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公开(公告)号：US20110206485A1
公开(公告)日：2011-08-25
申请号：US13059890
申请日：2009-08-21
CPC分类号： B65G47/646 , B65G47/644 , B65G47/645 , B65G49/064 , B65G2249/02 , C23C14/505 , C23C14/562 , C23C16/4588 , C23C16/545 , H01L21/67173 , H01L21/67271 , H01L21/67748 , Y10S414/139
摘要： A conveyor assembly suitable for use in a substrate processing system includes: at least one substrate carrier having a substrate-carrying surface configured to support at least one substrate; a processing track; a return track; a drive system configured to drive the substrate carrier along the processing track and the return track; and at least one swivel unit configured to pivot the substrate carrier around a substantially horizontal axis from a first orientation into a second orientation, and/or vice versa. Also provided is a method for conveying a substrate carrier including: providing a substrate carrier; positioning the substrate carrier in a first orientation; conveying the substrate carrier along a first track; and rotating the substrate carrier around a substantially horizontal axis into a second orientation.
摘要翻译： 适用于基板处理系统的输送机组件包括：至少一个基板载体，其具有构造成支撑至少一个基板的基板承载表面; 加工轨道 返回轨道 驱动系统，被配置为沿着所述处理轨道和所述返回轨道驱动所述衬底载体; 以及至少一个旋转单元，其构造成将基板载体围绕基本水平的轴线从第一取向枢转到第二取向，和/或反之亦然。 还提供了一种用于输送基板载体的方法，包括：提供基板载体; 将衬底载体定位在第一取向; 沿着第一轨道传送所述衬底载体; 以及将基底载体围绕基本上水平的轴线旋转成第二取向。
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公开(公告)号：US08528722B2
公开(公告)日：2013-09-10
申请号：US13059890
申请日：2009-08-21
IPC分类号： B65G47/64
CPC分类号： B65G47/646 , B65G47/644 , B65G47/645 , B65G49/064 , B65G2249/02 , C23C14/505 , C23C14/562 , C23C16/4588 , C23C16/545 , H01L21/67173 , H01L21/67271 , H01L21/67748 , Y10S414/139
摘要： A conveyor assembly suitable for use in a substrate processing system includes: at least one substrate carrier having a substrate-carrying surface configured to support at least one substrate; a processing track; a return track; a drive system configured to drive the substrate carrier along the processing track and the return track; and at least one swivel unit configured to pivot the substrate carrier around a substantially horizontal axis from a first orientation into a second orientation, and/or vice versa. Also provided is a method for conveying a substrate carrier including: providing a substrate carrier; positioning the substrate carrier in a first orientation; conveying the substrate carrier along a first track; and rotating the substrate carrier around a substantially horizontal axis into a second orientation.
摘要翻译： 适用于基板处理系统的输送机组件包括：至少一个基板载体，其具有构造成支撑至少一个基板的基板承载表面; 加工轨道 返回轨道 驱动系统，被配置为沿着所述处理轨道和所述返回轨道驱动所述衬底载体; 以及至少一个旋转单元，其构造成将基板载体围绕基本水平的轴线从第一取向枢转到第二取向，和/或反之亦然。 还提供了一种用于输送基板载体的方法，包括：提供基板载体; 将衬底载体定位在第一取向; 沿着第一轨道传送所述衬底载体; 以及将基底载体围绕基本上水平的轴线旋转成第二取向。
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