公开(公告)号：US5543683A

公开(公告)日：1996-08-06

申请号：US343803

申请日：1994-11-21

申请人： Duane A. Haven ,  Chungdee Pong

发明人： Duane A. Haven ,  Chungdee Pong

IPC分类号： H01J9/24 ,  H01J29/02 ,  H01J29/08 ,  H01J29/32 ,  H01J29/86 ,  H01J31/12 ,  H01J29/18

CPC分类号： H01J9/242 ,  H01J29/085 ,  H01J29/327 ,  H01J29/864 ,  H01J31/127 ,  H01J2329/8625 ,  H01J2329/863 ,  H01J2329/8665

摘要： A faceplate for a field emission display includes a substrate defining a faceplate interior side. Pluralities of phosphor pixels are disposed on the faceplate interior side. A black matrix grid is formed of column and row guard bands on the faceplate interior side. At least one wall gripper is formed in a column or row guard band, with the wall gripper adapted to receive a spacer wall and mount it relative to the pluralities of phosphor pixels. The faceplate can include a faceplate fiducial that optically aligns to a corresponding backplate fiducial. A spacer wall is positioned in the wall gripper and mounted relative to a corresponding locator formed on a backplate interior side. The wall gripper includes a receiving trench that is positioned adjacent to a plurality of deformation accommodation gaps.

摘要翻译： 用于场发射显示器的面板包括限定面板内侧的基板。 多个荧光体像素设置在面板内侧。 黑矩阵网格由面板内侧的列和排保护带形成。 至少一个壁夹具形成在柱或排保护带中，壁夹具适于接收间隔壁并相对于多个磷光体像素安装它。 面板可以包括与对应的背板基准光学对准的面板基准。 间隔壁定位在壁夹具中并且相对于形成在背板内侧上的对应定位器安装。 所述壁夹具包括邻近多个变形容纳间隙定位的接纳沟槽。

公开(公告)号：US5578899A

公开(公告)日：1996-11-26

申请号：US343075

申请日：1994-11-21

申请人： Duane A. Haven ,  Chungdee Pong

发明人： Duane A. Haven ,  Chungdee Pong

IPC分类号： H01J29/02 ,  H01J29/08 ,  H01J29/86 ,  H01J31/12 ,  H01J29/18

CPC分类号： H01J29/085 ,  H01J29/864 ,  H01J31/127 ,  H01J2329/8625 ,  H01J2329/863 ,  H01J2329/8665

摘要： A field emission display device has a faceplate and a backplate. The faceplate includes a faceplate interior side with an active region made of a plurality of phosphor pixel elements; and the backplate has a backplate interior side with a plurality of field emitters. Sidewalls are positioned between the faceplate and the backplate, to form an enclosed sealed envelope between the sidewalls, backplate interior side and the faceplate interior side. At least one spacer wall in the envelope supports the backplate and the faceplate against forces acting in a direction toward the envelope. At least one internal structure fixes and constrains the faceplate and the backplate, and aligns a plurality of phosphor pixels with corresponding field emitters. Additionally, the faceplate can include at least one faceplate fiducial, and the backplate include a corresponding backplate fiducial. The faceplate fiducial is optically aligned with the backplate fiducial. First, the spacer wall is positioned in the wall gripper. The faceplate and backplate fiducials are then optically aligned, and the spacer wall then introduced into the locator. Phosphor pixels are aligned with their corresponding field emitters. There is no need for external fixturing devices in the high temperature bonding and sealing processes of the display.

