Abstract:
A differential pressure measuring cell comprises a measuring membrane; two opposing bodies; and one converter. The measuring membrane is arranged between the opposing bodies and is connected in a pressure-tight manner to the two opposing bodies, forming in each case one measuring chamber. The opposing bodies each have a pressure duct through which a pressure can be made to act upon the respective measuring chamber. The converter is provided in order to convert a deformation of the measuring membrane, which deformation is dependent upon a difference between the pressures, into an electrical signal; wherein the opposing bodies each have a chamber section oriented toward the measuring membrane and a rear wall section oriented away from the measuring membrane with, between these, a decoupling chamber. The chamber sections each have an equalizing duct between the measuring chamber and the decoupling chamber, wherein the decoupling chamber has a diameter that is at least as large as the diameter of the measuring chamber.
Abstract:
A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.
Abstract:
A differential pressure measuring cell comprises a measuring membrane; two opposing bodies; and one converter. The measuring membrane is arranged between the opposing bodies and is connected in a pressure-tight manner to the two opposing bodies, forming in each case one measuring chamber. The opposing bodies each have a pressure duct through which a pressure can be made to act upon the respective measuring chamber. The converter is provided in order to convert a deformation of the measuring membrane, which deformation is dependent upon a difference between the pressures, into an electrical signal; wherein the opposing bodies each have a chamber section oriented toward the measuring membrane and a rear wall section oriented away from the measuring membrane with, between these, a decoupling chamber. The chamber sections each have an equalizing duct between the measuring chamber and the decoupling chamber, wherein the decoupling chamber has a diameter that is at least as large as the diameter of the measuring chamber.
Abstract:
A pressure sensor comprising two parts connected with one another via an active braze joint manufactured by active hard soldering, or brazing, with an active hard solder, or braze, especially a pressure contactable, pressure-dependently elastically deformable, measuring membrane, especially a ceramic measuring membrane, and a platform, especially a ceramic platform, which are connected by an active braze joint connecting an outer edge of the measuring membrane (which covers a pressure chamber with an outer edge of an end of the platform facing the measuring membrane, whose measuring characteristics are improved in that the active braze joint has a coefficient of thermal expansion dependent on the dimensions of the active braze joint and on the materials of the parts and matched to a coefficient of thermal expansion of at least one of the parts, especially the measuring membrane.
Abstract:
A pressure measuring cell includes an elastic measuring membrane which is contactable with a first pressure on a first side and with a second pressure on a second side facing away from the first side. The measuring membrane is deflectable as a function of a difference between the first pressure and the second pressure, wherein the measuring membrane pressure-tightly isolates a first volume, which is facing the first side of the measuring membrane, from a second volume, which is facing the second side of the measuring membrane. The pressure measuring cell further includes a transducer for transducing the pressure dependent deflection of the measuring membrane into an electrical or optical signal. The measuring membrane has in the equilibrium state of the measuring membrane compressive stresses at least at the surface of the measuring membrane at least in a radial edge region, in which in the deflected state of the measuring membrane under pressure loading tensile stress maxima occur.
Abstract:
A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body (1), a measurement membrane (2), which is arranged on the counter body (1) and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode (7) arranged on the measurement membrane and at least one counter-body electrode (8, 9) arranged on the counter body (2), wherein the capacitance between the membrane electrode (7) and the counter-body electrode (8, 9) depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode (7) has a temperature-dependent impedance, wherein the operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode—particularly, the ohmic portion of the impedance of the membrane electrode.
Abstract:
A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The base body and/or the measuring membrane have/has a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane.
Abstract:
A method for producing a connection between two surfaces or surface sections of two ceramic parts comprises: provision of a first ceramic part and of a second ceramic part; provision of an active brazing solder material on at least one surface section of at least one of the ceramic parts; and heating the active brazing solder in a vacuum brazing process. The whole active brazing solder material is provided for connecting the first and the second ceramic part by a sputtering method, wherein at least one surface section of at least one of the ceramic parts, preferably of the two ceramic parts, is layered with a layer sequence of individual components of the active brazing solder material, wherein the average strength of the layers of an individual component of the active brazing solder is no more than 0.5%, in particular not more than 0.2%, preferably not more than 0.1% and especially preferably not more than 0.05% of the strength of the joining region.
Abstract:
A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.
Abstract:
An active brazing material for the energy-efficient production of active-brazed connections that consists of layer sequences arranged on top of one another, the layer sequences of which consist of layers arranged on top of on another, the layer sequences of which each comprise at least one layer of brazing material, wherein the layers of brazing material of each layer sequence each contain at least one component of a base active braze and, in conjunction with each other, contain all components of the base active braze, the layer sequences of which each comprise at least one first reaction layer consisting of a first reactant to which at least one second reaction layer is directly adjacent in the active brazing material and consists of a second reactant that exothermally reacts with the first reactant, wherein an enthalpy of formation of the exothermic reaction of the reactants is greater than or equal to 45 kJ/mol—in particular, greater than or equal to 50 kJ/mol.