公开(公告)号：US20070144439A1

公开(公告)日：2007-06-28

申请号：US11530297

申请日：2006-09-08

申请人： Eric A. Englhardt ,  Michael R. Rice ,  Jeffrey C. Hudgens ,  Steve Hongkham ,  Jay D. Pinson ,  Mohsen Salek ,  Charles Carlson ,  William T. Weaver ,  Helen R. Armer

发明人： Eric A. Englhardt ,  Michael R. Rice ,  Jeffrey C. Hudgens ,  Steve Hongkham ,  Jay D. Pinson ,  Mohsen Salek ,  Charles Carlson ,  William T. Weaver ,  Helen R. Armer

IPC分类号： B65H1/00 ,  C23F1/00 ,  H01L21/306 ,  C23C16/00

CPC分类号： G03F7/70991 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67745

摘要： The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.

摘要翻译： 本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片 处理历史（或晶圆历史），减少占地面积。 在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案 感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。

公开(公告)号：US07819079B2

公开(公告)日：2010-10-26

申请号：US11530297

申请日：2006-09-08

申请人： Eric A. Englhardt ,  Michael R. Rice ,  Jeffrey C. Hudgens ,  Steve Hongkham ,  Jay D. Pinson ,  Mohsen Salek ,  Charles Carlson ,  William T Weaver ,  Helen R. Armer

发明人： Eric A. Englhardt ,  Michael R. Rice ,  Jeffrey C. Hudgens ,  Steve Hongkham ,  Jay D. Pinson ,  Mohsen Salek ,  Charles Carlson ,  William T Weaver ,  Helen R. Armer

IPC分类号： B05C13/02 ,  H01L21/677 ,  C23C14/00

CPC分类号： G03F7/70991 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67745

摘要： The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.

摘要翻译： 本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片 处理历史（或晶圆历史），减少占地面积。 在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案 感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。

公开(公告)号：US08020689B2

公开(公告)日：2011-09-20

申请号：US12430032

申请日：2009-04-24

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliot ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliot ,  Jeffrey C. Hudgens

IPC分类号： B65G47/34

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

公开(公告)号：US07503448B2

公开(公告)日：2009-03-17

申请号：US11554969

申请日：2006-10-31

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC分类号： B65G17/20

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

公开(公告)号：US20080187414A1

公开(公告)日：2008-08-07

申请号：US12100388

申请日：2008-04-09

申请人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  Y10S414/14

摘要： In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.

摘要翻译： 一方面，用于处理工具的基板装载站包括多个装载端口。 每个负载端口可操作地耦合到处理工具并且具有用于打开衬底载体的机构。 载体处理器将基板载体从工厂交换位置传送到负载端口，而不将载体放置在除负载端口之外的任何载体支撑位置上。 提供了许多其他方面。

公开(公告)号：US07367446B2

公开(公告)日：2008-05-06

申请号：US11554919

申请日：2006-10-31

申请人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael R. Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G17/02

CPC分类号： H01L21/67706 ,  B65G17/20 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/67778 ,  Y10S414/135

摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

摘要翻译： 根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。 第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。 该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。 还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。

公开(公告)号：US07221993B2

公开(公告)日：2007-05-22

申请号：US10764620

申请日：2004-01-26

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Vinay Shah ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Vinay Shah ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens

IPC分类号： G06F19/00

CPC分类号： H01L21/67727 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67778 ,  Y02P80/40 ,  Y02P90/86

摘要： In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种在小批量半导体器件制造设施内管理正在进行的工作的方法。 第一种方法包括提供具有（1）多个处理工具的小批量半导体器件制造设备; 和（2）适于在处理工具之间运输小批量衬底载体的高速运输系统。 该方法还包括：（1）增加小批量半导体器件制造设备内的低优先级衬底的平均周期时间，使小批量半导体器件制造设备内的预定工作保持在进行中; 和（2）减小小批量半导体器件制造设备内的高优先级衬底的平均周期时间，以便在小批量半导体器件制造设备内大致维持预定工作进行中的水平。 提供了许多其他方面。

公开(公告)号：US07156221B2

公开(公告)日：2007-01-02

申请号：US10987955

申请日：2004-11-12

申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

IPC分类号： B65G29/00

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

公开(公告)号：US07857570B2

公开(公告)日：2010-12-28

申请号：US12100388

申请日：2008-04-09

申请人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Martin R. Elliott ,  Michael R. Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G49/07

CPC分类号： H01L21/67775 ,  Y10S414/14

摘要： In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.

摘要翻译： 一方面，用于处理工具的基板装载站包括多个装载端口。 每个负载端口可操作地耦合到处理工具并且具有用于打开衬底载体的机构。 载体处理器将基板载体从工厂交换位置传送到负载端口，而不将载体放置在除负载端口之外的任何载体支撑位置上。 提供了许多其他方面。

公开(公告)号：US07594789B2

公开(公告)日：2009-09-29

申请号：US11838501

申请日：2007-08-14

申请人： Michael R. Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

发明人： Michael R. Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

IPC分类号： B65G17/02

CPC分类号： H01L21/6773 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/67778

摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种用于支撑衬底载体的第一装置。 第一装置包括适于联接到衬底载体主体和架空托架支架的架空输送凸缘。 架空输送法兰具有比第一侧宽的第一侧和与第一侧相对的第二侧。 提供了许多其他方面。