摘要翻译： 场致发射显示装置具有面板和背板。 面板包括具有由多个磷光体像素元件制成的有源区域的面板内侧; 并且背板具有带有多个场发射器的背板内侧。 侧壁位于面板和背板之间，在侧壁，背板内侧和面板内侧之间形成封闭的密封外壳。 信封中的至少一个间隔壁支撑背板和面板，以抵抗朝向信封的方向作用的力。 至少一个内部结构固定并限制面板和背板，并且将多个磷光体像素与对应的场发射器对准。 此外，面板可以包括至少一个面板基准，并且背板包括相应的背板基准。 面板基准面与背板基准光学对准。 首先，间隔壁位于壁夹具中。 然后将面板和背板基准光学校准，然后将间隔壁引入定位器。 荧光体像素与其对应的场发射器对准。 在显示器的高温粘合和密封过程中不需要外部固定装置。

公开(公告)号：US06225737B1

公开(公告)日：2001-05-01

申请号：US09397790

申请日：1999-09-16

申请人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

发明人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

IPC分类号： H01J2902

CPC分类号： H01J61/305 ,  H01J9/185 ,  H01J9/242 ,  H01J9/261 ,  H01J29/028 ,  H01J29/864 ,  H01J31/123 ,  H01J2329/863 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8665

摘要： A flat panel display and a method for forming a flat panel display. In one embodiment, the flat panel display includes a wall which is held in place by a structure formed either on the faceplate or on the backplate. In one embodiment the supporting structure is formed by two adjacent walls that form a slot which mechanically restrains the wall. In another embodiment a slot is formed within the faceplate and the walls of the slot mechanically restrain the wall. In one embodiment wall segments are inserted into supporting structures that mechanically restrain each wall segment. In another embodiment a UV curable or a heat curable adhesive is used to maintain walls in their proper alignment and position. In yet another embodiment a conductive material is melted so as to bond conductive lines located on the wall and conductive lines located on the faceplate. This bond electrically connects the conductive lines located on the wall and the conductive lines located on the faceplate and maintains the wall in the proper alignment. The present invention eliminates the need for feet which attach to individual walls for maintaining the walls in the proper alignment.

摘要翻译： 平板显示器和平板显示器的形成方法。 在一个实施例中，平板显示器包括通过形成在面板上或背板上的结构保持在适当位置的壁。 在一个实施例中，支撑结构由两个相邻的壁形成，其形成机械地限制壁的槽。 在另一个实施例中，在面板内形成槽，并且槽的壁机械地限制壁。 在一个实施例中，壁段插入到机械地限制每个壁段的支撑结构中。 在另一个实施方案中，使用UV可固化或可热固化的粘合剂来保持壁的正确对准和位置。 在另一个实施例中，导电材料被熔​​化以便粘合位于壁上的导电线和位于面板上的导电线。 该接合电连接位于壁上的导电线和位于面板上的导电线，并使壁保持正确的对准。 本发明消除了对连接到各个壁的脚的需要，以保持壁的适当对准。

公开(公告)号：US06356013B1

公开(公告)日：2002-03-12

申请号：US09397791

申请日：1999-09-16

申请人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

发明人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

IPC分类号： H01J2918

CPC分类号： H01J29/028 ,  H01J9/185 ,  H01J9/242 ,  H01J29/864 ,  H01J61/305 ,  H01J2329/863 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8665

摘要： A flat panel display and a method for forming a flat panel display. In one embodiment, the flat panel display includes a wall which is held in place by a structure formed either on the faceplate or on the backplate. In one embodiment the supporting structure is formed by two adjacent walls that form a slot which mechanically restrains the wall. In another embodiment a slot is formed within the faceplate and the walls of the slot mechanically restrain the wall. In one embodiment wall segments are inserted into supporting structures that mechanically restrain each wall segment. In another embodiment a UV curable or a heat curable adhesive is used to maintain walls in their proper alignment and position. In yet another embodiment a conductive material is melted so as to bond conductive lines located on the wall and conductive lines located on the faceplate. This bond electrically connects the conductive lines located on the wall and the conductive lines located on the faceplate and maintains the wall in the proper alignment. The present invention eliminates the need for feet which attach to individual walls for maintaining the walls in the proper alignment.

