Differential Pressure Measuring Cell
    1.
    发明申请

    公开(公告)号:US20170146418A1

    公开(公告)日:2017-05-25

    申请号:US15323481

    申请日:2015-06-08

    CPC classification number: G01L19/0618 G01L13/025 G01L15/00

    Abstract: A differential pressure measuring cell comprises a measuring membrane; two opposing bodies; and one converter. The measuring membrane is arranged between the opposing bodies and is connected in a pressure-tight manner to the two opposing bodies, forming in each case one measuring chamber. The opposing bodies each have a pressure duct through which a pressure can be made to act upon the respective measuring chamber. The converter is provided in order to convert a deformation of the measuring membrane, which deformation is dependent upon a difference between the pressures, into an electrical signal; wherein the opposing bodies each have a chamber section oriented toward the measuring membrane and a rear wall section oriented away from the measuring membrane with, between these, a decoupling chamber. The chamber sections each have an equalizing duct between the measuring chamber and the decoupling chamber, wherein the decoupling chamber has a diameter that is at least as large as the diameter of the measuring chamber.

    Capacitive, ceramic pressure-measuring cell and method for the production thereof
    2.
    发明申请
    Capacitive, ceramic pressure-measuring cell and method for the production thereof 有权
    电容式陶瓷压力测定电池及其制造方法

    公开(公告)号:US20160131546A1

    公开(公告)日:2016-05-12

    申请号:US14896470

    申请日:2014-05-19

    Abstract: A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.

    Abstract translation: 一种具有陶瓷测量膜和陶瓷计数器体的压力测量单元,其中所述测量膜以与所述测量膜和所述对置体之间形成压力室的方式与所述对置体接合。 压力测量单元还具有用于检测测量膜的压力变形的电容换能器,该电容式换能器具有布置在测量膜上的至少一个膜电极和相对体侧上的至少一个电极,其中根据 本发明至少一个膜电极包括氧化钛。

    Differential pressure measuring cell

    公开(公告)号:US10247631B2

    公开(公告)日:2019-04-02

    申请号:US15323481

    申请日:2015-06-08

    Abstract: A differential pressure measuring cell comprises a measuring membrane; two opposing bodies; and one converter. The measuring membrane is arranged between the opposing bodies and is connected in a pressure-tight manner to the two opposing bodies, forming in each case one measuring chamber. The opposing bodies each have a pressure duct through which a pressure can be made to act upon the respective measuring chamber. The converter is provided in order to convert a deformation of the measuring membrane, which deformation is dependent upon a difference between the pressures, into an electrical signal; wherein the opposing bodies each have a chamber section oriented toward the measuring membrane and a rear wall section oriented away from the measuring membrane with, between these, a decoupling chamber. The chamber sections each have an equalizing duct between the measuring chamber and the decoupling chamber, wherein the decoupling chamber has a diameter that is at least as large as the diameter of the measuring chamber.

    Pressure Sensor having a Joint of Active Braze

    公开(公告)号:US20180292282A1

    公开(公告)日:2018-10-11

    申请号:US15573959

    申请日:2016-05-10

    Abstract: A pressure sensor comprising two parts connected with one another via an active braze joint manufactured by active hard soldering, or brazing, with an active hard solder, or braze, especially a pressure contactable, pressure-dependently elastically deformable, measuring membrane, especially a ceramic measuring membrane, and a platform, especially a ceramic platform, which are connected by an active braze joint connecting an outer edge of the measuring membrane (which covers a pressure chamber with an outer edge of an end of the platform facing the measuring membrane, whose measuring characteristics are improved in that the active braze joint has a coefficient of thermal expansion dependent on the dimensions of the active braze joint and on the materials of the parts and matched to a coefficient of thermal expansion of at least one of the parts, especially the measuring membrane.

    Pressure measuring cell
    5.
    发明授权

    公开(公告)号:US09759623B2

    公开(公告)日:2017-09-12

    申请号:US14647527

    申请日:2013-10-29

    CPC classification number: G01L19/06 G01L9/0044 G01L19/0618

    Abstract: A pressure measuring cell includes an elastic measuring membrane which is contactable with a first pressure on a first side and with a second pressure on a second side facing away from the first side. The measuring membrane is deflectable as a function of a difference between the first pressure and the second pressure, wherein the measuring membrane pressure-tightly isolates a first volume, which is facing the first side of the measuring membrane, from a second volume, which is facing the second side of the measuring membrane. The pressure measuring cell further includes a transducer for transducing the pressure dependent deflection of the measuring membrane into an electrical or optical signal. The measuring membrane has in the equilibrium state of the measuring membrane compressive stresses at least at the surface of the measuring membrane at least in a radial edge region, in which in the deflected state of the measuring membrane under pressure loading tensile stress maxima occur.

    Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method
    6.
    发明申请
    Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method 有权
    具有至少一个温度传感器和压力测量方法的电容式压力测量单元

    公开(公告)号:US20160320256A1

    公开(公告)日:2016-11-03

    申请号:US15104008

    申请日:2014-11-14

    CPC classification number: G01L9/125 G01L9/0072 G01L9/12

    Abstract: A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body (1), a measurement membrane (2), which is arranged on the counter body (1) and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode (7) arranged on the measurement membrane and at least one counter-body electrode (8, 9) arranged on the counter body (2), wherein the capacitance between the membrane electrode (7) and the counter-body electrode (8, 9) depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode (7) has a temperature-dependent impedance, wherein the operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode—particularly, the ohmic portion of the impedance of the membrane electrode.

    Abstract translation: 一种压力传感器,包括操作电路和压力测量单元,所述测量单元包括相对体(1),测量膜(2),所述测量膜(2)布置在所述对置体(1)上并且可被待测压力变形,以及 电容换能器,其具有布置在测量膜上的至少一个膜电极(7)和布置在对置体(2)上的至少一个对体体电极(8,9),其中膜电极(7) )和对体电极(8,9)取决于测量膜的压力变形,其中至少膜电极(7)具有温度依赖性阻抗,其中操作电路被设计为至少感测 在所述至少一个对体电极和所述至少一个膜电极之间具有一个电容,并且基于至少一个电容提供压力测量值,并确定所述膜电极的阻抗,特别是所述 e电极的阻抗的欧姆部分。

    Pressure measurement cell
    7.
    发明授权

    公开(公告)号:US10585009B2

    公开(公告)日:2020-03-10

    申请号:US15532528

    申请日:2015-11-03

    Abstract: A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The base body and/or the measuring membrane have/has a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane.

    Method for producing a connection between two ceramic parts—in particular, of parts of a pressure sensor

    公开(公告)号:US10435330B2

    公开(公告)日:2019-10-08

    申请号:US15513320

    申请日:2015-08-19

    Abstract: A method for producing a connection between two surfaces or surface sections of two ceramic parts comprises: provision of a first ceramic part and of a second ceramic part; provision of an active brazing solder material on at least one surface section of at least one of the ceramic parts; and heating the active brazing solder in a vacuum brazing process. The whole active brazing solder material is provided for connecting the first and the second ceramic part by a sputtering method, wherein at least one surface section of at least one of the ceramic parts, preferably of the two ceramic parts, is layered with a layer sequence of individual components of the active brazing solder material, wherein the average strength of the layers of an individual component of the active brazing solder is no more than 0.5%, in particular not more than 0.2%, preferably not more than 0.1% and especially preferably not more than 0.05% of the strength of the joining region.

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