tiles
    7.
    发明申请
    Staggered target tiles 有权

    公开(公告)号：US20060006058A1

    公开(公告)日：2006-01-12

    申请号：US10888383

    申请日：2004-07-09

    申请人： Avi Tepman

    发明人： Avi Tepman

    IPC分类号： C23C14/32

    CPC分类号： C23C14/3407

    摘要： A sputtering target, particularly for sputter depositing a target material onto large rectangular panels, in which a plurality of target tiles are bonded to a backing plate in a two-dimensional non-rectangular array such that the tiles meet at interstices of no more than three tile, thus locking the tiles against excessive misalignment during bonding. The rectangular tiles may be arranged in staggered rows or in a herringbone or zig-zag pattern. Hexagonal and triangular tiles also provide many of the advantages of the invention.

    Clamshell and small volume chamber with fixed substrate support
    8.
    发明申请
    Clamshell and small volume chamber with fixed substrate support 审中-公开
    蛤壳式和小容积室具有固定衬底支撑

    公开(公告)号：US20050139160A1

    公开(公告)日：2005-06-30

    申请号：US11059846

    申请日：2005-02-16

    申请人： Lawrence Lei ,  Alfred Mak ,  Gwo-Chuan Tzu ,  Avi Tepman ,  Ming Xi ,  Walter Glenn

    发明人： Lawrence Lei ,  Alfred Mak ,  Gwo-Chuan Tzu ,  Avi Tepman ,  Ming Xi ,  Walter Glenn

    IPC分类号： C23C16/44 ,  C23C16/455 ,  H01L21/00 ,  C23C16/00

    CPC分类号： C23C16/45565 ,  C23C16/4412 ,  C23C16/45521 ,  C23C16/45574 ,  H01L21/6719

    摘要： Embodiments of the present invention generally relate to a small volume chamber with a substrate support. One embodiment of a processing chamber includes a first assembly having a substrate support, a pumping ring disposed around a perimeter of the substrate receiving surface, and a gas distribution assembly disposed over the substrate support. The chamber may further include a gas distribution assembly disposed over the substrate support. The first assembly and the gas distribution assembly can be selectively positioned between an open position and a closed position.

    摘要翻译： 本发明的实施例通常涉及具有基板支撑件的小容积室。 处理室的一个实施例包括具有衬底支撑件的第一组件，围绕衬底接收表面的周边设置的泵送环以及设置在衬底支撑件上方的气体分配组件。 该腔室还可包括设置在衬底支撑件上方的气体分配组件。 第一组件和气体分配组件可以选择性地定位在打开位置和关闭位置之间。

    Cooling system for magnetron sputtering apparatus
    9.
    发明授权
    Cooling system for magnetron sputtering apparatus 有权
    磁控溅射装置冷却系统

    公开(公告)号：US06881310B2

    公开(公告)日：2005-04-19

    申请号：US10655949

    申请日：2003-09-05

    申请人： Avi Tepman

    发明人： Avi Tepman

    IPC分类号： H01J37/34 ,  C23C14/35

    CPC分类号： H01J37/3497 ,  H01J37/3405

    摘要： Apparatus and method for cooling a magnetron sputtering apparatus. More particularly, a system including a stationary conduit, a hollow drive shaft rotatably coupled to the stationary conduit, and a magnetron coupled to the hollow drive shaft.

    摘要翻译： 用于冷却磁控管溅射装置的装置和方法。 更具体地，包括固定导管，可旋转地联接到固定导管的中空驱动轴和耦合到中空驱动轴的磁控管的系统。

    Robot blade with dual offset wafer supports
    10.
    发明授权
    Robot blade with dual offset wafer supports 失效
    具有双偏移晶片支架的机器人刀片

    公开(公告)号：US06722834B1

    公开(公告)日：2004-04-20

    申请号：US08946920

    申请日：1997-10-08

    申请人： Avi Tepman

    发明人： Avi Tepman

    IPC分类号： B44C122

    CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10S414/135

    摘要： A robot blade and a method of using the robot blade for transferring objects, namely substrates, through a process system, the robot blade comprising an upper platform having a first object supporting surface and a lower platform having a second object supporting surface. The robot blade is mounted onto a moveable member, and the assembly facilitates substrate transfers, such as removal of a processed substrate and insertion of an unprocessed substrate within a processing chamber through a single entry of the robot blade into the processing chamber.

    摘要翻译： 一种机器人刀片和使用所述机器人刀片用于通过处理系统传送物体即基底的方法，所述机器人刀片包括具有第一物体支撑表面的上平台和具有第二物体支撑表面的下平台。 机器人刀片安装在可移动构件上，并且组件便于衬底转移，例如移除经处理的衬底并且通过机器人刀片的单个进入到处理室中的未处理衬底在处理室内的插入。