摘要翻译： 平板显示器和平板显示器的形成方法。 在一个实施例中，平板显示器包括通过形成在面板上或背板上的结构保持在适当位置的壁。 在一个实施例中，支撑结构由两个相邻的壁形成，其形成机械地限制壁的槽。 在另一个实施例中，在面板内形成槽，并且槽的壁机械地限制壁。 在一个实施例中，壁段插入到机械地限制每个壁段的支撑结构中。 在另一个实施方案中，使用UV可固化或可热固化的粘合剂来保持壁的正确对准和位置。 在另一个实施例中，导电材料被熔​​化以便粘合位于壁上的导电线和位于面板上的导电线。 该接合电连接位于壁上的导电线和位于面板上的导电线，并使壁保持正确的对准。 本发明消除了对连接到各个壁的脚的需要，以保持壁的适当对准。

公开(公告)号：US06323590B1

公开(公告)日：2001-11-27

申请号：US09398369

申请日：1999-09-16

申请人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

发明人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

IPC分类号： H01J2902

CPC分类号： H01J61/305 ,  H01J9/185 ,  H01J9/242 ,  H01J9/261 ,  H01J29/028 ,  H01J29/864 ,  H01J31/123 ,  H01J2329/863 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8665

摘要： A flat panel display and a method for forming a flat panel display. In one embodiment, the flat panel display includes a wall which is held in place by a structure formed either on the faceplate or on the backplate. In one embodiment the supporting structure is formed by two adjacent walls that form a slot which mechanically restrains the wall. In another embodiment a slot is formed within the faceplate and the walls of the slot mechanically restrain the wall. In one embodiment wall segments are inserted into supporting structures that mechanically restrain each wall segment. In another embodiment a UV curable or a heat curable adhesive is used to maintain walls in their proper alignment and position. In yet another embodiment a conductive material is melted so as to bond conductive lines located on the wall and conductive lines located on the faceplate. This bond electrically connects the conductive lines located on the wall and the conductive lines located on the faceplate and maintains the wall in the proper alignment. The present invention eliminates the need for feet which attach to individual walls for maintaining the walls in the proper alignment.

公开(公告)号：US06582617B1

公开(公告)日：2003-06-24

申请号：US09302170

申请日：1999-04-29

申请人： Chungdee Pong

发明人： Chungdee Pong

IPC分类号： B44C122

CPC分类号： H01L21/31116 ,  H01J9/025 ,  H01J2237/32 ,  H01J2237/334 ,  H01L21/31144 ,  H01L21/32136 ,  H01L21/32139

摘要： Provided is a method of etching an etch layer using a polycarbonate layer as a mask. The method includes placing an etch structure in a reaction chamber, the etch structure including an etch layer underlying a polycarbonate layer, the polycarbonate layer having apertures. The etch layer is then etched using a low-pressure high density plasma generate at a pressure in the range of approximately 1 to 30 millitorr where the ionized particle concentration is at least 1011 ions/cm3 and where the ionized particle concentration is substantially equal throughout the volume of the reaction chamber. To increase the etch rate, the etch structure can be cooled or biased. To decrease the etch rate, an inert gas can be added to the process gas mixture used to form the plasma.

摘要翻译： 提供了使用聚碳酸酯层作为掩模蚀刻蚀刻层的方法。 该方法包括在反应室中放置蚀刻结构，该蚀刻结构包括聚碳酸酯层下面的蚀刻层，聚碳酸酯层具有孔。 然后使用在约1至30毫托的范围内的压力下产生的低压高密度等离子体蚀刻蚀刻层，其中电离粒子浓度为至少1011个离子/ cm 3，并且其中电离粒子浓度基本相等 反应室的体积。 为了提高蚀刻速率，蚀刻结构可被冷却或偏置。 为了降低蚀刻速率，可以向用于形成等离子体的工艺气体混合物中加入惰性气体。

公开(公告)号：US6140762A

公开(公告)日：2000-10-31

申请号：US277331

申请日：1999-03-26

申请人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

发明人： Chungdee Pong ,  John D. Porter ,  Theodore S. Fahlen ,  Christopher J. Curtin ,  Robert G. Neimeyer ,  Paul N. Ludwig

IPC分类号： H01J9/18 ,  H01J9/24 ,  H01J9/26 ,  H01J17/16 ,  H01J29/02 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H01J61/30 ,  H01J19/42

CPC分类号： H01J61/305 ,  H01J29/028 ,  H01J29/864 ,  H01J31/123 ,  H01J9/185 ,  H01J9/242 ,  H01J9/261 ,  H01J2329/863 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8665

摘要： A flat panel display and a method for forming a flat panel display. In one embodiment, the flat panel display includes a wall which is held in place by a structure formed either on the faceplate or on the backplate. In one embodiment the supporting structure is formed by two adjacent walls that form a slot which mechanically restrains the wall. In another embodiment a slot is formed within the faceplate and the walls of the slot mechanically restrain the wall. In one embodiment wall segments are inserted into supporting structures that mechanically restrain each wall segment. In another embodiment a UV curable or a heat curable adhesive is used to maintain walls in their proper alignment and position. In yet another embodiment a conductive material is melted so as to bond conductive lines located on the wall and conductive lines located on the faceplate. This bond electrically connects the conductive lines located on the wall and the conductive lines located on the faceplate and maintains the wall in the proper alignment. The present invention eliminates the need for feet which attach to individual walls for maintaining the walls in the proper alignment.

摘要翻译： 平板显示器和平板显示器的形成方法。 在一个实施例中，平板显示器包括通过形成在面板上或背板上的结构保持在适当位置的壁。 在一个实施例中，支撑结构由两个相邻的壁形成，其形成机械地限制壁的槽。 在另一个实施例中，在面板内形成槽，并且槽的壁机械地限制壁。 在一个实施例中，壁段插入到机械地限制每个壁段的支撑结构中。 在另一个实施方案中，UV可固化或可热固化的粘合剂用于将壁保持在其适当的对准和位置。 在另一个实施例中，导电材料被熔​​化以便粘合位于壁上的导电线和位于面板上的导电线。 该接合电连接位于壁上的导电线和位于面板上的导电线，并使壁保持正确的对准。 本发明消除了对连接到各个壁的脚的需要，以保持壁的适当对准。

公开(公告)号：US08101025B2

公开(公告)日：2012-01-24

申请号：US11363833

申请日：2006-02-27

申请人： Eu Jin Lim ,  Chungdee Pong ,  Changhun Lee ,  Mark Kawaguchi ,  Guowen Ding

发明人： Eu Jin Lim ,  Chungdee Pong ,  Changhun Lee ,  Mark Kawaguchi ,  Guowen Ding

IPC分类号： B08B7/04 ,  B08B7/00

CPC分类号： B08B3/08 ,  B08B7/0035 ,  C23F4/00 ,  H01L21/02071 ,  H01L21/31138 ,  H01L21/32138 ,  H01L28/60 ,  Y10S438/906

摘要： A method for controlling corrosion of a substrate is provided herein. In one embodiment, a method for controlling corrosion of a substrate includes the steps of providing a substrate having a patterned photoresist layer with a metallic residue disposed thereon; exposing the substrate to a hydrogen-based plasma to remove the metallic residue; and removing the photoresist. The metallic residue may comprise residue from etching at least one of aluminum or copper. The metallic residue may further comprise a halogen compound from etching a metal-containing layer with a halogen-based process gas. The hydrogen-based plasma may comprise hydrogen (H2) and may further comprise at least one of nitrogen (N2) and water (H2O) vapor. The hydrogen-based plasma may further comprise an inert gas, such as argon (Ar).

摘要翻译： 本发明提供一种控制基板腐蚀的方法。 在一个实施例中，一种用于控制衬底腐蚀的方法包括以下步骤：提供具有设置在其上的金属残留物的图案化光致抗蚀剂层的衬底; 将基底暴露于氢基等离子体以除去金属残余物; 并去除光致抗蚀剂。 金属残留物可以包含蚀刻铝或铜中的至少一种的残余物。 金属残留物还可以包含卤素化合物，其用卤素基工艺气体蚀刻含金属层。 氢基等离子体可以包含氢（H 2），并且还可以包含氮（N 2）和水（H 2 O）蒸气中的至少一种。 氢基等离子体还可以包含惰性气体，例如氩（Ar）。

公开(公告)号：US20060137710A1

公开(公告)日：2006-06-29

申请号：US11363833

申请日：2006-02-27

申请人： Eu Lim ,  Chungdee Pong ,  Changhun Lee ,  Mark Kawaguchi ,  Guowen Ding

发明人： Eu Lim ,  Chungdee Pong ,  Changhun Lee ,  Mark Kawaguchi ,  Guowen Ding

IPC分类号： B08B6/00 ,  C23F1/00

CPC分类号： B08B3/08 ,  B08B7/0035 ,  C23F4/00 ,  H01L21/02071 ,  H01L21/31138 ,  H01L21/32138 ,  H01L28/60 ,  Y10S438/906

摘要： A method for controlling corrosion of a substrate is provided herein. In one embodiment, a method for controlling corrosion of a substrate includes the steps of providing a substrate having a patterned photoresist layer with a metallic residue disposed thereon; exposing the substrate to a hydrogen-based plasma to remove the metallic residue; and removing the photoresist. The metallic residue may comprise residue from etching at least one of aluminum or copper. The metallic residue may further comprise a halogen compound from etching a metal-containing layer with a halogen-based process gas. The hydrogen-based plasma may comprise hydrogen (H2) and may further comprise at least one of nitrogen (N2) and water (H2O) vapor. The hydrogen-based plasma may further comprise an inert gas, such as argon (Ar).

摘要翻译： 本发明提供一种控制基板腐蚀的方法。 在一个实施例中，一种用于控制衬底腐蚀的方法包括以下步骤：提供具有设置在其上的金属残留物的图案化光致抗蚀剂层的衬底; 将基底暴露于氢基等离子体以除去金属残余物; 并去除光致抗蚀剂。 金属残留物可以包含蚀刻铝或铜中的至少一种的残余物。 金属残留物还可以包含卤素化合物，其用卤素基工艺气体蚀刻含金属层。 氢基等离子体可以包含氢（H 2 O 2），并且还可以包含氮（N 2/2）和水（H 2 H 2）中的至少一种 > O）蒸气。 氢基等离子体还可以包含惰性气体，例如氩（Ar）。

公开(公告)号：US06392750B1

公开(公告)日：2002-05-21

申请号：US09387632

申请日：1999-08-31

申请人： John E. Field ,  Donald J. Elloway ,  Chungdee Pong

发明人： John E. Field ,  Donald J. Elloway ,  Chungdee Pong

IPC分类号： G01N2147

CPC分类号： G03F7/70791 ,  G01B11/02

摘要： Scattered or/and transmitted light is employed to determine characteristics, including dimensional information, of an object (60) such as part (10) of a flat-panel display. The dimensional information includes the average diameter of openings (62) in the object, the average density of the openings, and the average thickness of a layer (64) of the object. Light-diffraction patterns are produced to determine characteristics, such as abnormalities (146 and 148), of crossing lines (140 and 142) in such an object.

摘要翻译： 使用散射或/和透射光来确定诸如平板显示器的部分（10）的物体（60）的特性，包括尺寸信息。 尺寸信息包括物体中的开口（62）的平均直径，开口的平均密度和物体的层（64）的平均厚度。 产生光衍射图案以确定这种物体中的交叉线（140和142）的特征，例如异常（146和148）。